[go: up one dir, main page]

JPS58189263A - Coating fluid for sio2 film formation - Google Patents

Coating fluid for sio2 film formation

Info

Publication number
JPS58189263A
JPS58189263A JP7189782A JP7189782A JPS58189263A JP S58189263 A JPS58189263 A JP S58189263A JP 7189782 A JP7189782 A JP 7189782A JP 7189782 A JP7189782 A JP 7189782A JP S58189263 A JPS58189263 A JP S58189263A
Authority
JP
Japan
Prior art keywords
coating
film
film formation
water
coating fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7189782A
Other languages
Japanese (ja)
Other versions
JPS6358867B2 (en
Inventor
Mitsuo Yamazaki
山崎 充夫
Shunichiro Uchimura
内村 俊一郎
Nintei Sato
任廷 佐藤
Daisuke Makino
大輔 牧野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP7189782A priority Critical patent/JPS58189263A/en
Publication of JPS58189263A publication Critical patent/JPS58189263A/en
Publication of JPS6358867B2 publication Critical patent/JPS6358867B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Paints Or Removers (AREA)

Abstract

PURPOSE:To provide a coating fluid for SiO2 film formation excellent in storage stability, workability, etc., by incorporating as a principal component hydroxysilane (oligomer) given by the reaction of tetraalkoxysilane with water in the presence of a phosphate in an org. solvent. CONSTITUTION:Tetraalkoxysilane (e.g., tetramethoxysilane, tetraisopropoxysilane) is reacted with water in the presence of a phosphate of formula I or II (wherein R is 1-6C alkyl, aryl) etc. in an org. solvent such as methanol, propylene glycol, or acetone. The resulting hydroxysilane and/or oligomers thereof, as principal components, and, if necessary, org. solvents, surfactants, etc. are blended to give the intended coating fluid for SiO2 film formation. Said coating film can be applied onto substrates such as glass, metallic materials or by roll-coating, offset printing, etc.

Description

【発明の詳細な説明】 本発明はガラス、セラミック、プラスチック。[Detailed description of the invention] This invention applies to glass, ceramics, and plastics.

金属等の基体上に、5iOz膜を形成するための塗布液
に関する。
The present invention relates to a coating liquid for forming a 5iOz film on a substrate such as metal.

S i Ot膜は、液晶表示素子のガラスからのアルカ
リイオン溶出防止膜、配向制御膜、ICのパッシベーシ
ョン[、B、Pをドープして拡散膜、ガラスビン等の表
面強化保護膜などとじて広く使用されている。
S i Ot film is widely used as a film to prevent alkali ion elution from the glass of liquid crystal display elements, an alignment control film, a passivation film for ICs, a diffusion film doped with B and P, and a surface-strengthened protective film for glass bottles, etc. has been done.

この5int膜の形成方法としては、気相成長法、塗布
法が一般に知られているが、前者は特殊な装置を必要と
し、また、大量生産には不向きである等の欠点を有する
。後者の塗布法では。
Vapor phase growth and coating methods are generally known as methods for forming this 5-inch film, but the former requires special equipment and is unsuitable for mass production. In the latter application method.

簡略な装置で大蓋生産が可能であり、(1)ハロゲン化
シラン、カルボン酸およびアルコールの反応生成物を用
いる方法(特公昭52−16488号公報、特公昭52
−20825号公報) 、 (2)アルコキシシラン、
低級カルボン酸およびアルコールとの生成物を用いる方
法(%開昭55−34258号公報)等が開示されてい
る。しかし、(1)の方法は、ハロゲン化水素やカルボ
ン酸ハライドが副生され、塗布液中にこのハロゲンイオ
ンが残留する場合があり、これらが塗布−熱処理して形
成した8 i 0.膜や、装置を腐食させるという欠点
を有する。(2)の方法は、(1)の欠点を補えるが、
アルコキシシランと等当量のカルボン酸を必要とし、こ
のカルボン酸から、カルボン酸エステルが形成されて塗
布液中に残留し。
Large lid production is possible with a simple device, and (1) method using a reaction product of halogenated silane, carboxylic acid, and alcohol (Japanese Patent Publication No. 16488/1988, Japanese Patent Publication No. 16488/1983,
-20825), (2) alkoxysilane,
A method using a product of a lower carboxylic acid and an alcohol (% JP-A-55-34258) has been disclosed. However, in method (1), hydrogen halides and carboxylic acid halides are produced as by-products, and these halogen ions may remain in the coating solution. It has the disadvantage of corroding membranes and equipment. Method (2) can compensate for the drawbacks of (1), but
It requires an equivalent amount of carboxylic acid to the alkoxysilane, and from this carboxylic acid, a carboxylic acid ester is formed and remains in the coating solution.

使用溶媒系が限定され、保存安定性が悪いという欠点を
有する。
It has the drawbacks of limited solvent systems and poor storage stability.

本発明の目的は上記した欠点のない均一なS i Os
膜の得られるS i O,膜形成用塗布液を提供するこ
とにある。
The object of the present invention is to produce uniform SiOs without the above-mentioned drawbacks.
The object of the present invention is to provide a coating liquid for forming a film using S i O.

本発明は、有機溶媒中でテトラアルコキシシランと水と
をリン酸エステルの存在下で反応させて得られるヒドロ
キシシラン及び/又はそのオリゴマーを含有してなるS
 i O,膜形成用塗布液に関する。
The present invention provides S containing a hydroxysilane and/or an oligomer thereof obtained by reacting a tetraalkoxysilane and water in an organic solvent in the presence of a phosphoric acid ester.
i O, relating to a coating liquid for film formation.

テトラアルコキシシランを水と混合攪拌又は加熱しても
反応しないが、リン酸エステルを添加することによシ発
熱して反応が進み、ヒドロキシシラン及び/又はそのオ
リゴマーを製造することができる。またリン酸エステル
は、ヒドロキシシラン及び/又はそのオリゴマーの安定
化剤としても作用し、リン酸エステルを加えたものは4
0℃に2ケ月間放置してもゲル化しない。
Tetraalkoxysilane does not react when mixed with water, stirred or heated, but when a phosphoric acid ester is added, the reaction progresses with heat generated, making it possible to produce hydroxysilane and/or its oligomer. Phosphoric esters also act as stabilizers for hydroxysilane and/or their oligomers, and those to which phosphoric esters are added are
It does not gel even if left at 0°C for 2 months.

本発明で用いるテトラアルコキシシランとしては9例え
ば、テトラメトキシシラン、テトラエトキシシラン、テ
トラインプロポキシシラン。
Examples of the tetraalkoxysilane used in the present invention include tetramethoxysilane, tetraethoxysilane, and tetralinepropoxysilane.

テトラブトキシシラン、テトラプロポキシシラン、テト
ラキス(2−エチルブトキシ)シラン。
Tetrabutoxysilane, tetrapropoxysilane, tetrakis(2-ethylbutoxy)silane.

テトラキス(2−メトキシエトキシ)シラン。Tetrakis(2-methoxyethoxy)silane.

テトラフェノキシシラン、これらの混合物、テトラアル
コキシシランのオリゴマー(たとえば。
Tetraphenoxysilanes, mixtures thereof, oligomers of tetraalkoxysilanes (e.g.

日本コルコート社製コルコート40)などが挙げられる
。テトラアルコキシシランは、塗膜の実用性と生成物の
安定性からテトラアルコキシ量%の範囲が好ましく10
〜40重tqbの範囲ハ が特に好ましい。
Examples include Colcoat 40) manufactured by Nippon Colcoat Co., Ltd. The tetraalkoxysilane preferably has a tetraalkoxy content in the range of 10% from the viewpoint of practicality of the coating film and stability of the product.
Particularly preferred is a range C of 40 to 40 tqb.

本発明で用いるリン酸エステルとしては。The phosphoric acid ester used in the present invention includes:

(RO)sPO,(RO)sP(OH)t (RO)*
PO(OH)。
(RO)sPO, (RO)sP(OH)t (RO)*
PO (OH).

(RO)PO(OH)□(Ro)sp、(I(o)sp
(OH)。
(RO)PO(OH)□(Ro)sp, (I(o)sp
(OH).

(RO)PO(ここで、Rは炭素数1〜6のアル、F)
p基又はアリーー基を示す)等力、挙げられ。
(RO)PO (where R is Al having 1 to 6 carbon atoms, F)
(representing a p group or an ary group).

特に9分子中にヒドロキシル基を含むものが好ましい。Particularly preferred are those containing hydroxyl groups in nine molecules.

このリン酸エステルの添加量はリン酸エステルの添加効
果と、形成されるS t O,膜の特性からテトラアル
コキシシランに対して0.01〜10重−1%の範囲が
好ましい。
The amount of the phosphoric acid ester added is preferably in the range of 0.01 to 10% by weight based on the tetraalkoxysilane in view of the effect of the addition of the phosphoric ester, S t O, and the properties of the film formed.

本発明で用いる有機溶媒としてはメタノール。The organic solvent used in the present invention is methanol.

エタノール、プ目ピルアルコール、イソプロピルアルコ
ール、ブチルアルコールナトのアルコール類、メチルセ
ロソルブ、エチルセロソルブ。
Ethanol, alcoholic acid, isopropyl alcohol, butyl alcohol, methyl cellosolve, ethyl cellosolve.

プチルセロノルプなどのセロソルブ類、メチルカルピト
ール、エチルカルピトール、ブチルカルピトールなどの
カルピト−ル類、エチレングリコール、プロピレングリ
コール。ジエチレングリコール、グリセリンなどのポリ
アルコール類、酢酸メチル、酢酸エチル、酢酸ブチルな
どのエステル類、アセトン、メチルエチルケトン。
Cellosolves such as butylselonorp, carpitols such as methylcarpitol, ethylcarpitol, butylcarpitol, ethylene glycol, propylene glycol. Polyalcohols such as diethylene glycol and glycerin, esters such as methyl acetate, ethyl acetate, and butyl acetate, acetone, and methyl ethyl ketone.

アセチルアセトンなどのケトン類、N−メチル−2−ピ
ロリドン、ジメチルアセトアミド、ジメチルホルムアミ
ド、ジメチルスルホキシド声νこれらの混合物などが使
用でき、特に、アルコール類、セロソルブ類、カルピト
ール類を主成分とし次溶媒系が好ましい。また、有機溶
媒5− として沸点の高いセロンルプ類、カルピトール類、N−
メチル−2−ピロリドン、ジメチルアセトアミドなどを
溶媒として用いることKよシ。
Ketones such as acetylacetone, N-methyl-2-pyrrolidone, dimethylacetamide, dimethylformamide, dimethyl sulfoxide, etc. can be used, and mixtures thereof can be used. In particular, solvents containing alcohols, cellosolves, and calpitols as main components can be used. preferable. In addition, as organic solvents 5-, seronlupes, calpitols, N-
It is recommended to use methyl-2-pyrrolidone, dimethylacetamide, etc. as a solvent.

塗布液を塗布した場合の塗膜の乾燥速度を遅くすること
ができるため、塗膜のレベリングが良好となシカロール
コータ−9フレキソ印刷、オフセット印刷等の塗布法が
利用できる。
Since the drying speed of the coating film when the coating liquid is applied can be slowed down, coating methods such as Cicaroll Coater 9 flexo printing and offset printing, which provide good leveling of the coating film, can be used.

本発明で添加される水は蒸留水又はイオン交換水が好ま
しく、その使用量は、テトラアルコキシシラン1 mo
lに対して4molが好ましい。
The water added in the present invention is preferably distilled water or ion-exchanged water, and the amount used is 1 mo of tetraalkoxysilane.
4 mol per liter is preferable.

これよりも少ないとヒドロキシシランの縮合化反応が進
み、不溶物を生成する傾向があシ、これよシも多いと未
反応の水が反応生成物中に残留し、塗布液の基体に対す
るぬれ性に影響し。
If the amount is less than this, the condensation reaction of hydroxysilane will proceed and there is a tendency to produce insoluble matter. If it is more than this, unreacted water will remain in the reaction product, making it difficult for the coating solution to wet the substrate. affect.

ぬれ性が悪くなる傾向にある。The wettability tends to be poor.

本発明におけるシラン及び/又はそのオリゴマーの製造
法は、テトラアルコキシン2ンヲ有ることが好ましい。
In the method for producing silane and/or its oligomer in the present invention, it is preferable that tetraalcoxin 2 is present.

反応温度は室温〜100℃6− とすることが好“ましく、これよりも高くするとゲル化
しやすい傾向にある。アルコキシシランと水との反応時
間は0.5〜5時間が好ましい。
The reaction temperature is preferably from room temperature to 100°C, and if it is higher than this, gelation tends to occur.The reaction time for the alkoxysilane and water is preferably 0.5 to 5 hours.

本発明になるSin、膜形成用塗布液は、有機溶媒中で
上記の拐料を反応させて得られる組成物をそのまま用い
ても良く、また、同−又は他の有機溶媒を加えて塗布液
としてもよい。場合によっては上記の材料を反応させて
得られる組成物中の有機溶媒の一部を除いてもよい。
The coating solution for forming a Sin film according to the present invention may be a composition obtained by reacting the above-mentioned coating material in an organic solvent, or may be prepared by adding the same or other organic solvent to the coating solution. You can also use it as In some cases, part of the organic solvent in the composition obtained by reacting the above materials may be removed.

本発明になるS10.膜形成用塗布液の基体に対するぬ
れ性を改良するため、界面活性剤を添加することも可能
である。界面活性剤としては。
S10 according to the present invention. In order to improve the wettability of the film-forming coating liquid to the substrate, it is also possible to add a surfactant. As a surfactant.

非イオン系界面活性剤が好ましい。!、た。siへ膜の
性質を変化さゼるためI P 1 B @ As+ G
Flgsb、 ’ri、 In、 A/等の化合物を添
加することも可能である。
Nonionic surfactants are preferred. ! ,Ta. To change the properties of the film to Si, I P 1 B @ As + G
It is also possible to add compounds such as Flgsb, 'ri, In, A/, etc.

本発明になるS i (%膜形成用塗布液を用いたS 
t O,膜の形成はこの塗布液を好ましくは室温で従来
開示されている方法、たとえばスピナー法、浸漬引上げ
法、刷毛塗り法、フレキソ印刷。
S i (% S using the coating liquid for film formation) according to the present invention
To form a film, the coating solution is preferably coated at room temperature by a conventionally disclosed method, such as a spinner method, a dipping/pulling method, a brush coating method, or flexographic printing.

ロールコータ−、オフセット印刷などによシ基体上に塗
布し、好ましくは200〜800℃で熱処理することに
よって行なわれる。熱処理温度が低い場合は、Sin、
膜の硬度が劣シ、熱処理温度を高くする程硬度の高いS
in、膜を得ることができる。基体としてはガラス、セ
ラミック、プラスチック、金属等の板、成形品等がある
This is carried out by applying the coating onto a substrate using a roll coater, offset printing, etc., and heat-treating preferably at 200 to 800°C. If the heat treatment temperature is low, Sin,
The hardness of the film is poor, and the higher the heat treatment temperature, the higher the hardness.
in, a membrane can be obtained. Examples of the substrate include plates and molded products made of glass, ceramic, plastic, metal, and the like.

以下本発明を実施例により説明する。The present invention will be explained below with reference to Examples.

実施例1 テトラエトキシシラン23fとエチルアルコール68.
88fの混合物にリン酸ジエチル0.177を加える。
Example 1 Tetraethoxysilane 23f and ethyl alcohol 68.
Add 0.177 of diethyl phosphate to the 88f mixture.

さらに、攪拌しながらイオン交換水7.95pを加える
と約10℃発熱して反応し、約3時間反応後の加熱残量
は150℃で9.0重量%。
Furthermore, when 7.95 p of ion-exchanged water was added while stirring, the reaction occurred with an exotherm of about 10°C, and after about 3 hours of reaction, the amount remaining after heating was 9.0% by weight at 150°C.

500℃で7.0重量%を示した。これをガラス基板に
、引上げ速度20cm/mjnで浸漬塗布し500℃で
焼成したところ9M厚約200 o′Aの高硬度の被膜
を得ることができた。また、この塗布液を40℃の恒温
槽に、2ケ月間放置してもゲル化は見られなかった。
It showed 7.0% by weight at 500°C. When this was coated on a glass substrate by dip coating at a pulling speed of 20 cm/mjn and baked at 500°C, a highly hard coating with a thickness of 9M and about 200 o'A could be obtained. Moreover, no gelation was observed even when this coating liquid was left in a constant temperature bath at 40° C. for 2 months.

実施例2 テトライソプロポキシシラン29.25L、プロピルア
ルコール62.62 Fの混合物にリン酸ジプチル0.
23Pを加える。さらに攪拌しながらイオン交換水7.
959−を加えると約8℃発熱して反応し。
Example 2 A mixture of 29.25 L of tetraisopropoxysilane and 62.62 F of propyl alcohol was mixed with 0.00 g of diptyl phosphate.
Add 23P. 7. Add ion-exchanged water while stirring.
When 959- is added, the reaction occurs with an exotherm of about 8°C.

約5時間反応後の加熱残量は150℃/30分で9.5
重量%、500℃/30分で7.2重量%を示した。こ
れをガラス基板に4000rpmでスピナー塗布し、5
00℃で焼成したところ膜厚的200OAの高硬度の被
膜を得ることができた。また、この塗布液を40℃の恒
温槽に入れ、2ケ月放置してもゲル化は見られなかった
The remaining amount of heating after about 5 hours of reaction is 9.5 at 150℃/30 minutes.
It showed 7.2% by weight at 500°C/30 minutes. Coat this on a glass substrate with a spinner at 4000 rpm, and
When fired at 00°C, a highly hard film with a thickness of 200 OA could be obtained. Furthermore, no gelation was observed even when this coating solution was placed in a constant temperature bath at 40° C. and left for two months.

実施例3 テトラエトキシシラン23f、N−メチル−2−ピロリ
ドン6 fl、88 Pの混合物にリン酸ジエチル0.
17 Pを加え、さらに攪拌しながら水7.951を加
えると約15℃発熱して反応し、3時間反応後の加熱残
量は150℃/30分で9.7重量%。
Example 3 A mixture of 23 f of tetraethoxysilane, 6 fl of N-methyl-2-pyrrolidone, and 88 P was mixed with 0.0 ml of diethyl phosphate.
When 17 P was added and 7.951 ml of water was added with further stirring, the reaction occurred with an exotherm of about 15°C, and the amount remaining after 3 hours of reaction was 9.7% by weight at 150°C/30 minutes.

500℃/30分で7.2重1lii−を示した。これ
を−9= ガラス基板にロールコータ−で塗布し、500’Cで焼
成したところ、膜厚的220 oAの高硬度な被膜を得
ることができた。また、この塗布液を40℃の恒温槽に
入れ、2ケ月放置してもゲル化は見られなかった。
At 500°C/30 minutes, 7.2 folds of 1lii- were exhibited. When this was coated on a -9= glass substrate using a roll coater and baked at 500'C, a highly hard film with a film thickness of 220 oA could be obtained. Furthermore, no gelation was observed even when this coating solution was placed in a constant temperature bath at 40° C. and left for two months.

比較例1 テトラエトキシシラン23p、エチルアルコ−ル63.
09 Pの混合物に無水酢酸5.97p加え。
Comparative Example 1 Tetraethoxysilane 23p, ethyl alcohol 63p.
09 Added 5.97 p of acetic anhydride to the P mixture.

さらに攪拌しながら水を7.95 )加えたところ。While stirring, water was added (7.95%).

発熱は見られず、室温反応1時間後の150”(,73
0分の加熱残量は0.95重ftsであった。そこった
。しかし、この塗布液を40℃の恒温槽に放置したとこ
ろ、1ケ月以内でゲル化が見られた。
No heat generation was observed, and 150" (,73
The remaining heating amount at 0 minutes was 0.95 weight fts. There it was. However, when this coating solution was left in a constant temperature bath at 40° C., gelation was observed within one month.

本発明になるS i Ox膜形成用塗布液は、保存安定
性にすぐれ、また高沸点溶媒を使用した場合にはロール
コータ−やフレキソ印刷を利用することができ、パター
ン形成を容易にすることができる。
The coating solution for forming a SiOx film according to the present invention has excellent storage stability, and when a high boiling point solvent is used, it can be used with a roll coater or flexographic printing, making pattern formation easy. I can do it.

手続補正書(自発) 昭和 57年 6月116 1.1f許庁艮官殿 1、事件の表示 昭和57 、(l’−1,ν許願第り/277 号2発
明の名称 5102膜形成用塗布液 3、補正をする背 事f’lとの関係     特許出願人名 称 f44
fil II )r、比成1−裟株式会社4、代 理 
人 5補正のり・1g! 明細書の発明の詳細な説明の欄 6補正の内容 1)本願明細書第4頁下から5行目にr (RO)2P
 (OH) J゛とあるのをF (RO)2P (OT
−I)、−Lと訂正します。
Procedural amendment (voluntary) June 116, 1980 1.1f Public Prosecutor's Office 1, Indication of the case 1982, (l'-1, ν Permit No. 277 No. 2 Title of invention 5102 Coating for film formation Solution 3: Relationship with background f'l to be amended Name of patent applicant: f44
fil II) r, Hisei 1-Sai Co., Ltd. 4, agent
Person 5 correction glue 1g! Contents of amendment in Column 6 of Detailed Description of the Invention of the Specification 1) r (RO)2P in the 5th line from the bottom of page 4 of the specification of the present application
(OH) F (RO) 2P (OT
-I), correct it as -L.

以上that's all

Claims (1)

【特許請求の範囲】 1、有機溶媒中で、テトラアルコキシシランと水とをリ
ン酸エステルの存在下で反応させて得られるヒドロキシ
シラン及び/又はそのオリゴマーを含有してなるS i
 Ox膜形成用塗布液。 2、 リン酸エステルが分子中にヒドロキシル基を有す
るリン酸エステルである特許請求の範囲第1項記載のS
 i Ox膜形成用塗布液。
[Claims] 1. Si containing hydroxysilane and/or its oligomer obtained by reacting tetraalkoxysilane and water in the presence of a phosphoric acid ester in an organic solvent
Coating liquid for forming Ox film. 2. S according to claim 1, wherein the phosphoric ester is a phosphoric ester having a hydroxyl group in the molecule.
i Coating liquid for Ox film formation.
JP7189782A 1982-04-28 1982-04-28 Coating fluid for sio2 film formation Granted JPS58189263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7189782A JPS58189263A (en) 1982-04-28 1982-04-28 Coating fluid for sio2 film formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7189782A JPS58189263A (en) 1982-04-28 1982-04-28 Coating fluid for sio2 film formation

Publications (2)

Publication Number Publication Date
JPS58189263A true JPS58189263A (en) 1983-11-04
JPS6358867B2 JPS6358867B2 (en) 1988-11-17

Family

ID=13473778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7189782A Granted JPS58189263A (en) 1982-04-28 1982-04-28 Coating fluid for sio2 film formation

Country Status (1)

Country Link
JP (1) JPS58189263A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186570A (en) * 1984-03-07 1985-09-24 Nippon Soda Co Ltd Composition for coating
WO1993013393A1 (en) * 1991-12-26 1993-07-08 Elf Atochem North America, Inc. Coating composition for glass
EP0736488A4 (en) * 1993-12-21 1996-12-18 Mitsubishi Chem Ind ULTRA-FINE REACTIVE SILICA PARTICLES, SUSPENSION CONTAINING THE SAME, AND HARD COATING COMPOSITION
US6030445A (en) * 1997-05-15 2000-02-29 Advanced Delivery & Chemical Systems, Ltd. Multi-component mixtures for manufacturing of in situ doped borophosphosilicate

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251868A (en) * 1975-10-22 1977-04-26 Seiko Epson Corp Semiconductor integrated circuit
JPS5534276A (en) * 1978-09-04 1980-03-10 Tokyo Denshi Kagaku Kabushiki Preparation of coating liquid for silica-based film formation
JPS5536216A (en) * 1978-09-05 1980-03-13 Mitsubishi Gas Chem Co Inc Curing of organoalkoxysilane compound
JPS5634234A (en) * 1979-08-30 1981-04-06 Toshiba Corp Buffer circuit
JPS5638472A (en) * 1979-09-06 1981-04-13 Tokyo Denshi Kagaku Kabushiki Formation of silica coating
JPS5638362A (en) * 1979-09-06 1981-04-13 Tokyo Denshi Kagaku Kabushiki Preparation of coating solution for formation of high- purity silica film

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251868A (en) * 1975-10-22 1977-04-26 Seiko Epson Corp Semiconductor integrated circuit
JPS5534276A (en) * 1978-09-04 1980-03-10 Tokyo Denshi Kagaku Kabushiki Preparation of coating liquid for silica-based film formation
JPS5536216A (en) * 1978-09-05 1980-03-13 Mitsubishi Gas Chem Co Inc Curing of organoalkoxysilane compound
JPS5634234A (en) * 1979-08-30 1981-04-06 Toshiba Corp Buffer circuit
JPS5638472A (en) * 1979-09-06 1981-04-13 Tokyo Denshi Kagaku Kabushiki Formation of silica coating
JPS5638362A (en) * 1979-09-06 1981-04-13 Tokyo Denshi Kagaku Kabushiki Preparation of coating solution for formation of high- purity silica film

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186570A (en) * 1984-03-07 1985-09-24 Nippon Soda Co Ltd Composition for coating
WO1993013393A1 (en) * 1991-12-26 1993-07-08 Elf Atochem North America, Inc. Coating composition for glass
US5401305A (en) * 1991-12-26 1995-03-28 Elf Atochem North America, Inc. Coating composition for glass
CN1041814C (en) * 1991-12-26 1999-01-27 北美埃尔夫爱托化学股份有限公司 Coated article
CN1041815C (en) * 1991-12-26 1999-01-27 北美埃尔夫爱托化学股份有限公司 Coating composition for glass
CN1043988C (en) * 1991-12-26 1999-07-07 北美埃尔夫爱托化学股份有限公司 Method for coating glass substrates
USRE41799E1 (en) * 1991-12-26 2010-10-05 Arkema Inc. Coating composition for glass
EP0736488A4 (en) * 1993-12-21 1996-12-18 Mitsubishi Chem Ind ULTRA-FINE REACTIVE SILICA PARTICLES, SUSPENSION CONTAINING THE SAME, AND HARD COATING COMPOSITION
EP1016625A1 (en) * 1993-12-21 2000-07-05 Mitsubishi Chemical Corporation Suspension containing ultrafine reactive silica particles
US6030445A (en) * 1997-05-15 2000-02-29 Advanced Delivery & Chemical Systems, Ltd. Multi-component mixtures for manufacturing of in situ doped borophosphosilicate

Also Published As

Publication number Publication date
JPS6358867B2 (en) 1988-11-17

Similar Documents

Publication Publication Date Title
US5091009A (en) Coating composition and a process for manufacturing the same
US4420500A (en) Composition and process for preparing transparent conducting film
US5700391A (en) Liquid coating composition forming a liquid crystal display element insulating film
JP2729373B2 (en) Coating solution for metal oxide film formation
JPS63108082A (en) Coating fluid for forming silicon oxide film
JP2007111645A5 (en)
US5384356A (en) Liquid coating composition forming a liquid crystal display element insulating film
JPS58189263A (en) Coating fluid for sio2 film formation
JP2621760B2 (en) Composition for coating
JPH0633000A (en) Coating solution for forming insulation film with high refractive index for liquid crystal display device
JPH01111709A (en) Production of hydroxysilane and/or its oligomer
JPH07331172A (en) Coating composition for formation of color filter-protecting film
TWI225085B (en) Coating composition
JPH05124818A (en) Coating liquid for forming metal oxide coated film
JPH03126612A (en) Silicon-containing solution and film forming coating solution
JP2637793B2 (en) Composition for coating
JPH06299091A (en) Coating composition for forming antireflection film
JPS639018B2 (en)
JPH1054979A (en) Liquid crystal display element substrate
JP3740714B2 (en) Siloxane compound, method for producing the same, and curable composition
JPH07157715A (en) Production of coating composition
JPS58204815A (en) Preparation of hydroxysilane and/or oligomer thereof
JP3360408B2 (en) Coating solution for metal oxide film formation
JPS642669B2 (en)
JP2003082118A (en) Substrate film for electronic display element, electronic optical element, touch panel, or solar cell