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JPS59218293A - Laser working device - Google Patents

Laser working device

Info

Publication number
JPS59218293A
JPS59218293A JP58091867A JP9186783A JPS59218293A JP S59218293 A JPS59218293 A JP S59218293A JP 58091867 A JP58091867 A JP 58091867A JP 9186783 A JP9186783 A JP 9186783A JP S59218293 A JPS59218293 A JP S59218293A
Authority
JP
Japan
Prior art keywords
laser beam
parallel
laser
working
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58091867A
Other languages
Japanese (ja)
Inventor
Toru Takahama
高浜 亨
Susumu Hoshinouchi
星之内 進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58091867A priority Critical patent/JPS59218293A/en
Publication of JPS59218293A publication Critical patent/JPS59218293A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0619Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams with spots located on opposed surfaces of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To enable easy parallel two-line working at an optional width by bisecting a laser beam, condensing respectively the beams, irradiating the same to a work piece from both side faces and driving working heads to adjust the spacing between the beams. CONSTITUTION:A laser beam 1 is bisected by a beam splitter and respective reflected and transmitted laser beams 1 are conducted via totally reflecting mirrors 3 to condenser lenses 4. The laser beams 1 condensed respectively by said lenses are irradiated onto both side surfaces of an upright work piece 7 by which parallel two-line working is simultaneously accomplished. The width of parallel two-line working to the work piece 7 is easily adjusted by moving respective working heads including the lenses 4, the mirrors 3, working head nozzles 5, etc. to a vertical direction by means of driving mechanisms 9. The parallel two-line working is thus accomplished with high quality.

Description

【発明の詳細な説明】 この発明は、レーザビーム全周いて任意のmt−有する
平行2線加工を行い得るレーザ加工装置に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser processing apparatus capable of performing parallel two-line processing having an arbitrary mt value around the entire circumference of a laser beam.

従来この徳の平行2線加工會行い傅るレーザ加工装置と
しては、第1図に示すものがあった。第1図は従来の平
行2線加工を行い得るレーザ加工装[を示す概略断面構
成図である。図において、1はレーザビーム、2はビー
ムスプリッタ、3は全反射鏡、4は集光レンズ、5は加
工へッドノ〆ル、6はサイドノズル、7は加工材、8は
)(ツクグレートである。
A conventional laser processing apparatus capable of performing parallel two-line processing with this virtue is shown in FIG. FIG. 1 is a schematic cross-sectional configuration diagram showing a conventional laser processing device capable of performing parallel two-line processing. In the figure, 1 is a laser beam, 2 is a beam splitter, 3 is a total reflection mirror, 4 is a condensing lens, 5 is a processing head nozzle, 6 is a side nozzle, 7 is a workpiece, and 8 is a be.

次に、上記第1図の動作について説明する。レーザ発振
器(図示しない)から照射されたレーザビーム1は、ビ
ームスプリッタ2によって2分割され、1本はビームス
プリッタ2により反射され、反射レーザビームとなって
鉛直下方向へ導かれ、他の1本はビームスプリッタ2を
透過し、透過レーザビームとなって全反射鏡3まで搬送
され、この全反射鏡3により反射されて鉛直下方向へ導
かれる。この様に、互いに平行する各反射及び透過レー
ザビームは、各々集光レンズ4によって加工材70表面
に集光される。レーザ加工時には、集光方向にガスを噴
射させると同時に、各集光レンズ4t−保饅するために
、それぞれに加工ヘソドノズル5を取シ付け、また、溶
接加工の場合には、同時に各々サイドノズル6から斜め
方向にカス會噴射させて加工を行う。加工材7がら透過
して来るレーザビームを散乱、吸収するために、バック
プレート8力(/J11工材7の下方に配設されている
Next, the operation shown in FIG. 1 will be explained. A laser beam 1 emitted from a laser oscillator (not shown) is split into two by a beam splitter 2, one beam is reflected by the beam splitter 2 and guided vertically downward as a reflected laser beam, and the other beam is is transmitted through the beam splitter 2, becomes a transmitted laser beam, and is conveyed to the total reflection mirror 3, where it is reflected and guided vertically downward. In this way, each reflected and transmitted laser beam parallel to each other is focused onto the surface of the workpiece 70 by the focusing lens 4. During laser processing, a processing head nozzle 5 is attached to each condenser lens 4t in order to simultaneously inject gas in the condensing direction and maintain the condensing lens 4t.In addition, in the case of welding processing, a side nozzle 5 is attached to each condenser lens 4t at the same time. Processing is performed by jetting the scraps in an oblique direction from 6. In order to scatter and absorb the laser beam transmitted through the workpiece 7, a back plate 8 is disposed below the workpiece 7.

また、直接加工の際には、加工ヘッドノズル5、あるい
は刀n工材7が相対的に移動する様にする。
Further, during direct machining, the machining head nozzle 5 or the knife and workpiece 7 are made to move relatively.

従来の平行2#j加工を行い得るレーザ加工装置は以上
の様に4gされているので、谷集光レンズ4の口径及び
その保持部材(図示しない〕の規制によって、加工材7
に輻約51以下の平行2IVil加工を行うことは非常
に離しいという欠点がめった。
Since the conventional laser processing device capable of performing parallel 2#j processing has a 4g beam as described above, the diameter of the valley condensing lens 4 and its holding member (not shown) are
Parallel 2IVil processing with a radius of about 51 or less rarely has the disadvantage that the distance is very large.

この発明は上記の様な従来のものの欠点全除去するため
になされたもので、レーザ発振器から照射されたレーザ
ビーム全反射レーザビーム及び透過レーザビームとに2
分割するビームスプリッタと、この分割された前記反射
レーザビーム及び透過レーザビームを、それぞれ相対す
る方向から集光するための来光レンズ及び全反射鏡と、
前1己反射レーザビーム及び透過レーザビームにそれぞ
れガスを噴射させるノズルと、来光位置を変えるための
前記集光レンズ、前記全反射鏡及び前記ノズルを移動さ
せる駆動機構とから成る構成?有し、加工材に対し、任
意の幅で、同時に平行2線加工を容易に、かつ高品質で
行うことができるレーザ加工装置を提供することを目的
としている。
This invention was made in order to completely eliminate the drawbacks of the conventional ones as described above.
a beam splitter for splitting, a light-coming lens and a total reflection mirror for focusing the split reflected laser beam and transmitted laser beam from opposite directions, respectively;
1. A configuration consisting of a nozzle that injects gas into each of the self-reflected laser beam and the transmitted laser beam, and a drive mechanism that moves the condensing lens, the total reflection mirror, and the nozzle to change the position of light arrival? It is an object of the present invention to provide a laser processing apparatus that can simultaneously perform parallel two-line processing on a workpiece at an arbitrary width easily and with high quality.

以下、この発明の実施例全図について説明する。Hereinafter, all the drawings of the embodiments of this invention will be explained.

第2図はこの発明の一実施例である平行2勝加工を行い
得るレーザ刃装置装置を示す断面414戟図で、第1図
と同一部分には同−符号音用いて表示してあシ、その詳
細な説明は省略する。図において、9は、集光レンズ4
.全反射鏡3及び加工ヘッドノズル5等を含む加工ヘッ
ドを移動させる加工ヘッド駆動機構であり、この加工ヘ
ッド駆動機構9を動作することにより、加工ヘッドは、
装置本体に対し、例えばダイヤフラム機構を介して任意
の位置に移動できる様にされている。また、谷反射レー
ザビーム及び透過レーザビームを、それぞれ相対する方
向から集光するために、各々の来光レンズ4.全反射鏡
3及び加工ヘッドノズル5等は、加工材7の両面側にそ
れぞれ配設されている。
FIG. 2 is a 414-section cross-sectional view showing a laser blade device capable of performing parallel two-win machining, which is an embodiment of the present invention. The same parts as in FIG. , a detailed explanation thereof will be omitted. In the figure, 9 is a condenser lens 4
.. This is a processing head drive mechanism that moves a processing head including a total reflection mirror 3, a processing head nozzle 5, etc., and by operating this processing head drive mechanism 9, the processing head can be moved.
It can be moved to any desired position relative to the main body of the device, for example, via a diaphragm mechanism. Further, in order to condense the valley reflected laser beam and the transmitted laser beam from opposite directions, each light coming lens 4. The total reflection mirror 3, the processing head nozzle 5, etc. are arranged on both sides of the workpiece 7, respectively.

次に、上記第2図の動作について説明する。レーザ発振
器(図示しないンがら照射されたレーザビーム1は、ビ
ームスグリツタ2によって2分割され、1本はビームス
グリツタ2にょシ反射され、反射レーザビームとなって
鉛直下方向へ導かれ、他の1本はビームスプリッタ2に
、a過し、透過レーザビームとなって全反W!3まで搬
送され、この全反射鏡3により反射されて鉛直下方向へ
導φがれる。この様に、互いに平行する各反射及び透過
レーザビームは、それぞれ全反射鏡3によう反射され、
光軸方向が変えられた平行する逆向きの2本のレーザビ
ームとされる。この平行する逆向きの2本のレーザビー
ムは、各々集光レンズ4によりそれぞれ集光された後、
直立状態に立った加工材70両側面上に照射される。そ
こで、加工材7を水平方向罠走行させれば、同時に平行
2線加工を行うことができる。この場合、加工材7に対
して行う平行2線加工の幅は、集光レンズ4.全反射鏡
3及び加工ヘッドノズル5等金含む各加工へラドを、上
下方向にそれぞれ移動することにより、容易に調蟹する
ことができる。
Next, the operation shown in FIG. 2 will be explained. A laser beam 1 emitted from a laser oscillator (not shown) is split into two by a beam sinter 2, one is reflected by the beam sinter 2, becomes a reflected laser beam, and is guided vertically downward, and the other One of the beams passes through the beam splitter 2, becomes a transmitted laser beam, is conveyed to the total anti-reflection W!3, is reflected by the total reflection mirror 3, and is guided vertically downward.In this way, The mutually parallel reflected and transmitted laser beams are each reflected by the total reflection mirror 3,
Two parallel laser beams whose optical axis directions have been changed are set in opposite directions. These two parallel and oppositely directed laser beams are each condensed by a condenser lens 4, and then
Irradiation is applied to both sides of the workpiece 70 that stands upright. Therefore, if the workpiece 7 is caused to travel in a horizontal direction, parallel two-line machining can be performed at the same time. In this case, the width of the parallel two-line machining performed on the workpiece 7 is the width of the condenser lens 4. By moving the total reflection mirror 3, processing head nozzle 5, etc. to each processing area including gold in the vertical direction, the processing can be easily performed.

第3図、第4図及び第5図は、この発明の他の実施例で
ある平行2線加工を行い得るレーザ加工装置を示す各断
面構成図である。第3図に示すものは、上記第2図に示
す装置で、直立状態に立てた加工材7を、横に倒して水
平状態に位置させた場合であシ、加工材7の上面及び下
面より、それぞれ平行する逆向きの2本のレーザビーム
を集光させる構成の装置でおる。また、第4図及び第5
図に示すものは、平行する逆向きの2本のレーザビーム
全、それぞれ集光レンズ4によシ加工材7の両側面上に
集光する際に、さらに、全反射鏡3を追加して置いて反
射することにより、平行する逆向きの2本のレーザビー
ムを各々直角方向に曲け、上記第2図及び第3図に示す
装置と同様に、加工材7の両側面に各レーザビームを集
光させる構成の装置である。上記第3図、第4図及び第
5図の動作についての詳細な説明は省略する。
FIGS. 3, 4, and 5 are cross-sectional configuration diagrams showing a laser processing apparatus capable of performing parallel two-line processing, which is another embodiment of the present invention. What is shown in Fig. 3 is the apparatus shown in Fig. 2 above, when the workpiece 7 that is standing upright is laid down sideways and placed in a horizontal position, and the upper and lower surfaces of the workpiece 7 are This device is configured to focus two parallel laser beams in opposite directions. Also, Figures 4 and 5
In the case shown in the figure, a total reflection mirror 3 is added when all of the two parallel and opposite laser beams are focused onto both sides of the workpiece 7 by the condenser lens 4. By placing the laser beams and reflecting them, the two parallel and oppositely directed laser beams are bent into perpendicular directions, and each laser beam is applied to both sides of the workpiece 7, similar to the apparatus shown in FIGS. 2 and 3 above. This is a device configured to condense light. A detailed explanation of the operations shown in FIGS. 3, 4, and 5 will be omitted.

以上の様に、この発明のレーザ加工装置によれば、レー
ザビームを2分割して得た互いに平行する反射レーザビ
ーム及び透過レーザビーム全、それぞれ相対する方向か
ら集光するための集光レンズ及び全反射鏡と、前記反射
レーザビーム及び透過レーザビームにそれぞれガスK1
−1射させるノズルと、集光位置を変えるための前記集
光レンズ。
As described above, according to the laser processing apparatus of the present invention, there is provided a condenser lens for condensing all of the mutually parallel reflected laser beam and transmitted laser beam obtained by dividing the laser beam into two from opposite directions. A total reflection mirror, and gas K1 is applied to the reflected laser beam and the transmitted laser beam, respectively.
- A nozzle for emitting light, and the condensing lens for changing the condensing position.

前記全反射鏡及び前gtノズル全移動させる駆動機構と
から成る構成としたので、加工材に対し、任意の幅で、
同時に平行2線加工、例えば並接合金浴接、スクライビ
ング、リボン切断等の加工を、極めて高い加工性能で容
易に行うことができるという優れた効果を奏するもので
ある。
Since the structure consists of the total reflection mirror and a drive mechanism that moves the entire front GT nozzle, it can be
At the same time, parallel two-wire processing, such as parallel welding metal bath welding, scribing, ribbon cutting, etc., can be easily performed with extremely high processing performance.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の平行2線加工を行い得るレーザ加工装置
を示す概略断面構成図、第2図はこの発明の一実施例で
ある平行2線加工を行い得るレーザ加工装置tを示す断
面構成図、第3図、第4図及び第5図は、この発明の池
の実施例である平行2祿加工を行い傅るレーザ加工装置
を示す谷−f面構成図である。 図において、■・・・レーザビーム、2・・・ビームス
グリツタ、3・・・全反射鏡、4・・・集光レンズ、5
・・・加工ヘッドノズル、6・・・サイドノズル、7・
・・刀日工材、8・・・バックグレート、9・・・カロ
エヘッド駆動機構でおる。 なお、図中、同一符号は同一、又は相当部分を示す。 代理人 大岩増雄 第2図 第3図
FIG. 1 is a schematic cross-sectional configuration diagram showing a conventional laser processing apparatus capable of performing parallel two-line processing, and FIG. 2 is a cross-sectional configuration diagram showing a laser processing apparatus t capable of performing parallel two-line processing, which is an embodiment of the present invention. 3, 4, and 5 are valley-f plane configuration diagrams showing a laser processing apparatus for performing parallel two-way processing, which is an embodiment of the present invention. In the figure, ■... Laser beam, 2... Beam sinter, 3... Total reflection mirror, 4... Condensing lens, 5
...Processing head nozzle, 6...Side nozzle, 7.
... Tonichi Kozai, 8... Back grade, 9... Kaloe head drive mechanism. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. Agent Masuo Oiwa Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims] レーザ発振器から照射されたレーザビームを反射レーザ
ビーム及び透過レーザビームとに2分割するビームスプ
リッタと、この分割された前記反射レーザビーム及び透
過レーザビームを、それぞれ相対する方向から集光する
ための集光レンズ及び全反射鏡と、前記反射レーザビー
ム及び透過レーザビームにそれぞれガス全噴射させるノ
ズルと、集光位置を変えるための前記集光レンズ、前記
全反射鏡及び前記ノズルを移動させる駆動機構とから成
る構成としたことを特徴とするレーザ加工装置。
A beam splitter that splits a laser beam irradiated from a laser oscillator into a reflected laser beam and a transmitted laser beam; and a condenser that focuses the divided reflected laser beam and transmitted laser beam from opposite directions. an optical lens and a total reflection mirror; a nozzle that fully injects gas into the reflected laser beam and the transmitted laser beam, respectively; and a drive mechanism that moves the condenser lens, the total reflection mirror, and the nozzle to change the focusing position. A laser processing device characterized by having a configuration consisting of.
JP58091867A 1983-05-25 1983-05-25 Laser working device Pending JPS59218293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58091867A JPS59218293A (en) 1983-05-25 1983-05-25 Laser working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58091867A JPS59218293A (en) 1983-05-25 1983-05-25 Laser working device

Publications (1)

Publication Number Publication Date
JPS59218293A true JPS59218293A (en) 1984-12-08

Family

ID=14038502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58091867A Pending JPS59218293A (en) 1983-05-25 1983-05-25 Laser working device

Country Status (1)

Country Link
JP (1) JPS59218293A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006092827A1 (en) * 2005-02-28 2006-09-08 Technical Co., Ltd. Multidirectional electromagnetic wave irradiation system of workpiece and laser material processing system employing it
WO2011055373A1 (en) * 2009-11-03 2011-05-12 The Secretary, Department Of Atomic Energy,Govt.Of India. Niobium based superconducting radio frequency (scrf) cavities comprising niobium components joined by laser welding; method and apparatus for manufacturing such cavities
US20170057018A1 (en) * 2015-08-28 2017-03-02 Chun-hao Li Double-directional machining laser machine tool

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006092827A1 (en) * 2005-02-28 2006-09-08 Technical Co., Ltd. Multidirectional electromagnetic wave irradiation system of workpiece and laser material processing system employing it
US7723703B2 (en) 2005-02-28 2010-05-25 Technical Co., Ltd. Multidirectional electromagnetic wave irradiation system of workpiece and laser material processing system employing it
WO2011055373A1 (en) * 2009-11-03 2011-05-12 The Secretary, Department Of Atomic Energy,Govt.Of India. Niobium based superconducting radio frequency (scrf) cavities comprising niobium components joined by laser welding; method and apparatus for manufacturing such cavities
US20170057018A1 (en) * 2015-08-28 2017-03-02 Chun-hao Li Double-directional machining laser machine tool
US9776285B2 (en) * 2015-08-28 2017-10-03 Chun-hao Li Double-directional machining laser machine tool

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