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JPS60213388A - Laser working device - Google Patents

Laser working device

Info

Publication number
JPS60213388A
JPS60213388A JP59067402A JP6740284A JPS60213388A JP S60213388 A JPS60213388 A JP S60213388A JP 59067402 A JP59067402 A JP 59067402A JP 6740284 A JP6740284 A JP 6740284A JP S60213388 A JPS60213388 A JP S60213388A
Authority
JP
Japan
Prior art keywords
workpiece
work
laser beam
laser
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59067402A
Other languages
Japanese (ja)
Inventor
Toru Takahama
高浜 亨
Susumu Hoshinouchi
星之内 進
Atsushi Fukada
篤 深田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59067402A priority Critical patent/JPS60213388A/en
Publication of JPS60213388A publication Critical patent/JPS60213388A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To prevent heating, etc. of an unnecessary part by disposing a work, bender mirrors, etc. in such a way that the optical axis of the laser beam irradiated to a work has an advance angle with the surface of the work. CONSTITUTION:The laser beam 1 is bisected by a beam splitter 2 and is conducted via plural bender mirrors 3 as parallel beams toward condenser lenses 4. Such beams are irradiated to the surface of the work 5 disposed with an inclination at a prescribed angle. The direction of the optical axis of the beam 1 has consequently the angle of advance alpha with the surface of the work 5 and the backward going of the light reflected from the work 5 to the incident optical path is obviated. The reflected light does not pass through the lenses 4 and therefore the heating of the unnecessary part and the operator's burn are prevented.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、レーザビームを被加工物の表面所定位置に
集光させることにより、穴あけ、切断、あるいは溶接な
どの加工を行なうレーザ加工装置に関するもので、特に
この発明L1ビームスプリッタを用いて同時に複数箇所
をレーザ加工するようにしたものにおいて、被加工物の
表面からの反射光が入射光路を逆行し、ビームスプリッ
タによって望ましくない方向に再度反射したp、または
透過して不必要な部分を加熱したり、あるいは作業員を
火傷させるようなことのないレーザ加工装置を提供しよ
うとするものである。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a laser processing device that performs processing such as drilling, cutting, or welding by focusing a laser beam on a predetermined position on the surface of a workpiece. In particular, when the L1 beam splitter of this invention is used to simultaneously laser process multiple locations, the reflected light from the surface of the workpiece travels backwards along the incident optical path and is reflected again in an undesirable direction by the beam splitter. It is an object of the present invention to provide a laser processing device that does not cause laser beams to pass through, heat unnecessary parts, or cause burns to workers.

〔従来技術〕[Prior art]

第1図および第2図はビームスグリツタを用いた従来の
レーザ加工装置を示す平面図と側面図である。(1)は
レーザ発振器(図示せず)から照射されたレーザビーム
、(2) fiレーザビーム(1)を2分割するビーム
スプリッタ、(3)は複数のペンダミラー、(4)は複
数の集光レンズ、(5)は被加工物、(6)は複数の加
工ヘッド、(7)は複数のノズルである。
1 and 2 are a plan view and a side view showing a conventional laser processing apparatus using a beam sinter. (1) is a laser beam irradiated from a laser oscillator (not shown), (2) a beam splitter that splits the fi laser beam (1) into two, (3) is a plurality of pender mirrors, and (4) is a plurality of condensing beams. A lens, (5) a workpiece, (6) a plurality of processing heads, and (7) a plurality of nozzles.

従来のレーザ加工装置は上記のように構成されているの
で、レーザ発振器(図示せず)から照射されたレーザビ
ーム(1)は、ビームスプリッタ(2)によって2分割
されるとともK、各ペンダミラー(3)によって隣接す
る複数の集光レンズ(4)に向って互いに並行するレー
ザビームとして導かれ、レーザビーム(1)の光軸と直
交する位置に置かれた被加工物(5)の加熱すべき表面
に集光される。そして、この集光部には各ノズル(7)
から空気や酸素ガスを吹き付けてレーザ加工を行なうも
のである。
Since the conventional laser processing device is configured as described above, the laser beam (1) irradiated from the laser oscillator (not shown) is split into two by the beam splitter (2), (3) to heat a workpiece (5) that is guided as a mutually parallel laser beam toward a plurality of adjacent condenser lenses (4) and placed at a position perpendicular to the optical axis of the laser beam (1). The light is focused on the desired surface. Each nozzle (7) is installed in this condensing part.
Laser processing is performed by blowing air or oxygen gas from a source.

従来のレーザ加工装置においては、第1図に示すように
、被加工物(5)の表面に照射したレーザビーム(1)
の反射光が入射光路を逆行してビームスプリッタ(2)
まで戻シ、レーザ発振器に向って進む反射ビームと、上
記入射光路から外れていく反射ビーム(I])とに分か
れるため、レーザ発振器の発振出力を不安定にしたり、
被加工物(5)の不必要り部分を加熱したり、あるいは
作業員を火傷させたりする欠点がある。
In a conventional laser processing device, as shown in Fig. 1, a laser beam (1) is irradiated onto the surface of a workpiece (5).
The reflected light travels backwards along the incident optical path and passes through the beam splitter (2).
When the laser beam returns to the oscillator, it is divided into a reflected beam (I) that travels toward the laser oscillator and a reflected beam (I) that deviates from the incident optical path, which may destabilize the oscillation output of the laser oscillator.
This method has the drawback of heating unnecessary parts of the workpiece (5) or causing burns to the worker.

〔発明の概要〕[Summary of the invention]

この発明は、かかる点に着目してなされたもので、被加
工物に照射されるレーザビームの光軸の方向が、被加工
物の表面に対して「前進角」を持つように被加工物を所
定角度位置に配置するか、あるいは、ビームスプリッタ
、ペンダミラー、または加工ヘッド擲を所定角度位置に
配置して、被加工物の表面からの反射光が入射光路を逆
行し、ビームスプリッタによって望ましくない方向に再
度反射したり、または透過してレーザ発振器の発振出力
を不安定にした夛、被加工物の不必要な部分を加熱した
シ、あるいは作業員を火傷させるようなことのないレー
ザ加工装置を提供しようとするものである。
This invention was made with attention to this point. at a predetermined angular position, or by placing a beam splitter, pender mirror, or processing head at a predetermined angular position so that reflected light from the workpiece surface reverses the incident optical path and is undesired by the beam splitter. Laser processing equipment that does not cause the oscillation output of the laser oscillator to become unstable by being reflected or transmitted again in the direction, heating unnecessary parts of the workpiece, or causing burns to workers. This is what we are trying to provide.

〔発明の実施例〕[Embodiments of the invention]

第6図〜第5図は何れもこの発明の一実施例を示すもの
で、第6図は平面図、第4図は側面図、第5図はレーザ
ビームの説明図で、各構成部材は上述した従来のもの(
第1図および第2図)と同一構成部材につき同一の符号
を付しである。ただし、第4図に示すように、照射され
る並行なレーザビーム(1)に対して被加工物(5)を
所定角度傾斜させて配置させた相違がある。このように
、被加工物(5)を所定角度傾斜させることにより、被
加工物(5)K照射されるレーザビーム(1)の光軸の
方向が被加工物(5)の表面に対して「前進角」(α)
を持つようになシ、被加工物(5)からの反射光は従来
のように入射光路に逆行するようなことがなく、シかも
、この場合の反射光は、各加工ヘッド(6)の集光レン
ズ(4)を通過しないため、必然的に散乱する特性を持
っており、きわめて短かい距離の伝搬でエネルギが減衰
するため、従来のように被加工物の不必要な部分を加熱
するようなことがない。なお、上述したレーザビーム(
1)の光軸の方向が被加工物(5)の表面に対して持つ
ようになった「前進角」(αLとは、第5図に示すよう
に1従来のレーザビームの光軸(o)に対して矢印方向
に移動する被加工物(5)の未加工部(8)から溶接部
(10の溶融部(9)に向ってr前進角J(α)だけレ
ーザビーム(1)t−傾斜させた角度を言い、もし、こ
れが「後進角」であると、レーザビーム(1)はすでに
溶融している溶融部(9)を更に不必要に温度上昇させ
ることになり、黙示有効に利用されないばかシでなく、
溶接方向の垂直面内で、レーザビーム(1)の光軸が傾
斜されると、溶接ビードは板厚方向から傾斜することに
なり好ましくない。
6 to 5 all show one embodiment of the present invention, FIG. 6 is a plan view, FIG. 4 is a side view, and FIG. 5 is an explanatory diagram of the laser beam, and each component is The conventional one mentioned above (
The same components as in FIGS. 1 and 2 are designated by the same reference numerals. However, as shown in FIG. 4, there is a difference in that the workpiece (5) is arranged at a predetermined angle with respect to the irradiated parallel laser beam (1). In this way, by tilting the workpiece (5) at a predetermined angle, the direction of the optical axis of the laser beam (1) irradiated to the workpiece (5)K is adjusted relative to the surface of the workpiece (5). "Advance angle" (α)
In this case, the reflected light from the workpiece (5) does not go back to the incident optical path as in the conventional case, but the reflected light from each processing head (6) Since it does not pass through the condensing lens (4), it is inevitably scattered, and the energy is attenuated by propagation over an extremely short distance, so it does not heat unnecessary parts of the workpiece as in the case of conventional methods. There is no such thing. Note that the laser beam (
The "advancing angle" (αL) that the direction of the optical axis of 1) has with respect to the surface of the workpiece (5) is ) The laser beam (1) t moves from the unprocessed part (8) of the workpiece (5) in the direction of the arrow to the molten part (9) of the welded part (10) by an advancing angle J(α). - Refers to the angle of inclination; if this is a "reverse advance angle", the laser beam (1) will further unnecessarily raise the temperature of the already melted molten part (9), and the implicit effect will be Don't be an idiot who won't be used,
If the optical axis of the laser beam (1) is tilted in a plane perpendicular to the welding direction, the weld bead will be tilted from the thickness direction, which is not preferable.

第6図および第7図に示す他の実施例は、上述した一実
施例のように被加工物(5)を傾斜させないで、ビーム
スプリッタ(2)、ペンダミラー(3)または加工ヘッ
ド(6)等を所定角度位置に傾斜させて被加工物(5)
に照射されるレーザビーム(1)の元軸の方向が、被加
工物(5)の表面に対して「前進角」(α)を持つよう
にしたもので、その作用効果は上述した一実施例と全く
同様でおる。
In other embodiments shown in FIGS. 6 and 7, the workpiece (5) is not tilted as in the above-mentioned embodiment, but the beam splitter (2), the pendulum mirror (3) or the processing head (6) is The workpiece (5) is tilted to a predetermined angle position.
The direction of the original axis of the laser beam (1) irradiated on the surface of the workpiece (5) has an "advancing angle" (α) with respect to the surface of the workpiece (5). It's exactly the same as the example.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、この発明によれば、被加工物(5)
に照射されるレーザビーム(1)の光軸の方向が被加工
物(5)の表面に対して「前進角」を持つようニ、被加
工物(5)、ビームスプリッタ(2)、またはペンダミ
ラー(3)、あるいは加工ヘッド(6)等を配置するよ
うにしたので、被加工物(5)の表面からの反射光全逆
行し、ビームスブリック(2)によって望ましくない方
向に再度反射したυ、または透過してレーザ発振器の発
振出力を不安定にしたり、被加工物の不必要な部分を加
熱したり、作業員を火傷させるようなことのない優れた
効果を有するものである。
As described above, according to the present invention, the workpiece (5)
The direction of the optical axis of the laser beam (1) irradiated to the workpiece (5), the beam splitter (2), or the pendamirror is adjusted so that the direction of the optical axis has an "advancing angle" with respect to the surface of the workpiece (5). (3), or because the processing head (6) etc. are arranged, the reflected light from the surface of the workpiece (5) goes all the way back, and is reflected again in an undesirable direction by the beam brick (2), υ, Or, it has an excellent effect of not transmitting it and destabilizing the oscillation output of the laser oscillator, heating unnecessary parts of the workpiece, or causing burns to workers.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図およびM2図は従来のレーザ加工装置を示すもの
で、第1図は平面図、第2図は側面図である。第6図〜
第5図は何れもこの発明の一実施例を示すもので、第6
図り平面図、第4図は側面図、第5図はレーザビームの
前進角の説明図である。第6図および第7図はこの発明
の他の実施例を示す平面図と側面図である。 図において、(1)Uレーザビーム、(2)はビームス
プリッタ、(3)はペンダミラー、(4)は集光レンズ
、(5)は被加工物、(6)は加工ヘッド、(7)はノ
ズルである。なお、図中同一符号は同一または相当部分
を示す。 代理人弁理士 木 村 三 朗 第1因 ++ 第2図 ← 第3図 り 第4図 第6図 手続補正書(自発) 昭和60年7114 日 特許庁長官殿 1、事f′1゛の表示 特願昭59−67402号2、
発明の名称 レーデ加工装置 3、補正をする者 6、補正の内容 (11明細書第3頁第4行の「空気」を「アルゴンガス
」と補正する。 (2)明細書第3頁第12行の「被加工物(5)の」を
削除する。 (3)明細書第4頁第5行の「被加工物の」を削除する
。 (4)明細書第4頁第12行の「説明図で、」を[前進
角の説明図で、」と補正する。 (5)明ms第5頁第6行の[被加工物のJを削除する
。 以 上
1 and M2 show a conventional laser processing apparatus, with FIG. 1 being a plan view and FIG. 2 being a side view. Figure 6~
Each of FIG. 5 shows an embodiment of the present invention.
FIG. 4 is a plan view, FIG. 4 is a side view, and FIG. 5 is an explanatory diagram of the advancing angle of the laser beam. FIGS. 6 and 7 are a plan view and a side view showing another embodiment of the present invention. In the figure, (1) is the U laser beam, (2) is the beam splitter, (3) is the pender mirror, (4) is the condenser lens, (5) is the workpiece, (6) is the processing head, and (7) is the It's a nozzle. Note that the same reference numerals in the figures indicate the same or corresponding parts. Representative Patent Attorney Sanro Kimura Cause 1 ++ Figure 2 ← Figure 3 Figure 4 Figure 6 Procedural amendment (voluntary) 7114/1985 To the Commissioner of the Japan Patent Office 1, Indication of matter f'1゛Special Gansho 59-67402 No. 2,
Name of the invention: Raded processing device 3, Person making the correction 6, Contents of the correction (11 “Air” on page 3, line 4 of the specification is corrected to “argon gas”. (2) Specification, page 3, line 12 Delete "of workpiece (5)" in the line. (3) Delete "workpiece" in line 5 of page 4 of the specification. (4) Delete "of workpiece (5)" in line 12 of page 4 of the specification. In the explanatory diagram, "" is corrected to "in the explanatory diagram of advance angle,". (5) Clear ms, page 5, line 6, [delete J of workpiece.

Claims (2)

【特許請求の範囲】[Claims] (1)ペンダミラーおよび加工ヘッドを介して被加工物
に照射されるレーザビームの光軸の方向が被加工物の表
面に対して「前進角」を持つように、被加工物若しくは
ペンダミラーまたは加工ヘッドを所定角度位置に配置し
たことを特徴とするレーザ加工装置。
(1) The workpiece or pender mirror or processing head should be set so that the direction of the optical axis of the laser beam irradiated onto the workpiece via the pender mirror and processing head has an "advance angle" with respect to the surface of the workpiece. A laser processing device characterized in that: is arranged at a predetermined angular position.
(2)被加工物に照射されるレーザビームをビームスプ
リッタによシ分割し、同時に複数箇所をレーザ加工する
よう圧したことを特徴とする特許請求の範囲第1項句記
載のレーザ加工装置。
(2) A laser processing apparatus according to claim 1, characterized in that a laser beam irradiated onto a workpiece is divided into two parts by a beam splitter, and pressure is applied to simultaneously perform laser processing on a plurality of locations.
JP59067402A 1984-04-06 1984-04-06 Laser working device Pending JPS60213388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59067402A JPS60213388A (en) 1984-04-06 1984-04-06 Laser working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59067402A JPS60213388A (en) 1984-04-06 1984-04-06 Laser working device

Publications (1)

Publication Number Publication Date
JPS60213388A true JPS60213388A (en) 1985-10-25

Family

ID=13343915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59067402A Pending JPS60213388A (en) 1984-04-06 1984-04-06 Laser working device

Country Status (1)

Country Link
JP (1) JPS60213388A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03207588A (en) * 1990-01-11 1991-09-10 Toshiba Corp Laser beam welding machine
JPH04127987A (en) * 1990-09-20 1992-04-28 Fanuc Ltd Laser beam machine
WO1999017385A1 (en) * 1997-09-30 1999-04-08 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a rectangular battery
JP2008272833A (en) * 2008-08-14 2008-11-13 Toppan Forms Co Ltd Laser beam machining system
CN101879658A (en) * 2001-08-03 2010-11-10 株式会社半导体能源研究所 Laser irradiating device, laser irradiating method, and semiconductor manufacture method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870767A (en) * 1981-10-19 1983-04-27 旭シユエ−ベル株式会社 Melt cutting of glass fiber fabric

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870767A (en) * 1981-10-19 1983-04-27 旭シユエ−ベル株式会社 Melt cutting of glass fiber fabric

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03207588A (en) * 1990-01-11 1991-09-10 Toshiba Corp Laser beam welding machine
JPH04127987A (en) * 1990-09-20 1992-04-28 Fanuc Ltd Laser beam machine
WO1999017385A1 (en) * 1997-09-30 1999-04-08 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a rectangular battery
US6264708B1 (en) 1997-09-30 2001-07-24 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a prismatic battery
CN1315205C (en) * 1997-09-30 2007-05-09 松下电器产业株式会社 Method of mfg. rectangular battery
CN101879658A (en) * 2001-08-03 2010-11-10 株式会社半导体能源研究所 Laser irradiating device, laser irradiating method, and semiconductor manufacture method
JP2008272833A (en) * 2008-08-14 2008-11-13 Toppan Forms Co Ltd Laser beam machining system

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