JPS58190738A - Pressure sensor using liquid lens - Google Patents
Pressure sensor using liquid lensInfo
- Publication number
- JPS58190738A JPS58190738A JP7270482A JP7270482A JPS58190738A JP S58190738 A JPS58190738 A JP S58190738A JP 7270482 A JP7270482 A JP 7270482A JP 7270482 A JP7270482 A JP 7270482A JP S58190738 A JPS58190738 A JP S58190738A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- light
- liquid lens
- pressure sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims description 17
- 239000013307 optical fiber Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 5
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 241001247986 Calotropis procera Species 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- 239000005662 Paraffin oil Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000548 poly(silane) polymer Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は、胴部の少くとも一部が被測定圧力の影響下に
置かれ、光入射面と光出射面とが被測定圧力空間から隔
離されている肉厚液一体レンズを利用した新規な圧力セ
ンサに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thick-walled fluid in which at least a portion of the body is under the influence of the pressure to be measured, and the light entrance surface and the light exit surface are isolated from the pressure space to be measured. This invention relates to a new pressure sensor using an integrated lens.
従来、圧力センサとしては、ベローズの伸縮を利用した
もの、抵抗線歪計を利用したものなど様様の原理のもの
が知られているが、本発明は全く新規な原理に基くもの
である。Conventionally, pressure sensors have been known based on various principles, such as those that utilize the expansion and contraction of bellows and those that utilize a resistance wire strain meter, but the present invention is based on a completely new principle.
本発明の第1の目的は、小型、堅牢で爆発の危険性のな
い圧力センサを提供することである。A first object of the invention is to provide a pressure sensor that is compact, robust and non-explosive.
本発明の第2の目的は、光を利用した遠隔監視可能な圧
力センサを提供することである。A second object of the present invention is to provide a pressure sensor that can be remotely monitored using light.
以下図示の実施例について本発明の構成と作用を説明す
る。 −第1図に示す実
施例において、Aは肉厚液体レンズ、Bはレンズ保持具
、01は投光器の投光面、O2は受光器の受光面である
。The structure and operation of the present invention will be explained below with reference to the illustrated embodiments. - In the embodiment shown in FIG. 1, A is a thick liquid lens, B is a lens holder, 01 is a light projecting surface of a light projector, and O2 is a light receiving surface of a light receiver.
肉厚液体レンズAは、弾性変形可能な透明プラスチック
材料で形成されたレンズ外郭1と該レンズ外郭内に密封
された透明液体2とで形成されており、さらに必要に応
じてレンズの保護と遮光を兼ねた帯部材3を胴部に装着
してこれを保護し、外部光を遮断する。The thick liquid lens A is formed of a lens outer shell 1 made of an elastically deformable transparent plastic material and a transparent liquid 2 sealed inside the lens outer shell, and further includes lens protection and light shielding as necessary. A band member 3 which also serves as a belt member is attached to the body part to protect it and block external light.
レンズ保持具Bは、レンズの光入射面と光出射面(球面
部)とを被測定圧力空間から遮断し、かつ外部光を遮断
するための壁部11、レンズ保持部12、投光器装着部
13、受光器装着部14を備エテオリ、レンズ保持部1
2にはレンズ保持具Bの外部空間の被測定電圧Pが液体
レンズAの胴部に影響を及ぼしうるように、窓15が設
けられている。The lens holder B includes a wall portion 11, a lens holder 12, and a projector mounting portion 13 for shielding the light incident surface and light output surface (spherical surface) of the lens from the pressure space to be measured and for shielding external light. , a light receiver mounting part 14 is provided, and a lens holding part 1 is provided.
2 is provided with a window 15 so that the measured voltage P in the external space of the lens holder B can affect the body of the liquid lens A.
レンズ保持部12には、液体レンズAが伸縮可能のゴム
シール16を介してケース内外の気密を維持できるよう
に保持されている。A liquid lens A is held in the lens holding portion 12 via an expandable rubber seal 16 so as to maintain airtightness inside and outside the case.
投光器保持部13には、投光器としての光ファイバ21
が弾性グラブ22、ナツト23、ゴムブツシュ24によ
って保持されており、受光器保持部14には、受光器と
しての光ファイバ25が弾性プラグ26、ナツト27、
ゴムブツシュ28によって保持されている。The light projector holder 13 has an optical fiber 21 as a light projector.
is held by an elastic glove 22, a nut 23, and a rubber bush 24, and an optical fiber 25 as a light receiver is held in the receiver holding part 14 by an elastic plug 26, a nut 27,
It is held by a rubber bush 28.
レンズ外郭1の材料としては、たとえば、ポリシローヤ
くメタクリレート(15°Cで屈折率1.507 )、
ポリスチレン(15°Cで屈折率1.592)、ポリメ
チルメタクリレート(2o°cで屈折率1.491)な
どのプラスチックが適当である。Examples of the material for the lens outer shell 1 include polysilane methacrylate (refractive index 1.507 at 15°C),
Plastics such as polystyrene (refractive index 1.592 at 15°C), polymethyl methacrylate (refractive index 1.491 at 2°C) are suitable.
レンズ外郭1に充填されるべき液体としては、たとえば
グリセリン(20°Cで屈折率1.473)、四塩化炭
素(20°Cで屈折率1.461)、セダ油(20°C
で屈折率1516)、パラフィン油(20℃で屈折率1
.48)、ベンゼン(20℃で屈折率1.501)など
が適当である。Examples of liquids to be filled in the lens outer shell 1 include glycerin (refractive index 1.473 at 20°C), carbon tetrachloride (refractive index 1.461 at 20°C), seda oil (20°C
(refractive index 1516 at 20°C), paraffin oil (refractive index 1 at 20°C)
.. 48), benzene (refractive index 1.501 at 20°C), etc. are suitable.
第2図は、本発明の作用原理を説明するための図である
。第2図(α)において、レンズの両凸面の曲率半径r
が28間、厚みdが46闘、レンズ材料の屈折率nが1
.45、投光側および受光側の各空間の屈折率noが1
.oとすると、焦点距離fは各距離のことである。光軸
Fl、FZ に平行な入射光線L1は実線で示した光路
を経て第2焦点F2に達するが、計算上は点線で示した
ように第2主面H2までは直進し、第2主面H2で屈折
して第2焦点F2に向うと考えて差支えない。第1およ
び第2主面とは、このように焦点距離測定の基準となる
仮想面のことである。FIG. 2 is a diagram for explaining the principle of operation of the present invention. In Figure 2 (α), the radius of curvature r of both convex surfaces of the lens
is 28, the thickness d is 46, and the refractive index n of the lens material is 1.
.. 45, the refractive index no of each space on the light emitting side and the light receiving side is 1
.. o, the focal length f is each distance. The incident light ray L1 parallel to the optical axes Fl and FZ reaches the second focal point F2 via the optical path shown by the solid line, but according to the calculation, it goes straight to the second principal surface H2 as shown by the dotted line, and then reaches the second principal surface. It is safe to assume that the light is refracted at H2 and heads toward the second focal point F2. The first and second principal surfaces are virtual surfaces that serve as a reference for focal length measurement in this way.
第2図(b)は、本発明の実施例における光学系を示し
、投光器たる光ファイバ21の端面01は、第1主面H
1から距離2/、受光器たる光ファイバ25の端面02
は、第2主面H2から距離2fだけ離れた光軸上に配置
されている。このように投光器と受光器とを配置して置
くと、光ファイバ21を介して伝送され面01から投射
された光は面02に集光され、光ファイバ25の他端(
図示せず)から最大の出力光を検出することができる。FIG. 2(b) shows an optical system in an embodiment of the present invention, in which the end surface 01 of the optical fiber 21 serving as a projector is
Distance 2/ from 1 to end face 02 of optical fiber 25 serving as a light receiver
is arranged on the optical axis at a distance of 2f from the second principal surface H2. When the emitter and receiver are arranged in this way, the light transmitted through the optical fiber 21 and projected from the surface 01 is focused on the surface 02, and the other end of the optical fiber 25 (
(not shown) can detect the maximum output light.
このような関係にある点ORと02とを互に共役な位置
という。Points OR and 02 having such a relationship are called mutually conjugate positions.
被測定圧力(レンズ胴部に与えられる圧力)が標準値の
ときに第2図(b)の状態になるように0102の距離
tが調節されている時、被測定圧力が高まると、液体レ
ンズAは第2図(C)に示すように変形する。すなわち
、厚みはd’ (d′〉d )となり、曲率半径はr’
(r’(r)となり、焦点距離はf′(f’<f )と
なり、第1および第2主面H’i 、 H’2から2f
′の点○′1. O’2は01,02よりそれぞれ内方
へと移動する。01の共役点も02から0/4へと移動
し01から投射された光は実線で示す光路を経てQ4+
に結像した後、やや拡散してその一部が受光面02に入
射する。したがって、光ファイバ25の他端(図示せず
)からの出力光は第2図(h)の場合に比較してかなり
弱くなる。すなわち、光ファイバ25の他端からの出力
光は被測定圧力Pの関数として変化するから、出力光の
強度を測定することによって被測定圧力を知ることがで
きる。When the distance t of 0102 is adjusted so that when the pressure to be measured (the pressure applied to the lens body) is at the standard value, the state shown in Fig. 2(b) is reached, and the pressure to be measured increases, the liquid lens A is deformed as shown in FIG. 2(C). That is, the thickness is d'(d'〉d), and the radius of curvature is r'
(r'(r), the focal length becomes f'(f'<f), and 2f from the first and second principal surfaces H'i and H'2
’ point○’1. O'2 moves inward from 01 and 02, respectively. The conjugate point of 01 also moves from 02 to 0/4, and the light projected from 01 passes through the optical path shown by the solid line to Q4+
After being imaged, it is slightly diffused and a part of it is incident on the light receiving surface 02. Therefore, the output light from the other end (not shown) of the optical fiber 25 becomes considerably weaker than in the case of FIG. 2(h). That is, since the output light from the other end of the optical fiber 25 changes as a function of the pressure to be measured P, the pressure to be measured can be determined by measuring the intensity of the output light.
以上に例示した液体レンズの寸法からもわかるように、
本発明にかかる圧力センサはきわめて小型に形成でき、
構造も簡単で堅牢に構成できるから、その応用範囲はき
わめて広範である。As can be seen from the dimensions of the liquid lens illustrated above,
The pressure sensor according to the present invention can be made extremely compact,
Since the structure is simple and robust, its range of applications is extremely wide.
第1図は、本発明の一実施例の縦断側面図、第2図(α
)〜(C)は本発明の作動原理を示す図面である。
主要な符号の説明
A:液体レンズ
B:ケース
21:投光器(光ファイバ)
25:受光器(光ファイバ)
特許出願人 住友電気工業株式会社FIG. 1 is a longitudinal sectional side view of an embodiment of the present invention, and FIG. 2 (α
) to (C) are drawings showing the operating principle of the present invention. Explanation of main symbols A: Liquid lens B: Case 21: Emitter (optical fiber) 25: Light receiver (optical fiber) Patent applicant Sumitomo Electric Industries, Ltd.
Claims (2)
たレンズ外郭と該レンズ外郭内に充填密封された透明液
体とから構成された肉厚液体レンズ; 該肉厚液体レンズの胴部の少くとも一部を被測定圧力の
影響下に置き、光入射面と光出射面とを被測定圧力空間
から隔離するように前記肉厚液体レンズを保持するレン
ズ保持具;前記肉厚液体レンズの光入射面に向けて光を
投射するように、該レンズ保持真円に配設された投光器
;および、 前記レンズ保持真円において、前記被測定圧力が所定値
の時、前記投光器の位置と共役な位置に、前記液体レン
ズの出射光を受光するように配設された受光器; を備えた液体レンズを用いた圧力センサ。(1) A thick liquid lens composed of a lens outer shell made of an elastically deformable transparent plastic material and a transparent liquid filled and sealed inside the lens outer shell; at least a part of the body of the thick liquid lens; a lens holder that holds the thick liquid lens so as to place the part under the influence of the pressure to be measured and isolate the light entrance surface and the light exit surface from the pressure space to be measured; the light entrance surface of the thick liquid lens; a light projector disposed in the lens holding perfect circle so as to project light toward the lens; , a light receiver arranged to receive light emitted from the liquid lens; A pressure sensor using a liquid lens.
ーの末端であることを特徴とする特許請求の範囲第1項
記載の圧力センサ。(2) The pressure sensor according to claim 1, wherein the light projector and the light receiver are each an end of an optical fiber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7270482A JPS58190738A (en) | 1982-04-30 | 1982-04-30 | Pressure sensor using liquid lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7270482A JPS58190738A (en) | 1982-04-30 | 1982-04-30 | Pressure sensor using liquid lens |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58190738A true JPS58190738A (en) | 1983-11-07 |
JPH0316614B2 JPH0316614B2 (en) | 1991-03-06 |
Family
ID=13497000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7270482A Granted JPS58190738A (en) | 1982-04-30 | 1982-04-30 | Pressure sensor using liquid lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58190738A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008197078A (en) * | 2007-02-08 | 2008-08-28 | Nara Institute Of Science & Technology | Tactile sensor and tactile information detection method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5750047U (en) * | 1980-09-05 | 1982-03-20 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52146560A (en) * | 1976-05-31 | 1977-12-06 | Nec Home Electronics Ltd | Electrode plating apparatus for semiconductor devices |
-
1982
- 1982-04-30 JP JP7270482A patent/JPS58190738A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5750047U (en) * | 1980-09-05 | 1982-03-20 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008197078A (en) * | 2007-02-08 | 2008-08-28 | Nara Institute Of Science & Technology | Tactile sensor and tactile information detection method |
Also Published As
Publication number | Publication date |
---|---|
JPH0316614B2 (en) | 1991-03-06 |
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