JPS58102181A - X ray spectroscopy - Google Patents

Abstract

PURPOSE:To enable the measurement of spectroscopic value of soft X ray regardless of X rays radiated in pulse and continuously radiated by measuring kinetic energy and quantity of photoelectrons released when X ray to be measured irradiates oxygen. CONSTITUTION:A metal substrate 2 is cooled sufficiently with a cooler 3 full of a liquid helium or the like so that an oxygen adsorbed layer 4 will be formed on the surface thereof. When X ray 1 to be measured irradiates the layer 4, photoelectrons 5 are released therefrom. The photoelectrons 5 are introduced into a kinetic energy discriminator 6 to measure kinetic energy thereof along with the quantity thereof, which provides a spectrum with the kinetic energy corresponding to the wavelength of the X ray and the quantity of photoelectrons corresponding to the luminous intensity thereof. Thus, the spectroscopic value of the X ray is measured. These measurements are conducted in a vacuum vessel 7 to prevent absorption of X ray and scattering of photoelectrons due to air.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to Xs spectroscopy that allows easy measurement of the wavelength and intensity of soft X@ in the wavelength range of 17 to 23'A.

Conventional X41 spectroscopy uses a semiconductor detector;
■It is roughly divided into those using diffraction crystals (or diffraction gratings).
Roughly ■ is measured while moving the Φ diffraction crystal (or diffraction grating) on -1 land circumference, @the same stomach-land circumference as the opposite land circle where the diffraction crystal (or diffraction grating) is placed. It can be divided into those with X1ly illumination installed on top. By the way, these X! 1 spectroscopy, ■ is a short pulse X! of less than / psac in terms of the response speed of the semiconductor detector. Not only is it unsuitable for spectrophotometric measurement of I, but it is also difficult to detect and analyze soft X-rays with wavelengths of 101 or more. Φ of (2) requires a long time for spectrophotometric measurement of pulsed X-rays, and is not practical. Furthermore, as the wavelength of 0 o+-xxts becomes longer, the focal point of the diffraction crystal (or diffraction grating) becomes longer, so there is a drawback that the i-position becomes larger.゛In view of the above circumstances, the present invention utilizes pulsed radiation X@.

This provides XII spectroscopy, which allows the spectrophotometric measurement of soft X-rays regardless of the line of continuous radiation, and which allows the equipment used to be miniaturized.
By irradiating a beam and measuring the kinetic energy and amount of emitted photoelectrons, the wavelength range l! It is characterized by measuring the wavelength and intensity of soft XIm of ~30χ.

Hereinafter, the present invention will be disclosed in detail with reference to the drawings.

#I1 is a diagram showing an embodiment of the present invention, in which l is the X-ray to be separated, 3 is the metal substrate, 8 is the cooler, 2 is the oxygen adsorption layer, 2 is the photoelectron, and 6 is the The photoelectron kinetic energy discriminator, Te, is a single vacuum device.

The metal substrate 3 is finished in a clean state,
For example, it is sufficiently cooled by a cooler S filled with liquid helium, etc., and by adsorbing oxygen gas on its surface, acid l! An adsorption layer is formed. When this is irradiated with X1ll to be dispersed, photoelectrons i are emitted from the oxygen adsorption layer.

Ordinarily, the orbital electrons of oxygen bond with the atomic nucleus with a binding energy of j3t≦eV and maintain a safe state, but the vibration frequency ν
When it is irradiated with X@, it is excited and b y-XII, 4
It becomes a photoelectron with a kinetic energy of (-Elk)eV and jumps out into the vacuum. When X-rays contain various frequencies, the kinetic energy Bk of photoelectrons changes accordingly.
It takes a variety of values. Therefore, if a photoelectronic device is guided to the kinetic energy discriminator 6 and the kinetic energy is measured, and the amount of photoelectrons is measured at the same time, the spectrum as shown in FIG. ) is obtained. In this way, the spectrophotometric intensity of X-rays is measured. These measurements are performed in a vacuum chamber to prevent absorption of XII and scattering of photoelectrons by air. In this measurement, if a five-type photographic film is used as a kinetic energy discriminator, spectroscopy is possible even when the X-ray is a short pulse.

In addition, XII wavelength power h 1 < j J /, 4 @
When V01 condition 1 is satisfied, that is, photoelectrons are extremely attenuated in the wavelength range of SAD or more. X of frequency ν! Oxygen subjected to illumination also emits photoelectrons of IC#l-711 3 eV due to the Auger effect, so h*>71! It is unsuitable for spectroscopy of X-rays with a wavelength below tttl corresponding to the frequency.

Therefore, measurable x11 when using an oxygen adsorption layer
The wavelength is 17~JJ! It is.

FIG. 3 is a diagram showing another embodiment of the present invention. In this figure, the same components as those of the first WJ are given the same reference numerals. In this figure, oxygen gas 9 is directed into xsm radiation 1111 through nozzle lO. The oxygen gas led into the chamber 11 is irradiated with X1m1 to be separated through the XaI irradiation hole 1m of the chamber 11. Photoelectrons obtained in the chamber 11 are guided to the kinetic energy discriminator 6 in the case of FIG.

Thus, by performing measurements similar to those shown in FIG. 1 on this kinetic energy discriminator 6, the spectrophotometric intensity of X1s can be measured. In the figure, reference numerals 18 and 14 are exhaust ports for evacuating the inside of the vacuum chamber γ for 1i 11% x-ray radiation in order to prevent absorption of X-rays and scattering of photons by oxygen gas.

As explained above, the present invention performs X-ray spectroscopy by measuring the kinetic energy and quantity of photoelectrons. According to the present invention, X-rays of pulsed radiation, XII of continuous radiation
This method has the advantage that it is possible to measure the spectrophotometry of soft X-rays without hearing the noise, and that the equipment used can be made smaller.

[Brief explanation of the drawing]

1st WJ is a diagram showing one embodiment of the present invention, FIG. 2 is a diagram showing the relationship between the intensity and kinetic energy of photoelectrons measured in the same embodiment, and FIG. 3 is a diagram showing another embodiment of the present invention. FIG. l...Xls, s...Metal substrate, 8
...Cooler, unit...Oxygen adsorption layer, vessel...Photoelectron, 6...Kinetic energy discriminator, 7...Medium vacuum container, 9...Oxygen gas,
lO...Nozzle, ll...-xmm firing chamber 1
Iml...X1s irradiation hole. Applicant: Nippon Telegraph and Telephone Public Corporation Figure 1 f Figure 2 Lun◆b Energy Figure 3 45

Claims (1)

[Claims] By irradiating oxygen with xII to be spectrally dispersed and measuring the interlocking energy and amount of emitted photoelectrons, wavelength range 17
X1m spectroscopy characterized by measuring the wavelength and intensity of IIk X-rays at ~23x.