JPS5847885B2 - Oscillator support structure - Google Patents
Oscillator support structureInfo
- Publication number
- JPS5847885B2 JPS5847885B2 JP51008673A JP867376A JPS5847885B2 JP S5847885 B2 JPS5847885 B2 JP S5847885B2 JP 51008673 A JP51008673 A JP 51008673A JP 867376 A JP867376 A JP 867376A JP S5847885 B2 JPS5847885 B2 JP S5847885B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- support structure
- electrode
- piezoelectric vibrator
- oscillator support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0504—Holders or supports for bulk acoustic wave devices
- H03H9/0509—Holders or supports for bulk acoustic wave devices consisting of adhesive elements
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は水晶振動子等の結晶あるいはセラミック等の振
動子の支持構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a support structure for a crystal or ceramic resonator such as a quartz resonator.
水晶振動子の従来の支持構造は一般に、第1図に示すよ
うに、振動子の相対する金属電極膜2,3に先端を二重
に巻いた金属弾性支持線4,4lで挾持し半田等で接着
し、基台5にガラス等で絶縁して外部端子6を引き出す
構造になっている。As shown in FIG. 1, the conventional support structure for a crystal resonator is generally such that the crystal resonator is held between opposing metal electrode films 2 and 3 by metal elastic support wires 4 and 4l whose ends are double-wound, and soldered, etc. The external terminal 6 is attached to the base 5 and insulated with glass or the like, and the external terminal 6 is pulled out.
しかしながらこのようにして構成された圧電振動子は、
前記した金属弾性支持線4,4lのバネ圧が強ければ、
振動子へ働く応力が大きく振動子のQ値の低下となり、
バネ圧か弱けれは、外部からの衝撃に弱く、また金属電
極膜2,3と金属弾性支持線4l,4との導電性接着は
振動の粘性による減衰を生じせしめ振動子のQ値の低下
が大きく、特に近年注目されている腕時計用など小型形
状のものでは応用することが難しい。However, the piezoelectric vibrator configured in this way is
If the spring pressure of the metal elastic support wires 4, 4l described above is strong,
The stress acting on the vibrator is large and the Q value of the vibrator decreases.
Weak spring pressure makes it vulnerable to external shocks, and the conductive adhesion between the metal electrode films 2, 3 and the metal elastic support lines 4l, 4 causes vibration to be attenuated due to viscosity, resulting in a decrease in the Q value of the vibrator. Due to their large size, it is difficult to apply them to small-sized products such as wristwatches, which have been attracting attention in recent years.
本発明は腕時計用など特に小型形状の圧電振動子の支持
構造で、前記した従来技術の欠点を鑑みこれを克服した
ものである。The present invention is a support structure for a particularly compact piezoelectric vibrator for use in wristwatches, etc., and is intended to overcome the drawbacks of the prior art described above.
以下、図面にしたがって説明する。This will be explained below with reference to the drawings.
第2図は本発明の一実施例を示す斜視図で、封止用ケー
スの上側キャップが省略してある。FIG. 2 is a perspective view showing one embodiment of the present invention, with the upper cap of the sealing case omitted.
第2図は圧電振動子板で図では、矩形状をしているが、
円板状あるいは、それらにコンベッグス加工,べベル加
工などを施したものでも良い。Figure 2 shows a piezoelectric vibrator plate, which has a rectangular shape in the figure.
It may be in the shape of a disc, or it may be convex-processed, bevel-processed, or the like.
2は金属電極膜で引き出し用に圧電振動子板の端部まで
延ばして形成し、振動子の裏側にも対称に形成してある
。2 is a metal electrode film extending to the end of the piezoelectric vibrator plate for extraction, and is also formed symmetrically on the back side of the vibrator.
3,4,5.6は絶縁性部材で弾性を有するものあるい
はプラスチック樹脂材料を用いれば良い。3, 4, 5, and 6 may be insulating members having elasticity or plastic resin materials.
そして3,5は下側の基台9に、4,6は上側のキャッ
プ(後述する第3図中の10)に各々あらかじめ圧電振
動子1及び電極引き出し線7等に対応して位置決めして
装着されており、それぞれの形状は封入用キャップ10
、基台9の内側の形状と、圧電振動子1の形状、及び電
極引き出し線7、外部引き出し線8などを考慮してそれ
ぞれ第4図a ,b ,c ,dのようにするが(ここ
でa1, b1, c1, d1は平面図をa2,b2
,c2,d2は側面図を、a3,b3,C3,d3は正
面図を示す。3 and 5 are positioned on the lower base 9, and 4 and 6 are positioned on the upper cap (10 in FIG. 3, which will be described later), respectively, corresponding to the piezoelectric vibrator 1 and the electrode lead wire 7, etc. The shape of each cap is 10 for inclusion.
, taking into consideration the inner shape of the base 9, the shape of the piezoelectric vibrator 1, the electrode lead wires 7, the external lead wires 8, etc., as shown in FIG. a1, b1, c1, d1 are the plan view a2, b2
, c2, d2 show side views, and a3, b3, C3, d3 show front views.
)、これらの場合これら絶縁性部材と振動子の間で互い
に応力を作用させることは前記したように振動子の振動
抑止力となるので、第3図に示すように振動子体として
安置させた場合、振動子1と絶縁性部材4,6の上下方
向の接触部及び振動子1と絶縁性部材3,4,5.6の
左右方向の接触部はそれぞれ数μmから数百μmの空間
的余裕があるようにする。), in these cases, applying stress to each other between these insulating members and the vibrator will suppress the vibration of the vibrator as described above, so they were placed as a vibrator body as shown in Figure 3. In this case, the vertical contact area between the vibrator 1 and the insulating members 4 and 6, and the horizontal contact area between the vibrator 1 and the insulating members 3, 4, and 5.6 are spaced from several μm to several hundred μm, respectively. Make sure you have enough time.
したがってこの絶縁性部材は、振動子のあらゆる方向へ
の移動を許し、あらゆる方向からの外力から振動子を保
護し、振動子を支持する機能を有する。Therefore, this insulating member has the functions of allowing the vibrator to move in all directions, protecting the vibrator from external forces from all directions, and supporting the vibrator.
振動子の電極引き出しは、ワイヤボンデイングなどで電
極金属膜2と外部引き出し線8とを接続した細線7で行
ない、対向電極も同様に構成する。The electrodes of the vibrator are drawn out using a thin wire 7 that connects the electrode metal film 2 and the external lead wire 8 by wire bonding or the like, and the counter electrode is constructed in the same manner.
なおこの電極金属膜2と外部引き出し線8との接続は金
属リボンの電極金属膜2への溶接を利用することも出来
る。Note that the electrode metal film 2 and the external lead wire 8 can be connected by welding a metal ribbon to the electrode metal film 2.
圧電振動子体としての組立ては、第3図で基台9に装着
されている絶縁性部材3,5の凹部に圧電振動子を固定
し、前記電極引き出しの配線をする、しかる後、絶縁性
部材4,6が装着してある上側キャンプ10を圧着ある
いは半田などで封止する。To assemble the piezoelectric vibrator body, the piezoelectric vibrator is fixed in the recesses of the insulating members 3 and 5 mounted on the base 9 as shown in FIG. The upper camp 10 to which the members 4 and 6 are attached is sealed by crimping or soldering.
このようにして構成した圧電振動子体の電極引き出し線
7は、その柔軟性ゆえに振動子を介して振動子に応力を
与えることが無く、振動子電極金属膜との接続部も従来
法に比べて十分小さいため従来接着量が多くてまねいて
いたQ値の低下を引き起さず、絶縁性部材と振動子の上
下方向と左右方向の空間のために支持による応力を受け
ず、衝撃に対して振動子の電極オープン,破損が無く小
型振動子体を得ることができる。Due to its flexibility, the electrode lead wire 7 of the piezoelectric vibrator body constructed in this way does not apply stress to the vibrator via the vibrator, and the connecting portion with the vibrator electrode metal film is also smaller than that of the conventional method. Because it is sufficiently small, it does not cause a decrease in the Q value that conventionally occurs due to a large amount of adhesive, and because of the space between the insulating member and the vibrator in the vertical and horizontal directions, it is not subjected to stress due to support, and is resistant to shock. Therefore, it is possible to obtain a compact vibrator body without causing the electrodes of the vibrator to open or break.
第1図は、従来の振動子支持構造を示す。
第2図は、本発明振動子構造の斜視図を示す。
1・・・・・・圧電振動子、2・・・・・・金属電極膜
、3,4,5,6・・・・・・絶縁性部材、7・・・・
・・電極引き出し線、8・・・・・・外部電極引き出し
線、9・・・・・・基台。
第3図は、本発明振動子構造の上側キャップ、絶縁性部
材、圧電振動子、基台の断面図を示す。
第4図は、本発明実施例の絶縁性部材の平面外形図を示
す。FIG. 1 shows a conventional vibrator support structure. FIG. 2 shows a perspective view of the vibrator structure of the present invention. 1... Piezoelectric vibrator, 2... Metal electrode film, 3, 4, 5, 6... Insulating member, 7...
...Electrode lead line, 8...External electrode lead line, 9...Base. FIG. 3 shows a sectional view of the upper cap, insulating member, piezoelectric vibrator, and base of the vibrator structure of the present invention. FIG. 4 shows a plan outline view of an insulating member according to an embodiment of the present invention.
Claims (1)
封止ケースは、上側キャンプおよひ下側基台で構或され
、前記上側キャップおよひ下側基台の各々に、絶縁性部
材を装着し、各々の前記絶縁性部材の間に前記振動子を
空間的余裕を残して挿入することを特徴とする振動子の
支持構造。1 includes a vibrator and a vibrator sealing case, the vibrator sealing case is composed of an upper camp and a lower base, and each of the upper cap and the lower base is provided with an insulating material. 1. A support structure for a vibrator, characterized in that the vibrator is inserted between each of the insulating members with a space left between the insulating members.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51008673A JPS5847885B2 (en) | 1976-01-29 | 1976-01-29 | Oscillator support structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51008673A JPS5847885B2 (en) | 1976-01-29 | 1976-01-29 | Oscillator support structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5291687A JPS5291687A (en) | 1977-08-02 |
JPS5847885B2 true JPS5847885B2 (en) | 1983-10-25 |
Family
ID=11699439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51008673A Expired JPS5847885B2 (en) | 1976-01-29 | 1976-01-29 | Oscillator support structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5847885B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1271556A (en) * | 1984-12-19 | 1990-07-10 | Geoffrey C. Herrick | Constraining mount system for surface acoustic wave devices |
JP5396780B2 (en) * | 2008-09-05 | 2014-01-22 | セイコーエプソン株式会社 | Piezoelectric device |
JP5510414B2 (en) * | 2011-08-23 | 2014-06-04 | セイコーエプソン株式会社 | Piezoelectric device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS517772A (en) * | 1974-06-15 | 1976-01-22 | Matsushita Electric Works Ltd | FURITSUKARESUGATAHODENTOTENTOSOCHI |
-
1976
- 1976-01-29 JP JP51008673A patent/JPS5847885B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS517772A (en) * | 1974-06-15 | 1976-01-22 | Matsushita Electric Works Ltd | FURITSUKARESUGATAHODENTOTENTOSOCHI |
Also Published As
Publication number | Publication date |
---|---|
JPS5291687A (en) | 1977-08-02 |
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