JPS5814335Y2 - scanning device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a scanning device, particularly a laser beam scanning device.

Conventionally, deflectors such as a rotating mirror galvanometer, an AD deflector, and an E-D deflector have been used as laser beam scanning devices.

However, all of these deflectors can only scan in one direction (one dimension), so if you want to scan in two directions (two dimensions), the X and Y directions, you need two deflectors. I need.

For this reason, separate scanning systems are used in the X and Y directions, making it difficult to set the optical axis, and one button in the X direction and one deflector in the Y direction are used. Moreover, since each scanning system is required, the overall size and complexity are disadvantageous.

The present invention was developed in view of the above circumstances, and its purpose is to provide two rotations in the X and Y directions using one rotating mirror.
It is an object of the present invention to provide a scanning device capable of performing dimensional scanning.

Embodiments of the present invention will be described below with reference to the drawings.

The rotating mirror 1 is transmission-supported via a shaft 4 to a drive source 3 such as a drive motor fixed to a support 2.
It is configured so that it can be rotated through.

Reference numeral 5 denotes an annular guide body, and the guide body 5 is connected to the mirror surface 1a of the rotating mirror 1.
It is an annular body having a radius R centered on an arbitrary point P toward the guide body 5, and the support body 2 is configured to be rotatable along this guide body 5.

A first screw threadedly connected to the fixed body 6 is provided on the opposing end surfaces 2a, 2a of the support body 2. The second threaded rods 7 and 8 are in contact with each other and are biased to rotate oppositely by a pair of springs 9 and 10 to support the support body 2.
is the first. It is supported at a position where it abuts the second neck leaves 7 and 8.

As mentioned above, No. 1. The second threaded rods 7 and 8 have opposite threads to each other, and the second threaded rods 7 and 8 have opposite threads to each other. When the second threaded rods 7, 8 are screwed in or loosened, the support body 2 rotates in the forward and reverse directions along with the guide body 5.

Next, the operation will be explained.

Considering how the laser beam incident on the point P of the mirror surface 1a of the rotating mirror 1 is reflected in the axial direction, as shown in Fig. 3, when the rotating mirror 1 is at the solid line position, the laser beam is incident on the point P. The laser beam is reflected in the direction shown by the solid line, and when the rotating mirror 1 is tilted by α degrees to the virtual line position as described above, the laser beam incident on point P is deflected by an angle of 2 α degrees in the direction shown by the virtual line. and reflect.

That is, by tilting the rotating mirror 1, the laser beam can be scanned in the axial direction.

Considering how the laser beam incident on the mirror surface 1a of the rotating mirror 1 is reflected in the rotating direction of the rotating mirror 10, as shown in FIG. scan.

Therefore, if the rotary mirror 1 is tilted while rotating, the fifth
As shown in the figure, the laser beam can be scanned two-dimensionally in the axial direction (y direction) and rotational direction (x direction).

Since the present invention is constructed as described above, one rotating mirror 1 can be used to perform two-dimensional scanning in the X and Y directions.

Therefore, it has the advantage that the setting of the optical axis, etc. is easy, and the device as a whole is small and simple.

In addition, a support body 2 rotatably supporting the rotary mirror 1 is provided rotatably along a guide body 5 in a direction perpendicular to the rotation direction of the rotary mirror 1. Since the radius is centered at a point P facing the mirror surface 1a, even if the support body 2 is rotated along the guide body 5 and the rotating mirror 1 is tilted in a direction perpendicular to the direction of rotation, the radius will be centered at a point P toward the mirror surface 1a. Since P is always at the same position, one rotating mirror 1 can be used to perform two-dimensional scanning in the X and Y directions, and the direction of the incident light can always be at the same position. , rotating mirror 1
Since it is only necessary to rotate the support body 2 along the guide body 5 at the same time as rotating the support body 2, the operation control is simple and easy, and the structure for rotating the rotating mirror 1 in the orthogonal direction 23 is extremely simple. and reliably move the X and Y directions without any errors.
Can perform two-dimensional scanning in the direction.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention; FIG. 1 is an overall front view, FIG. 2 is a cross-sectional view taken along the line 11--■ in FIG. 1, and FIGS. 3 to 5 are illustrations of its operation. . 1 is a rotating mirror, and 1a is a mirror surface.

Claims (1)

[Scope of utility model registration request] A rotary mirror 1 is connected to a drive source 3 fixed to a support 2 via a shaft 4.
The rotary mirror 1 is configured to be rotatably moved by a shaft 4, and the support body 2 is rotatably supported along an annular guide body 5 in a direction perpendicular to the direction of rotation of the rotary mirror 10. At the same time, the guide body 5 is moved to the mirror surface 1a of the rotating mirror 1.
A scanning device characterized in that it is an annular body having a radius centered on a point P.