JPS5984843U - Carrier hanger for semiconductor manufacturing - Google Patents
Carrier hanger for semiconductor manufacturingInfo
- Publication number
- JPS5984843U JPS5984843U JP18162682U JP18162682U JPS5984843U JP S5984843 U JPS5984843 U JP S5984843U JP 18162682 U JP18162682 U JP 18162682U JP 18162682 U JP18162682 U JP 18162682U JP S5984843 U JPS5984843 U JP S5984843U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor manufacturing
- carrier hanger
- hanger
- bottom opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図はキャリアの一例を示す平面図及びＡ
−Ａ線に沿う断面図、第３図は従来のキャリアハンガの
液処理動作時の部分断面図、第４図及び第５図は本考案
の一実施例を示す各動作状態での部分断面図である。
１・・・・・・キャリア、２′・・・・・・キャリアハ
ンガ、３ ゛・・・・・・半導体ウェーハ、９・
・・・・・キャリア塔載部分、１１・・・・・・突起。
゛ 第４図 −
第５図−FIGS. 1 and 2 are a plan view showing an example of a carrier, and FIG.
3 is a partial sectional view of a conventional carrier hanger during liquid processing operation, and FIGS. 4 and 5 are partial sectional views of an embodiment of the present invention in each operating state. It is. 1...Carrier, 2'...Carrier hanger, 3'...Semiconductor wafer, 9.
...Carrier mounting part, 11...Protrusion.゛ Fig. 4 - Fig. 5 -
Claims (1)
る底部開口のキャリアを塔載するキャリアハンガにおい
て、キャリア塔載部分に塔載されたキャリアの底部開口
より各半導体ウェーハをキャリアに対して少し持ち上げ
る少くとも一条の突４ 起を設けたことを特徴とす
る半導体製造用キャリアノ・ンガ。
・１In a carrier hanger in which a carrier with a bottom opening is mounted to vertically align and support multiple semiconductor wafers, each semiconductor wafer is slightly lifted relative to the carrier through the bottom opening of the carrier mounted on the carrier mounting part. A carrier for semiconductor manufacturing, characterized in that it has at least one protrusion.
・1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18162682U JPS5984843U (en) | 1982-11-29 | 1982-11-29 | Carrier hanger for semiconductor manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18162682U JPS5984843U (en) | 1982-11-29 | 1982-11-29 | Carrier hanger for semiconductor manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5984843U true JPS5984843U (en) | 1984-06-08 |
Family
ID=30393531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18162682U Pending JPS5984843U (en) | 1982-11-29 | 1982-11-29 | Carrier hanger for semiconductor manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5984843U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019160954A (en) * | 2018-03-12 | 2019-09-19 | 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック | Substrate processing apparatus and substrate processing method |
-
1982
- 1982-11-29 JP JP18162682U patent/JPS5984843U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019160954A (en) * | 2018-03-12 | 2019-09-19 | 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック | Substrate processing apparatus and substrate processing method |
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