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JPS5855636B2 - Thin film EL element - Google Patents

Thin film EL element

Info

Publication number
JPS5855636B2
JPS5855636B2 JP54133315A JP13331579A JPS5855636B2 JP S5855636 B2 JPS5855636 B2 JP S5855636B2 JP 54133315 A JP54133315 A JP 54133315A JP 13331579 A JP13331579 A JP 13331579A JP S5855636 B2 JPS5855636 B2 JP S5855636B2
Authority
JP
Japan
Prior art keywords
thin film
dielectric layer
light
light emitting
emitting layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54133315A
Other languages
Japanese (ja)
Other versions
JPS5657089A (en
Inventor
勝 吉田
敏夫 猪口
良亘 柿原
卓郎 山下
浩司 谷口
康一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP54133315A priority Critical patent/JPS5855636B2/en
Publication of JPS5657089A publication Critical patent/JPS5657089A/en
Publication of JPS5855636B2 publication Critical patent/JPS5855636B2/en
Expired legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は交流電界の印加に依ってEL(Electr。[Detailed description of the invention] The present invention uses EL (Electr) by applying an alternating electric field.

Lum1nescence )発光を呈する薄膜EL素
子の構造に関するものである。
Luminescence) This relates to the structure of a thin film EL element that emits light.

従来、交流動作の薄膜EL素子に関して、発光層に規則
的に高い電界(10’V/(m程度)を印加し、絶縁耐
圧、発光効率及び動作の安定性等を高めるために、0.
1〜2.0wt優のMn(あるいはCu s A /l
s B r等)をドープしたZnS。
Conventionally, for AC-operated thin film EL elements, a high electric field (about 10'V/(m)) is regularly applied to the light-emitting layer to improve dielectric strength, luminous efficiency, stability of operation, etc.
1 to 2.0 wt excellent Mn (or Cu s A /l
s B r etc.) doped with ZnS.

Zn5e等の半導体発光層をY2O,、T i 02等
の誘電体薄膜でサンドイッチした三層構造ZnS:Mn
(又はZn5e : Mn)EL素子が開発され、発光
諸特性の向上が確かめられている。
Three-layer structure ZnS:Mn in which a semiconductor light emitting layer such as Zn5e is sandwiched between dielectric thin films such as Y2O, Ti02, etc.
(or Zn5e:Mn) EL devices have been developed, and improvements in various light-emitting characteristics have been confirmed.

この薄膜EL素子は数KHzの交流電界印加によって高
輝度発光し、しかも長寿命であるという特徴を有してい
る。
This thin film EL element emits light with high brightness when an alternating current electric field of several KHz is applied, and is characterized by long life.

またこの薄膜EL素子の発光に関しては印加電圧を昇圧
していく過程と高電圧側より降圧していく過程で、同じ
印加電圧に対して発光輝度が異なるといったヒステリシ
ス特性を有していることが発見され、そしてこのヒステ
リシス特性ヲ有する薄膜EL素子に印加電圧を昇圧する
過程に於いて、光、電界、熱等が付与されると薄膜EL
素子はその強度に対応した発光輝度の状態に励起され、
光、電界、熱等を除去して元の状態に戻しても発光輝度
は高くなった状態で維持される、いわゆるメモリー現象
が表示技術の新たな利用分野を開拓するに到った。
It was also discovered that the light emission of this thin film EL element has a hysteresis characteristic in which the luminance of the light emitted by the same applied voltage differs in the process of increasing the applied voltage and in the process of decreasing the voltage from the high voltage side. In the process of increasing the applied voltage to a thin film EL element having hysteresis characteristics, when light, electric field, heat, etc. are applied, the thin film EL element has a hysteresis characteristic.
The element is excited to a state of luminescence brightness corresponding to its intensity,
The so-called memory phenomenon, in which the luminance remains high even when light, electric field, heat, etc. are removed and the original state is restored, has opened up a new field of application for display technology.

薄膜EL素子の1例としてZnS:Mn薄膜EL素子の
基本的構造を図面に示す。
The basic structure of a ZnS:Mn thin film EL device is shown in the drawing as an example of a thin film EL device.

添附図面に基いて薄膜EL素子の構造を具体的に説明す
ると、ガラス基板1上にl n203 。
The structure of the thin film EL element will be specifically explained based on the attached drawings.Ln203 is placed on a glass substrate 1.

SnO2等の透明電極2、さらにその上に積層してY2
O3,Ti02jA1208.Si、N、。
Transparent electrode 2 such as SnO2, further layered on top of Y2
O3, Ti02jA1208. Si, N,.

SiO□等からなる第1の誘電体層3がスパッタあるい
は電子ビーム蒸着法等により重畳形成されている。
A first dielectric layer 3 made of SiO□ or the like is formed in an overlapping manner by sputtering, electron beam evaporation, or the like.

第1の誘電体層3上にはZnS:Mn焼結ペレットを電
子ビーム蒸着することにより得られるZnS発光層4が
形成されている。
A ZnS light emitting layer 4 is formed on the first dielectric layer 3 by electron beam evaporation of ZnS:Mn sintered pellets.

この時蒸着用のZnS:Mn焼結ペレットには活性物質
となるMnが目的に応じた濃度に設定されたペレットが
使用される。
At this time, the ZnS:Mn sintered pellets used for vapor deposition are pellets in which Mn, which is an active substance, is set at a concentration depending on the purpose.

ZnS発光層4上には第1の誘電体層3と同様の材質か
らなる第2の誘電体層5が積層され、更にその上にA1
等から成る背面電極6が蒸着形成されている。
A second dielectric layer 5 made of the same material as the first dielectric layer 3 is laminated on the ZnS light emitting layer 4, and A1
A back electrode 6 is formed by vapor deposition.

透明電極2と背面電極6は交流電源7に接続され、薄膜
EL素子が駆動される。
The transparent electrode 2 and the back electrode 6 are connected to an AC power source 7, and the thin film EL element is driven.

電極2,6間にAC電圧を印加すると、ZnS発光層4
0両側の誘電体層3,5間に上記AC電圧が誘起される
ことになり、従ってZnS発光層4内に発生した電界に
よって伝導体に励起されかつ加速されて充分なエネルギ
ーを得た電子が、直接Mn発光センターを励起し、励起
されたMn発光センターが基底状態に戻る際に黄色の発
光を行なう。
When an AC voltage is applied between the electrodes 2 and 6, the ZnS light emitting layer 4
The above AC voltage is induced between the dielectric layers 3 and 5 on both sides of the ZnS light emitting layer 4. Therefore, the electric field generated in the ZnS light emitting layer 4 excites the electrons into the conductor, accelerates them, and obtains sufficient energy. , directly excites the Mn luminescent center, and emits yellow light when the excited Mn luminescent center returns to the ground state.

即ち高電界で加速された電子がZnS発光層4中の発光
センターであるZnサイトに入ったMn原子の電子を励
起し、基底状態に落ちる時、略々5800Aをピークに
幅広い波長領域で、強い発光を呈する。
That is, when the electrons accelerated by a high electric field excite the electrons of the Mn atoms that have entered the Zn site, which is the luminescence center in the ZnS luminescent layer 4, and fall to the ground state, a strong emission occurs in a wide wavelength range with a peak of approximately 5800 A. Exhibits luminescence.

上記の如き構造を有する薄膜EL素子はスペース・ファ
クタの利点を生かした平面薄型ディスプレイ・デバイス
として、文字及び図形を含むコンピューターの出力表示
端末機器その他種々の表示装置に文字、記号、静止画像
、動画像等の表示手段として利用することができる。
The thin film EL element having the structure described above can be used as a flat thin display device that takes advantage of the space factor to display characters, symbols, still images, moving images, etc. in computer output display terminal equipment and various other display devices that contain characters and figures. It can be used as a means of displaying images, etc.

平面薄型表示装置としての薄膜ELパネルは従来のブラ
ウン管(CRT)と比較して動作電圧が低く、同じ平面
型ディスプレイ・デバイスであるプラズマディスプレイ
パネル(FDP)と比較すれば重量や強度面で優れてお
り、液晶(LCD)に比べて動作可能温度範囲が広く、
応答速度が速い等多くの利点を有している。
Thin-film EL panels as flat flat display devices have a lower operating voltage than conventional cathode ray tubes (CRTs), and are superior in terms of weight and strength compared to plasma display panels (FDPs), which are also flat display devices. It has a wider operating temperature range than liquid crystal display (LCD).
It has many advantages such as fast response speed.

また純固体マトリックス型パネルとして使用できるため
動作寿命力脹く、そのアドレスの正確さとともにコンピ
ューター等の入出力表示手段として非常に有効なもので
ある。
In addition, since it can be used as a pure solid matrix type panel, its operating life is long and its address accuracy makes it extremely effective as an input/output display means for computers, etc.

本発明は上記の如く発光層と背面電極間に誘電体層が介
設された薄膜EL素子に於いて、誘電体層の膜厚を制御
することにより、誘電体層と発光層との界面における反
射光の位相と、誘電体層と背面電極との界面における反
射光の位相を同相にして、干渉による反射光の強度の低
下を防止し、有効に外部に光を導出することのできる新
規有用な薄膜EL素子の構造を提供することを目的とす
る。
The present invention provides a thin film EL element in which a dielectric layer is interposed between the light emitting layer and the back electrode as described above, by controlling the film thickness of the dielectric layer. A new and useful technology that makes the phase of the reflected light the same as the phase of the reflected light at the interface between the dielectric layer and the back electrode, prevents the intensity of the reflected light from decreasing due to interference, and effectively guides the light to the outside. The purpose of the present invention is to provide a structure of a thin film EL element.

以下、本発明の1実施例について詳細に説明する。Hereinafter, one embodiment of the present invention will be described in detail.

添附図面に於いて、背面電極6と発光層40間に介設さ
れる誘電体層5の膜厚をd、屈折率をnとすると、発光
層4と誘電体層5との界面からの反射光と、背面電極6
と誘電体層5との界面からの反射光との位相差ξは次式
で与えられる。
In the attached drawing, when the film thickness of the dielectric layer 5 interposed between the back electrode 6 and the light emitting layer 40 is d, and the refractive index is n, reflection from the interface between the light emitting layer 4 and the dielectric layer 5 is Light and back electrode 6
The phase difference ξ between ξ and the reflected light from the interface with the dielectric layer 5 is given by the following equation.

の関係式を満足すると上記2つの界面よりの反射光は強
め合って光の導出方向即ちガラス基板1の方向へ向かう
こととなる。
When the following relational expression is satisfied, the reflected light from the two interfaces strengthens each other and heads in the direction in which the light is led out, that is, in the direction of the glass substrate 1.

発光層4がZnS:Mnで、誘電体層5がY2O3で構
成された薄膜EL素子に於いては、前述した如く発光ス
ペクトルのピーク波長は5800矢近傍にあり、580
0Xの波長を有する光に対してY2O3の屈折率は2.
0であるの唄2)式を満足する誘電体層5の膜厚はm=
1に対して1450A、m=2に対して2900Aとな
る。
In a thin film EL device in which the light emitting layer 4 is made of ZnS:Mn and the dielectric layer 5 is made of Y2O3, the peak wavelength of the emission spectrum is around 5800 arrows, as described above, and 580
The refractive index of Y2O3 for light with a wavelength of 0X is 2.
The film thickness of the dielectric layer 5 that satisfies the equation 2) is m=
1450A for m=2, and 2900A for m=2.

誘電体層5の膜厚を145OAとするか2900Aとす
るかは発光開始電圧、薄膜EL素子の安定性等を基準に
して適宜選択する。
Whether the thickness of the dielectric layer 5 is 145 OA or 2900 Å is appropriately selected based on the emission starting voltage, the stability of the thin film EL element, etc.

以上詳説した如く、本発明は背面電極と発光層間に配設
される誘電体層の膜厚を制御することにより背面電極方
向へ進行する光が界面で反射させた反射光を有効に外部
に導出するものであり、薄膜EL素子の高輝度化に寄与
することができる。
As explained in detail above, the present invention effectively guides reflected light reflected at the interface of light traveling toward the back electrode to the outside by controlling the film thickness of the dielectric layer disposed between the back electrode and the light emitting layer. This can contribute to increasing the brightness of thin film EL elements.

【図面の簡単な説明】[Brief explanation of the drawing]

添附図面は薄膜EL素子の構造を模式的に示す構成断面
図である。 1・・・・・・ガラス基板、3,5・・・・・・誘電体
層、4・・・・・・発光層、6・・・−・・背面電極。
The accompanying drawing is a cross-sectional view schematically showing the structure of a thin film EL element. DESCRIPTION OF SYMBOLS 1... Glass substrate, 3, 5... Dielectric layer, 4... Light emitting layer, 6... Back electrode.

Claims (1)

【特許請求の範囲】[Claims] 1 透明電極と背面電極間に薄膜発光層が配置され、該
薄膜発光層と背面電極間に誘電体層を介設して成る薄膜
EL素子に於いて、前記誘電体層の膜厚を、前記薄膜発
光層と前記誘電体層との界面からの反射光と、前記誘電
体層と前記背面電極との界面からの反射光とが同位相と
なる値に近似せしめ前記反射光相互の干渉を軽減したこ
とを特徴とする薄膜EL素子。
1. In a thin film EL element in which a thin film light emitting layer is disposed between a transparent electrode and a back electrode, and a dielectric layer is interposed between the thin film light emitting layer and the back electrode, the film thickness of the dielectric layer is The reflected light from the interface between the thin film light emitting layer and the dielectric layer and the reflected light from the interface between the dielectric layer and the back electrode are approximated to a value in which they have the same phase, thereby reducing mutual interference between the reflected lights. A thin film EL device characterized by the following.
JP54133315A 1979-10-15 1979-10-15 Thin film EL element Expired JPS5855636B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54133315A JPS5855636B2 (en) 1979-10-15 1979-10-15 Thin film EL element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54133315A JPS5855636B2 (en) 1979-10-15 1979-10-15 Thin film EL element

Publications (2)

Publication Number Publication Date
JPS5657089A JPS5657089A (en) 1981-05-19
JPS5855636B2 true JPS5855636B2 (en) 1983-12-10

Family

ID=15101799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54133315A Expired JPS5855636B2 (en) 1979-10-15 1979-10-15 Thin film EL element

Country Status (1)

Country Link
JP (1) JPS5855636B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625598A (en) * 1985-07-01 1987-01-12 シャープ株式会社 Thin film el element
JPS6310494A (en) * 1986-07-01 1988-01-18 株式会社小糸製作所 Construction of thin film el device

Also Published As

Publication number Publication date
JPS5657089A (en) 1981-05-19

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