JPS5845363U - Vapor deposition equipment - Google Patents
Vapor deposition equipmentInfo
- Publication number
- JPS5845363U JPS5845363U JP13998181U JP13998181U JPS5845363U JP S5845363 U JPS5845363 U JP S5845363U JP 13998181 U JP13998181 U JP 13998181U JP 13998181 U JP13998181 U JP 13998181U JP S5845363 U JPS5845363 U JP S5845363U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition equipment
- hearth
- nose
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のＡ１蒸着用ハースライナ−を示す断面図
、第２図は本考案の一実施例を示すノ１−妥ライナーの
断面図である。 ′
１・・・銅ハース、２・・・Ａ１ソース、３・・・ハー
スライナ−０FIG. 1 is a sectional view showing a conventional hearth liner for A1 deposition, and FIG. 2 is a sectional view of a No. 1 liner showing an embodiment of the present invention. '1...Copper hearth, 2...A1 source, 3...Hearth liner-0
Claims (1)
との間に介在するハースライナ−の少なくとも側面の主
たる部分が、上記ノ１−スと離間していることを特徴と
する蒸着装置。A vapor deposition apparatus using an electron beam, characterized in that at least a main portion of a side surface of a hearth liner interposed between an evaporation source and a hearth is spaced apart from the nose.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13998181U JPS5845363U (en) | 1981-09-21 | 1981-09-21 | Vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13998181U JPS5845363U (en) | 1981-09-21 | 1981-09-21 | Vapor deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5845363U true JPS5845363U (en) | 1983-03-26 |
| JPS6120032Y2 JPS6120032Y2 (en) | 1986-06-17 |
Family
ID=29933156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13998181U Granted JPS5845363U (en) | 1981-09-21 | 1981-09-21 | Vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5845363U (en) |
-
1981
- 1981-09-21 JP JP13998181U patent/JPS5845363U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120032Y2 (en) | 1986-06-17 |
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