JPS58189263A - Coating fluid for sio2 film formation - Google Patents
Coating fluid for sio2 film formationInfo
- Publication number
- JPS58189263A JPS58189263A JP7189782A JP7189782A JPS58189263A JP S58189263 A JPS58189263 A JP S58189263A JP 7189782 A JP7189782 A JP 7189782A JP 7189782 A JP7189782 A JP 7189782A JP S58189263 A JPS58189263 A JP S58189263A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- film
- film formation
- water
- coating fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 34
- 239000011248 coating agent Substances 0.000 title claims abstract description 31
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 7
- 239000012530 fluid Substances 0.000 title abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 9
- 239000003960 organic solvent Substances 0.000 claims description 7
- 150000002148 esters Chemical class 0.000 claims description 6
- 150000003014 phosphoric acid esters Chemical class 0.000 claims description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 9
- 239000011521 glass Substances 0.000 abstract description 8
- 239000002904 solvent Substances 0.000 abstract description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 abstract description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910019142 PO4 Inorganic materials 0.000 abstract description 3
- 238000007645 offset printing Methods 0.000 abstract description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 abstract description 3
- 239000010452 phosphate Substances 0.000 abstract description 3
- 239000004094 surface-active agent Substances 0.000 abstract description 3
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 abstract description 2
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 125000003118 aryl group Chemical group 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 235000019441 ethanol Nutrition 0.000 description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 5
- 238000001879 gelation Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 4
- -1 hydrogen halides Chemical class 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- UCQFCFPECQILOL-UHFFFAOYSA-N diethyl hydrogen phosphate Chemical compound CCOP(O)(=O)OCC UCQFCFPECQILOL-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001733 carboxylic acid esters Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- SWQWONXMUXCEDF-UHFFFAOYSA-N tetrakis(2-ethylbutyl) silicate Chemical compound CCC(CC)CO[Si](OCC(CC)CC)(OCC(CC)CC)OCC(CC)CC SWQWONXMUXCEDF-UHFFFAOYSA-N 0.000 description 1
- JSECNWXDEZOMPD-UHFFFAOYSA-N tetrakis(2-methoxyethyl) silicate Chemical compound COCCO[Si](OCCOC)(OCCOC)OCCOC JSECNWXDEZOMPD-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Paints Or Removers (AREA)
Abstract
Description
【発明の詳細な説明】 本発明はガラス、セラミック、プラスチック。[Detailed description of the invention] This invention applies to glass, ceramics, and plastics.
金属等の基体上に、5iOz膜を形成するための塗布液
に関する。The present invention relates to a coating liquid for forming a 5iOz film on a substrate such as metal.
S i Ot膜は、液晶表示素子のガラスからのアルカ
リイオン溶出防止膜、配向制御膜、ICのパッシベーシ
ョン[、B、Pをドープして拡散膜、ガラスビン等の表
面強化保護膜などとじて広く使用されている。S i Ot film is widely used as a film to prevent alkali ion elution from the glass of liquid crystal display elements, an alignment control film, a passivation film for ICs, a diffusion film doped with B and P, and a surface-strengthened protective film for glass bottles, etc. has been done.
この5int膜の形成方法としては、気相成長法、塗布
法が一般に知られているが、前者は特殊な装置を必要と
し、また、大量生産には不向きである等の欠点を有する
。後者の塗布法では。Vapor phase growth and coating methods are generally known as methods for forming this 5-inch film, but the former requires special equipment and is unsuitable for mass production. In the latter application method.
簡略な装置で大蓋生産が可能であり、(1)ハロゲン化
シラン、カルボン酸およびアルコールの反応生成物を用
いる方法(特公昭52−16488号公報、特公昭52
−20825号公報) 、 (2)アルコキシシラン、
低級カルボン酸およびアルコールとの生成物を用いる方
法(%開昭55−34258号公報)等が開示されてい
る。しかし、(1)の方法は、ハロゲン化水素やカルボ
ン酸ハライドが副生され、塗布液中にこのハロゲンイオ
ンが残留する場合があり、これらが塗布−熱処理して形
成した8 i 0.膜や、装置を腐食させるという欠点
を有する。(2)の方法は、(1)の欠点を補えるが、
アルコキシシランと等当量のカルボン酸を必要とし、こ
のカルボン酸から、カルボン酸エステルが形成されて塗
布液中に残留し。Large lid production is possible with a simple device, and (1) method using a reaction product of halogenated silane, carboxylic acid, and alcohol (Japanese Patent Publication No. 16488/1988, Japanese Patent Publication No. 16488/1983,
-20825), (2) alkoxysilane,
A method using a product of a lower carboxylic acid and an alcohol (% JP-A-55-34258) has been disclosed. However, in method (1), hydrogen halides and carboxylic acid halides are produced as by-products, and these halogen ions may remain in the coating solution. It has the disadvantage of corroding membranes and equipment. Method (2) can compensate for the drawbacks of (1), but
It requires an equivalent amount of carboxylic acid to the alkoxysilane, and from this carboxylic acid, a carboxylic acid ester is formed and remains in the coating solution.
使用溶媒系が限定され、保存安定性が悪いという欠点を
有する。It has the drawbacks of limited solvent systems and poor storage stability.
本発明の目的は上記した欠点のない均一なS i Os
膜の得られるS i O,膜形成用塗布液を提供するこ
とにある。The object of the present invention is to produce uniform SiOs without the above-mentioned drawbacks.
The object of the present invention is to provide a coating liquid for forming a film using S i O.
本発明は、有機溶媒中でテトラアルコキシシランと水と
をリン酸エステルの存在下で反応させて得られるヒドロ
キシシラン及び/又はそのオリゴマーを含有してなるS
i O,膜形成用塗布液に関する。The present invention provides S containing a hydroxysilane and/or an oligomer thereof obtained by reacting a tetraalkoxysilane and water in an organic solvent in the presence of a phosphoric acid ester.
i O, relating to a coating liquid for film formation.
テトラアルコキシシランを水と混合攪拌又は加熱しても
反応しないが、リン酸エステルを添加することによシ発
熱して反応が進み、ヒドロキシシラン及び/又はそのオ
リゴマーを製造することができる。またリン酸エステル
は、ヒドロキシシラン及び/又はそのオリゴマーの安定
化剤としても作用し、リン酸エステルを加えたものは4
0℃に2ケ月間放置してもゲル化しない。Tetraalkoxysilane does not react when mixed with water, stirred or heated, but when a phosphoric acid ester is added, the reaction progresses with heat generated, making it possible to produce hydroxysilane and/or its oligomer. Phosphoric esters also act as stabilizers for hydroxysilane and/or their oligomers, and those to which phosphoric esters are added are
It does not gel even if left at 0°C for 2 months.
本発明で用いるテトラアルコキシシランとしては9例え
ば、テトラメトキシシラン、テトラエトキシシラン、テ
トラインプロポキシシラン。Examples of the tetraalkoxysilane used in the present invention include tetramethoxysilane, tetraethoxysilane, and tetralinepropoxysilane.
テトラブトキシシラン、テトラプロポキシシラン、テト
ラキス(2−エチルブトキシ)シラン。Tetrabutoxysilane, tetrapropoxysilane, tetrakis(2-ethylbutoxy)silane.
テトラキス(2−メトキシエトキシ)シラン。Tetrakis(2-methoxyethoxy)silane.
テトラフェノキシシラン、これらの混合物、テトラアル
コキシシランのオリゴマー(たとえば。Tetraphenoxysilanes, mixtures thereof, oligomers of tetraalkoxysilanes (e.g.
日本コルコート社製コルコート40)などが挙げられる
。テトラアルコキシシランは、塗膜の実用性と生成物の
安定性からテトラアルコキシ量%の範囲が好ましく10
〜40重tqbの範囲ハ
が特に好ましい。Examples include Colcoat 40) manufactured by Nippon Colcoat Co., Ltd. The tetraalkoxysilane preferably has a tetraalkoxy content in the range of 10% from the viewpoint of practicality of the coating film and stability of the product.
Particularly preferred is a range C of 40 to 40 tqb.
本発明で用いるリン酸エステルとしては。The phosphoric acid ester used in the present invention includes:
(RO)sPO,(RO)sP(OH)t (RO)*
PO(OH)。(RO)sPO, (RO)sP(OH)t (RO)*
PO (OH).
(RO)PO(OH)□(Ro)sp、(I(o)sp
(OH)。(RO)PO(OH)□(Ro)sp, (I(o)sp
(OH).
(RO)PO(ここで、Rは炭素数1〜6のアル、F)
p基又はアリーー基を示す)等力、挙げられ。(RO)PO (where R is Al having 1 to 6 carbon atoms, F)
(representing a p group or an ary group).
特に9分子中にヒドロキシル基を含むものが好ましい。Particularly preferred are those containing hydroxyl groups in nine molecules.
このリン酸エステルの添加量はリン酸エステルの添加効
果と、形成されるS t O,膜の特性からテトラアル
コキシシランに対して0.01〜10重−1%の範囲が
好ましい。The amount of the phosphoric acid ester added is preferably in the range of 0.01 to 10% by weight based on the tetraalkoxysilane in view of the effect of the addition of the phosphoric ester, S t O, and the properties of the film formed.
本発明で用いる有機溶媒としてはメタノール。The organic solvent used in the present invention is methanol.
エタノール、プ目ピルアルコール、イソプロピルアルコ
ール、ブチルアルコールナトのアルコール類、メチルセ
ロソルブ、エチルセロソルブ。Ethanol, alcoholic acid, isopropyl alcohol, butyl alcohol, methyl cellosolve, ethyl cellosolve.
プチルセロノルプなどのセロソルブ類、メチルカルピト
ール、エチルカルピトール、ブチルカルピトールなどの
カルピト−ル類、エチレングリコール、プロピレングリ
コール。ジエチレングリコール、グリセリンなどのポリ
アルコール類、酢酸メチル、酢酸エチル、酢酸ブチルな
どのエステル類、アセトン、メチルエチルケトン。Cellosolves such as butylselonorp, carpitols such as methylcarpitol, ethylcarpitol, butylcarpitol, ethylene glycol, propylene glycol. Polyalcohols such as diethylene glycol and glycerin, esters such as methyl acetate, ethyl acetate, and butyl acetate, acetone, and methyl ethyl ketone.
アセチルアセトンなどのケトン類、N−メチル−2−ピ
ロリドン、ジメチルアセトアミド、ジメチルホルムアミ
ド、ジメチルスルホキシド声νこれらの混合物などが使
用でき、特に、アルコール類、セロソルブ類、カルピト
ール類を主成分とし次溶媒系が好ましい。また、有機溶
媒5−
として沸点の高いセロンルプ類、カルピトール類、N−
メチル−2−ピロリドン、ジメチルアセトアミドなどを
溶媒として用いることKよシ。Ketones such as acetylacetone, N-methyl-2-pyrrolidone, dimethylacetamide, dimethylformamide, dimethyl sulfoxide, etc. can be used, and mixtures thereof can be used. In particular, solvents containing alcohols, cellosolves, and calpitols as main components can be used. preferable. In addition, as organic solvents 5-, seronlupes, calpitols, N-
It is recommended to use methyl-2-pyrrolidone, dimethylacetamide, etc. as a solvent.
塗布液を塗布した場合の塗膜の乾燥速度を遅くすること
ができるため、塗膜のレベリングが良好となシカロール
コータ−9フレキソ印刷、オフセット印刷等の塗布法が
利用できる。Since the drying speed of the coating film when the coating liquid is applied can be slowed down, coating methods such as Cicaroll Coater 9 flexo printing and offset printing, which provide good leveling of the coating film, can be used.
本発明で添加される水は蒸留水又はイオン交換水が好ま
しく、その使用量は、テトラアルコキシシラン1 mo
lに対して4molが好ましい。The water added in the present invention is preferably distilled water or ion-exchanged water, and the amount used is 1 mo of tetraalkoxysilane.
4 mol per liter is preferable.
これよりも少ないとヒドロキシシランの縮合化反応が進
み、不溶物を生成する傾向があシ、これよシも多いと未
反応の水が反応生成物中に残留し、塗布液の基体に対す
るぬれ性に影響し。If the amount is less than this, the condensation reaction of hydroxysilane will proceed and there is a tendency to produce insoluble matter. If it is more than this, unreacted water will remain in the reaction product, making it difficult for the coating solution to wet the substrate. affect.
ぬれ性が悪くなる傾向にある。The wettability tends to be poor.
本発明におけるシラン及び/又はそのオリゴマーの製造
法は、テトラアルコキシン2ンヲ有ることが好ましい。In the method for producing silane and/or its oligomer in the present invention, it is preferable that tetraalcoxin 2 is present.
反応温度は室温〜100℃6−
とすることが好“ましく、これよりも高くするとゲル化
しやすい傾向にある。アルコキシシランと水との反応時
間は0.5〜5時間が好ましい。The reaction temperature is preferably from room temperature to 100°C, and if it is higher than this, gelation tends to occur.The reaction time for the alkoxysilane and water is preferably 0.5 to 5 hours.
本発明になるSin、膜形成用塗布液は、有機溶媒中で
上記の拐料を反応させて得られる組成物をそのまま用い
ても良く、また、同−又は他の有機溶媒を加えて塗布液
としてもよい。場合によっては上記の材料を反応させて
得られる組成物中の有機溶媒の一部を除いてもよい。The coating solution for forming a Sin film according to the present invention may be a composition obtained by reacting the above-mentioned coating material in an organic solvent, or may be prepared by adding the same or other organic solvent to the coating solution. You can also use it as In some cases, part of the organic solvent in the composition obtained by reacting the above materials may be removed.
本発明になるS10.膜形成用塗布液の基体に対するぬ
れ性を改良するため、界面活性剤を添加することも可能
である。界面活性剤としては。S10 according to the present invention. In order to improve the wettability of the film-forming coating liquid to the substrate, it is also possible to add a surfactant. As a surfactant.
非イオン系界面活性剤が好ましい。!、た。siへ膜の
性質を変化さゼるためI P 1 B @ As+ G
Flgsb、 ’ri、 In、 A/等の化合物を添
加することも可能である。Nonionic surfactants are preferred. ! ,Ta. To change the properties of the film to Si, I P 1 B @ As + G
It is also possible to add compounds such as Flgsb, 'ri, In, A/, etc.
本発明になるS i (%膜形成用塗布液を用いたS
t O,膜の形成はこの塗布液を好ましくは室温で従来
開示されている方法、たとえばスピナー法、浸漬引上げ
法、刷毛塗り法、フレキソ印刷。S i (% S using the coating liquid for film formation) according to the present invention
To form a film, the coating solution is preferably coated at room temperature by a conventionally disclosed method, such as a spinner method, a dipping/pulling method, a brush coating method, or flexographic printing.
ロールコータ−、オフセット印刷などによシ基体上に塗
布し、好ましくは200〜800℃で熱処理することに
よって行なわれる。熱処理温度が低い場合は、Sin、
膜の硬度が劣シ、熱処理温度を高くする程硬度の高いS
in、膜を得ることができる。基体としてはガラス、セ
ラミック、プラスチック、金属等の板、成形品等がある
。This is carried out by applying the coating onto a substrate using a roll coater, offset printing, etc., and heat-treating preferably at 200 to 800°C. If the heat treatment temperature is low, Sin,
The hardness of the film is poor, and the higher the heat treatment temperature, the higher the hardness.
in, a membrane can be obtained. Examples of the substrate include plates and molded products made of glass, ceramic, plastic, metal, and the like.
以下本発明を実施例により説明する。The present invention will be explained below with reference to Examples.
実施例1
テトラエトキシシラン23fとエチルアルコール68.
88fの混合物にリン酸ジエチル0.177を加える。Example 1 Tetraethoxysilane 23f and ethyl alcohol 68.
Add 0.177 of diethyl phosphate to the 88f mixture.
さらに、攪拌しながらイオン交換水7.95pを加える
と約10℃発熱して反応し、約3時間反応後の加熱残量
は150℃で9.0重量%。Furthermore, when 7.95 p of ion-exchanged water was added while stirring, the reaction occurred with an exotherm of about 10°C, and after about 3 hours of reaction, the amount remaining after heating was 9.0% by weight at 150°C.
500℃で7.0重量%を示した。これをガラス基板に
、引上げ速度20cm/mjnで浸漬塗布し500℃で
焼成したところ9M厚約200 o′Aの高硬度の被膜
を得ることができた。また、この塗布液を40℃の恒温
槽に、2ケ月間放置してもゲル化は見られなかった。It showed 7.0% by weight at 500°C. When this was coated on a glass substrate by dip coating at a pulling speed of 20 cm/mjn and baked at 500°C, a highly hard coating with a thickness of 9M and about 200 o'A could be obtained. Moreover, no gelation was observed even when this coating liquid was left in a constant temperature bath at 40° C. for 2 months.
実施例2
テトライソプロポキシシラン29.25L、プロピルア
ルコール62.62 Fの混合物にリン酸ジプチル0.
23Pを加える。さらに攪拌しながらイオン交換水7.
959−を加えると約8℃発熱して反応し。Example 2 A mixture of 29.25 L of tetraisopropoxysilane and 62.62 F of propyl alcohol was mixed with 0.00 g of diptyl phosphate.
Add 23P. 7. Add ion-exchanged water while stirring.
When 959- is added, the reaction occurs with an exotherm of about 8°C.
約5時間反応後の加熱残量は150℃/30分で9.5
重量%、500℃/30分で7.2重量%を示した。こ
れをガラス基板に4000rpmでスピナー塗布し、5
00℃で焼成したところ膜厚的200OAの高硬度の被
膜を得ることができた。また、この塗布液を40℃の恒
温槽に入れ、2ケ月放置してもゲル化は見られなかった
。The remaining amount of heating after about 5 hours of reaction is 9.5 at 150℃/30 minutes.
It showed 7.2% by weight at 500°C/30 minutes. Coat this on a glass substrate with a spinner at 4000 rpm, and
When fired at 00°C, a highly hard film with a thickness of 200 OA could be obtained. Furthermore, no gelation was observed even when this coating solution was placed in a constant temperature bath at 40° C. and left for two months.
実施例3
テトラエトキシシラン23f、N−メチル−2−ピロリ
ドン6 fl、88 Pの混合物にリン酸ジエチル0.
17 Pを加え、さらに攪拌しながら水7.951を加
えると約15℃発熱して反応し、3時間反応後の加熱残
量は150℃/30分で9.7重量%。Example 3 A mixture of 23 f of tetraethoxysilane, 6 fl of N-methyl-2-pyrrolidone, and 88 P was mixed with 0.0 ml of diethyl phosphate.
When 17 P was added and 7.951 ml of water was added with further stirring, the reaction occurred with an exotherm of about 15°C, and the amount remaining after 3 hours of reaction was 9.7% by weight at 150°C/30 minutes.
500℃/30分で7.2重1lii−を示した。これ
を−9=
ガラス基板にロールコータ−で塗布し、500’Cで焼
成したところ、膜厚的220 oAの高硬度な被膜を得
ることができた。また、この塗布液を40℃の恒温槽に
入れ、2ケ月放置してもゲル化は見られなかった。At 500°C/30 minutes, 7.2 folds of 1lii- were exhibited. When this was coated on a -9= glass substrate using a roll coater and baked at 500'C, a highly hard film with a film thickness of 220 oA could be obtained. Furthermore, no gelation was observed even when this coating solution was placed in a constant temperature bath at 40° C. and left for two months.
比較例1
テトラエトキシシラン23p、エチルアルコ−ル63.
09 Pの混合物に無水酢酸5.97p加え。Comparative Example 1 Tetraethoxysilane 23p, ethyl alcohol 63p.
09 Added 5.97 p of acetic anhydride to the P mixture.
さらに攪拌しながら水を7.95 )加えたところ。While stirring, water was added (7.95%).
発熱は見られず、室温反応1時間後の150”(,73
0分の加熱残量は0.95重ftsであった。そこった
。しかし、この塗布液を40℃の恒温槽に放置したとこ
ろ、1ケ月以内でゲル化が見られた。No heat generation was observed, and 150" (,73
The remaining heating amount at 0 minutes was 0.95 weight fts. There it was. However, when this coating solution was left in a constant temperature bath at 40° C., gelation was observed within one month.
本発明になるS i Ox膜形成用塗布液は、保存安定
性にすぐれ、また高沸点溶媒を使用した場合にはロール
コータ−やフレキソ印刷を利用することができ、パター
ン形成を容易にすることができる。The coating solution for forming a SiOx film according to the present invention has excellent storage stability, and when a high boiling point solvent is used, it can be used with a roll coater or flexographic printing, making pattern formation easy. I can do it.
手続補正書(自発)
昭和 57年 6月116
1.1f許庁艮官殿
1、事件の表示
昭和57 、(l’−1,ν許願第り/277 号2発
明の名称
5102膜形成用塗布液
3、補正をする背
事f’lとの関係 特許出願人名 称 f44
fil II )r、比成1−裟株式会社4、代 理
人
5補正のり・1g!
明細書の発明の詳細な説明の欄
6補正の内容
1)本願明細書第4頁下から5行目にr (RO)2P
(OH) J゛とあるのをF (RO)2P (OT
−I)、−Lと訂正します。Procedural amendment (voluntary) June 116, 1980 1.1f Public Prosecutor's Office 1, Indication of the case 1982, (l'-1, ν Permit No. 277 No. 2 Title of invention 5102 Coating for film formation Solution 3: Relationship with background f'l to be amended Name of patent applicant: f44
fil II) r, Hisei 1-Sai Co., Ltd. 4, agent
Person 5 correction glue 1g! Contents of amendment in Column 6 of Detailed Description of the Invention of the Specification 1) r (RO)2P in the 5th line from the bottom of page 4 of the specification of the present application
(OH) F (RO) 2P (OT
-I), correct it as -L.
以上that's all
Claims (1)
ン酸エステルの存在下で反応させて得られるヒドロキシ
シラン及び/又はそのオリゴマーを含有してなるS i
Ox膜形成用塗布液。 2、 リン酸エステルが分子中にヒドロキシル基を有す
るリン酸エステルである特許請求の範囲第1項記載のS
i Ox膜形成用塗布液。[Claims] 1. Si containing hydroxysilane and/or its oligomer obtained by reacting tetraalkoxysilane and water in the presence of a phosphoric acid ester in an organic solvent
Coating liquid for forming Ox film. 2. S according to claim 1, wherein the phosphoric ester is a phosphoric ester having a hydroxyl group in the molecule.
i Coating liquid for Ox film formation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7189782A JPS58189263A (en) | 1982-04-28 | 1982-04-28 | Coating fluid for sio2 film formation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7189782A JPS58189263A (en) | 1982-04-28 | 1982-04-28 | Coating fluid for sio2 film formation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58189263A true JPS58189263A (en) | 1983-11-04 |
JPS6358867B2 JPS6358867B2 (en) | 1988-11-17 |
Family
ID=13473778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7189782A Granted JPS58189263A (en) | 1982-04-28 | 1982-04-28 | Coating fluid for sio2 film formation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58189263A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60186570A (en) * | 1984-03-07 | 1985-09-24 | Nippon Soda Co Ltd | Composition for coating |
WO1993013393A1 (en) * | 1991-12-26 | 1993-07-08 | Elf Atochem North America, Inc. | Coating composition for glass |
EP0736488A4 (en) * | 1993-12-21 | 1996-12-18 | Mitsubishi Chem Ind | ULTRA-FINE REACTIVE SILICA PARTICLES, SUSPENSION CONTAINING THE SAME, AND HARD COATING COMPOSITION |
US6030445A (en) * | 1997-05-15 | 2000-02-29 | Advanced Delivery & Chemical Systems, Ltd. | Multi-component mixtures for manufacturing of in situ doped borophosphosilicate |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251868A (en) * | 1975-10-22 | 1977-04-26 | Seiko Epson Corp | Semiconductor integrated circuit |
JPS5534276A (en) * | 1978-09-04 | 1980-03-10 | Tokyo Denshi Kagaku Kabushiki | Preparation of coating liquid for silica-based film formation |
JPS5536216A (en) * | 1978-09-05 | 1980-03-13 | Mitsubishi Gas Chem Co Inc | Curing of organoalkoxysilane compound |
JPS5634234A (en) * | 1979-08-30 | 1981-04-06 | Toshiba Corp | Buffer circuit |
JPS5638472A (en) * | 1979-09-06 | 1981-04-13 | Tokyo Denshi Kagaku Kabushiki | Formation of silica coating |
JPS5638362A (en) * | 1979-09-06 | 1981-04-13 | Tokyo Denshi Kagaku Kabushiki | Preparation of coating solution for formation of high- purity silica film |
-
1982
- 1982-04-28 JP JP7189782A patent/JPS58189263A/en active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251868A (en) * | 1975-10-22 | 1977-04-26 | Seiko Epson Corp | Semiconductor integrated circuit |
JPS5534276A (en) * | 1978-09-04 | 1980-03-10 | Tokyo Denshi Kagaku Kabushiki | Preparation of coating liquid for silica-based film formation |
JPS5536216A (en) * | 1978-09-05 | 1980-03-13 | Mitsubishi Gas Chem Co Inc | Curing of organoalkoxysilane compound |
JPS5634234A (en) * | 1979-08-30 | 1981-04-06 | Toshiba Corp | Buffer circuit |
JPS5638472A (en) * | 1979-09-06 | 1981-04-13 | Tokyo Denshi Kagaku Kabushiki | Formation of silica coating |
JPS5638362A (en) * | 1979-09-06 | 1981-04-13 | Tokyo Denshi Kagaku Kabushiki | Preparation of coating solution for formation of high- purity silica film |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60186570A (en) * | 1984-03-07 | 1985-09-24 | Nippon Soda Co Ltd | Composition for coating |
WO1993013393A1 (en) * | 1991-12-26 | 1993-07-08 | Elf Atochem North America, Inc. | Coating composition for glass |
US5401305A (en) * | 1991-12-26 | 1995-03-28 | Elf Atochem North America, Inc. | Coating composition for glass |
CN1041814C (en) * | 1991-12-26 | 1999-01-27 | 北美埃尔夫爱托化学股份有限公司 | Coated article |
CN1041815C (en) * | 1991-12-26 | 1999-01-27 | 北美埃尔夫爱托化学股份有限公司 | Coating composition for glass |
CN1043988C (en) * | 1991-12-26 | 1999-07-07 | 北美埃尔夫爱托化学股份有限公司 | Method for coating glass substrates |
USRE41799E1 (en) * | 1991-12-26 | 2010-10-05 | Arkema Inc. | Coating composition for glass |
EP0736488A4 (en) * | 1993-12-21 | 1996-12-18 | Mitsubishi Chem Ind | ULTRA-FINE REACTIVE SILICA PARTICLES, SUSPENSION CONTAINING THE SAME, AND HARD COATING COMPOSITION |
EP1016625A1 (en) * | 1993-12-21 | 2000-07-05 | Mitsubishi Chemical Corporation | Suspension containing ultrafine reactive silica particles |
US6030445A (en) * | 1997-05-15 | 2000-02-29 | Advanced Delivery & Chemical Systems, Ltd. | Multi-component mixtures for manufacturing of in situ doped borophosphosilicate |
Also Published As
Publication number | Publication date |
---|---|
JPS6358867B2 (en) | 1988-11-17 |
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