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JPS59144153A - Cooling structure for integrated circuit package - Google Patents

Cooling structure for integrated circuit package

Info

Publication number
JPS59144153A
JPS59144153A JP1835183A JP1835183A JPS59144153A JP S59144153 A JPS59144153 A JP S59144153A JP 1835183 A JP1835183 A JP 1835183A JP 1835183 A JP1835183 A JP 1835183A JP S59144153 A JPS59144153 A JP S59144153A
Authority
JP
Japan
Prior art keywords
heat sink
cooling
plate
substrate
conductive plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1835183A
Other languages
Japanese (ja)
Other versions
JPS644670B2 (en
Inventor
Yoichi Matsuo
洋一 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1835183A priority Critical patent/JPS59144153A/en
Publication of JPS59144153A publication Critical patent/JPS59144153A/en
Publication of JPS644670B2 publication Critical patent/JPS644670B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433Auxiliary members in containers characterised by their shape, e.g. pistons
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To improve the cooling efficiency while maintaining high maintainability by mounting a conductive plate formed with a groove to be engaged with a heat sink on a substrate, on which an integrated circuit package with a heat dissipating heat sink and mounting a cooling plate provided with a cooling coolant passage on the conductive plate. CONSTITUTION:A conductive plate 8 provided with a groove 8b to be engaged with a heat dissipating heat sink 4 is mounted at the prescribed interval through a spacer 7 on a substrate 1, on which an LSI package 2 having the heat sink 4 is disposed. A cooling plate 10 provided with a cooling coolant passage 10a is mounted on the plate 8. Then, it can be cooled more efficiently than air cooling. Since the prescribed small interval is provided between the heat sink 4 and the plate 8, unreasonable force is not applied to the package 2. Further, since it is not necessary to fill filler of high thermal conductivity between the heat sink 4 and the plate 8, the removal of the plate 8 can be facilitated, thereby providing high maintainability.

Description

【発明の詳細な説明】 本発明は基板にM載した業績回路パッケージを冷却する
ための冷却構造に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cooling structure for cooling a performance circuit package mounted on a board.

従来、プリント配線基板やセラミック基板前の基板に搭
載された大規模集積回路(LSI)パッケージ等の業績
回路パッケージを冷却する手取として、装置に送風機を
取付けて空気を送り込む強制空冷方式が多く採用されて
いる。しかし、近手累子自芽の業績匿の向上や索子の高
密度実装技術の進歩により、電力密度が大巾に肖くなり
、空冷方式では対応しきれなくなってきている。すなわ
ち、大量の熱を密果した内部から排出するために大風量
・高風圧の大型送風機が必要となるが、この大型送風機
は非常に大きな練音を発生し、装置設置室のを調器に対
し大風量が要求される等の欠点がある◎ 一方、空冷方式に対して液冷方式の方が冷却能力がずば
抜けて扁いことは周知の事実であるが、発熱部から冷媒
まで熱を効率良く伝達でき、かつLSIパッケージ実装
部と冷却部とヲ答易に涜脱できる構造はまだ提案されて
いない。
Traditionally, forced air cooling methods, in which a blower is attached to the equipment and blows air through it, have often been used to cool circuit packages such as large-scale integrated circuit (LSI) packages mounted on printed wiring boards or ceramic boards. ing. However, due to the improvement in the business performance of Yuko Chikate and the advancement of high-density packaging technology by Sakuko, the power density has become so large that it is no longer possible to keep up with air-cooled systems. In other words, a large blower with a large air volume and high pressure is required to exhaust a large amount of heat from the dense interior, but this large blower generates a very loud noise and can damage the equipment in the room where the equipment is installed. On the other hand, it has disadvantages such as requiring a large air volume ◎ On the other hand, it is a well-known fact that liquid cooling systems have a much smaller cooling capacity than air cooling systems, but they efficiently transfer heat from the heat generating part to the refrigerant. No structure has yet been proposed that allows for good transmission and allows easy separation of the LSI package mounting section and cooling section.

本発明の目的は温度降下が小さくかつ保守性の捩れだ液
冷方式の冷却構造を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a twisting liquid cooling type cooling structure that has a small temperature drop and is easy to maintain.

本発明の構造は、プリント配漉基板またはセラミック基
板等の基板に搭載され表面に放熱用ヒートシンクを持つ
複数の集積回路パッケージ全冷却するための冷却構造に
おいて、前記基板のパッケージ搭載面と対向しこの対向
面に前記ヒートシンクの外形と恍合する形状の複数の溝
が形成てれた平板と、前記基板と前記平板とを予め定め
た間隔を持たせて固定する固定手段と、冷却用冷媒全通
過させるために内部に設けた空間と該空間に前記冷媒を
注入するための注入口と前記空間から前記冷媒を排出す
るための排出口とをMしぼσ記平板の前記基板と対向し
ない面@JVC取シ付けた冷却板とを備えている。
The structure of the present invention is a cooling structure for completely cooling a plurality of integrated circuit packages mounted on a substrate such as a printed distribution board or a ceramic substrate and having a heat sink for heat dissipation on the surface. a flat plate having a plurality of grooves formed in a shape that matches the outer shape of the heat sink on an opposing surface; a fixing means for fixing the substrate and the flat plate at a predetermined interval; and a cooling refrigerant that completely passes through. The surface of the flat plate not facing the substrate @JVC It is equipped with an attached cooling plate.

次に本発明について図面を奈照して詳細に説明する◎ 第1図は本発明の一実施例を示す分S斜視図、第2図(
b)は第1図の組立後のA−A断面図、第2図(a)お
よび(C)はそれぞれ第2図(b)のC−C断面図およ
びB−B断面図である。
Next, the present invention will be explained in detail with reference to the drawings. ◎ Figure 1 is a perspective view of an embodiment of the present invention, and Figure 2 (
b) is a sectional view taken along the line AA after assembly in FIG. 1, and FIGS. 2(a) and 2(C) are sectional views taken along the line CC and BB in FIG. 2(b), respectively.

本実施例においては、複数枚の平板フィンを上部に持つ
ヒートシンク4がLSIパッケージ2の上面に半日また
は接層剤等の固看剤3により固定され、このLSIパッ
ケージ2は基板IK、二次元的に配置されている。基板
1の周辺部には固定枠5とスペーサ7とがネジ6全介し
て取付けられる〇さらに、スペーサ6と伝導板8とがネ
ジ9を介して固定される◎このとき、伝4板8Vc、形
成したガイド穴8aとスペーサ7に形成したガイドピン
7aとを保合させることにより精密に位置合せが行われ
る。ネジ9の頭部は伝導板に形成した座グリ穴8Cによ
り伝導板表面から突出しない。伝導板8のヒートシンク
4と対向する面側には、ヒートシンク4のフィンと対応
する位置にフィン厚み寸法よりやや巾寸法の大きい溝8
bが形成され、この位置合せが可能であるので、ssb
とヒートシンク4との間隙を非常に小さくすることがで
きる。
In this embodiment, a heat sink 4 having a plurality of flat fins on its upper part is fixed to the upper surface of an LSI package 2 with a fixing agent 3 such as a half-layer or adhesive. It is located in The fixed frame 5 and the spacer 7 are attached to the peripheral part of the board 1 through all the screws 6.Furthermore, the spacer 6 and the conductive plate 8 are fixed through the screws 9.At this time, the conductive plate 8Vc, Precise alignment is achieved by aligning the formed guide hole 8a with the guide pin 7a formed on the spacer 7. The head of the screw 9 does not protrude from the surface of the conductive plate due to the counterbore hole 8C formed in the conductive plate. On the side of the conductive plate 8 facing the heat sink 4, a groove 8 whose width is slightly larger than the fin thickness is formed at a position corresponding to the fin of the heat sink 4.
b is formed and this alignment is possible, so ssb
The gap between the heat sink 4 and the heat sink 4 can be made very small.

また・ヒートシンク4と伝導板8とが接触しないような
構造にできるため、LSIパッケージ2に無理な力が加
わることを防止できる。
Furthermore, since the heat sink 4 and the conductive plate 8 can be structured so as not to come into contact with each other, it is possible to prevent excessive force from being applied to the LSI package 2.

伝導板8の上面には、内部に流路10aを形成した冷却
板1oがネジ2を介して固定される。冷媒としては水ま
たは7レオンが用いられ、注入管11aから流れ込み、
流路10aを通過する過程でり、SIパッケージ2から
の発生熱全吸収して排出管10bから流れ出る。LSI
パッケージ2の発生熱は、LSIパッケージ2→固着剤
3→ヒートシンク4→伝導板8→冷却板10→冷媒、の
順に移動し、LSIパッケージ2は所定の温度に保たれ
る。
A cooling plate 1o having a flow path 10a formed therein is fixed to the upper surface of the conduction plate 8 via screws 2. Water or 7 Leon is used as the refrigerant, and flows from the injection pipe 11a,
During the process of passing through the flow path 10a, the heat generated from the SI package 2 is completely absorbed and flows out from the discharge pipe 10b. LSI
The heat generated in the package 2 moves in the order of LSI package 2 → adhesive 3 → heat sink 4 → conduction plate 8 → cooling plate 10 → coolant, and LSI package 2 is maintained at a predetermined temperature.

本実施例では、突気が介在するヒートシンク4と伝導板
8との間隙が小さいので、この間隙での温度降下を小さ
くでき、この結果、熱をヒートンが対向する面積に逆比
例するが、本実施例では、ヒートシンク4のフィンが#
8bの内周面と対向しているので前記対向面積はヒート
シンク表面積となシ、ヒートシンクが無いときより数十
倍大きくな9、その拡大比で温度降下を小さくできる。
In this embodiment, since the gap between the heat sink 4 and the conductive plate 8 where the air rush is present is small, the temperature drop in this gap can be reduced, and as a result, the heat is inversely proportional to the area where the heaton faces. In the embodiment, the fins of the heat sink 4 are #
Since it faces the inner circumferential surface of the heat sink 8b, the opposing area is the surface area of the heat sink, which is several tens of times larger than when there is no heat sink 9, and its enlargement ratio can reduce the temperature drop.

また、熱伝導率の艮い材料にエリ、伝導板8を形成し、
この伝導板8と冷却板lOとの接触面の仕上げに留意す
れば温度降下を十分小さくでき、この結果、多量の熱を
発生するLSIであっても定められた温度以下に維持で
きる。さらに、ヒートシンク4と伝導板8との間隙に熱
伝導率が閤い充填剤を元項する心安がないので、LSI
1じ埋のために伝導板8全答易に取9外すことが可能で
あり、修理および調整等が短時間で行なえる。
In addition, the conductive plate 8 is formed of a material with low thermal conductivity,
If attention is paid to the finish of the contact surface between the conductive plate 8 and the cooling plate 1O, the temperature drop can be sufficiently reduced, and as a result, even an LSI that generates a large amount of heat can be maintained at a predetermined temperature or lower. Furthermore, since the thermal conductivity is high in the gap between the heat sink 4 and the conductive plate 8, there is no peace of mind when using a filler.
Since the conductive plate 8 can be completely removed at once, repairs and adjustments can be made in a short time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例?示す分解斜視図、第2図(
b)は第1図のA−A断面図ならびに第2図(a)およ
び(9)はそれぞれ第2図(b)のC−C断面図および
B−B断面図で必る。 図に2bで、 1・・・・・・基板、2・・・・・・LSIパッケージ
、3・・・・・・固着剤、4・・・・・・ヒートシンク
、5・・・・・・固定枠、6・・・・・・ネジ、7・・
・・・・スペーサ、7a・・・・・・ガイドピン、8・
・・・・・伝導板、8a・−・・・・ガイド穴、8b・
・・・・・碑、8c・・・・・・座ぐシ穴、9・・・・
・・ネジ、10・・・・・・冷却板、10a・・・・・
・流路、lla・・・・・・注入管、llb・・・・・
・排出管、12・・・・・・ネジ。 穿′L昆
Is Fig. 1 an embodiment of the present invention? Exploded perspective view shown in Figure 2 (
b) is a sectional view taken along line AA in FIG. 1, and FIGS. 2(a) and (9) are sectional views taken along line C-C and line BB in FIG. 2(b), respectively. In the figure, 2b shows: 1... Board, 2... LSI package, 3... Adhesive, 4... Heat sink, 5... Fixed frame, 6...Screw, 7...
...Spacer, 7a...Guide pin, 8.
...Conduction plate, 8a...Guide hole, 8b.
...Monument, 8c...Zagushiana, 9...
...Screw, 10...Cooling plate, 10a...
・Flow path, lla...Injection pipe, llb...
・Discharge pipe, 12...screw. pier'L kun

Claims (1)

【特許請求の範囲】[Claims] プリント配線基板またはセラミック基板前の基板に搭載
され表面に放熱用ヒートシンクを持つ複数の業績回路パ
ッケージを冷却するための冷却構造において、前記基板
のパッケージ搭載面と対向しこの対向面に前記ヒートシ
ンクの外形の少なくとも一部と係合する形状の複数の溝
が形成された平板と、前記基板と前記平板とを予め定め
た間隔を持たせて固定する固定手段と、冷却用冷媒全通
過させるために内部に設けた空間と該空間に前記冷媒を
注入するための注入口と前記空間から前記冷媒を排出す
るための排出口とを有し前記平板の@記基板と対向しな
い面側に取り付けた冷却板とを備えたことをt#倣とす
る業績回路ノくツケージ冷却構造。
In a cooling structure for cooling a plurality of circuit packages mounted on a board in front of a printed wiring board or a ceramic board and having a heat sink for heat dissipation on the surface, the outer shape of the heat sink is provided on the opposite surface facing the package mounting surface of the board. a flat plate formed with a plurality of grooves shaped to engage at least a portion of the substrate; a fixing means for fixing the substrate and the flat plate at a predetermined interval; a cooling plate that has a space provided in the space, an injection port for injecting the refrigerant into the space, and a discharge port for discharging the refrigerant from the space, and is attached to a side of the flat plate that does not face the substrate; The performance circuit cage cooling structure is modeled after having the following features.
JP1835183A 1983-02-07 1983-02-07 Cooling structure for integrated circuit package Granted JPS59144153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1835183A JPS59144153A (en) 1983-02-07 1983-02-07 Cooling structure for integrated circuit package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1835183A JPS59144153A (en) 1983-02-07 1983-02-07 Cooling structure for integrated circuit package

Publications (2)

Publication Number Publication Date
JPS59144153A true JPS59144153A (en) 1984-08-18
JPS644670B2 JPS644670B2 (en) 1989-01-26

Family

ID=11969248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1835183A Granted JPS59144153A (en) 1983-02-07 1983-02-07 Cooling structure for integrated circuit package

Country Status (1)

Country Link
JP (1) JPS59144153A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133403A (en) * 1988-10-19 1992-07-28 Hitachi, Ltd. Cooling arrangement for semiconductor devices and method of making the same
CN109121337A (en) * 2018-09-29 2019-01-01 江苏汇鑫新能源汽车科技有限公司 A kind of controller for electric vehicle heat-dissipating casing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253547A (en) * 1975-10-28 1977-04-30 Ibm Gas enclosed type cooling apparatus
JPS57103337A (en) * 1980-12-19 1982-06-26 Hitachi Ltd Heat transfer connecting device and manufacture thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253547A (en) * 1975-10-28 1977-04-30 Ibm Gas enclosed type cooling apparatus
JPS57103337A (en) * 1980-12-19 1982-06-26 Hitachi Ltd Heat transfer connecting device and manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133403A (en) * 1988-10-19 1992-07-28 Hitachi, Ltd. Cooling arrangement for semiconductor devices and method of making the same
CN109121337A (en) * 2018-09-29 2019-01-01 江苏汇鑫新能源汽车科技有限公司 A kind of controller for electric vehicle heat-dissipating casing

Also Published As

Publication number Publication date
JPS644670B2 (en) 1989-01-26

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