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JPS5789479A - Etchant for transparent electric conductive film - Google Patents

Etchant for transparent electric conductive film

Info

Publication number
JPS5789479A
JPS5789479A JP16619680A JP16619680A JPS5789479A JP S5789479 A JPS5789479 A JP S5789479A JP 16619680 A JP16619680 A JP 16619680A JP 16619680 A JP16619680 A JP 16619680A JP S5789479 A JPS5789479 A JP S5789479A
Authority
JP
Japan
Prior art keywords
acid
etchant
conductive film
electric conductive
transparent electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16619680A
Other languages
Japanese (ja)
Other versions
JPS6248757B2 (en
Inventor
Kaname Miyazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP16619680A priority Critical patent/JPS5789479A/en
Publication of JPS5789479A publication Critical patent/JPS5789479A/en
Publication of JPS6248757B2 publication Critical patent/JPS6248757B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To enable immersion etching in a solution having a long life, by using an inorganic acid containing a specified amount of NH4F as an etchant for a SnO2 type transparent electric conductive film for use as a display electrode.
CONSTITUTION: A transparent electric conductive film for use as the electrode of a liquid crystal display is prepared from a material based on SnO2 to which 0.01W1.0mol% of Sb2O5 is doped. A fine pattern is formed on the film by etching. In this case, an acidic water solution, in which an inorganic acid, e.g. nitric acid, sulfuric acid, hydrochloric acid, phosphoric acid, hydrobromic acid or hydroiodic acid, containing 0.5g/l or more of NH4F is dissolved at a rate of 0.5WHN, is used as an etchant. This etchant is applicable for immersion etching such as ultrasonic immersion, and it has economic advantages such as a long life.
COPYRIGHT: (C)1982,JPO&Japio
JP16619680A 1980-11-26 1980-11-26 Etchant for transparent electric conductive film Granted JPS5789479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16619680A JPS5789479A (en) 1980-11-26 1980-11-26 Etchant for transparent electric conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16619680A JPS5789479A (en) 1980-11-26 1980-11-26 Etchant for transparent electric conductive film

Publications (2)

Publication Number Publication Date
JPS5789479A true JPS5789479A (en) 1982-06-03
JPS6248757B2 JPS6248757B2 (en) 1987-10-15

Family

ID=15826862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16619680A Granted JPS5789479A (en) 1980-11-26 1980-11-26 Etchant for transparent electric conductive film

Country Status (1)

Country Link
JP (1) JPS5789479A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3937442A1 (en) * 1989-11-10 1991-05-16 Nokia Unterhaltungselektronik METHOD FOR AREA REMOVAL OF LAYERS FROM A SUBSTRATE
EP0468358A2 (en) * 1990-07-18 1992-01-29 Canon Kabushiki Kaisha Process for producing electrode plate structure for liquid crystal color display device
JP2010067826A (en) * 2008-09-11 2010-03-25 Tosoh Corp Etchant for transparent electrode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3937442A1 (en) * 1989-11-10 1991-05-16 Nokia Unterhaltungselektronik METHOD FOR AREA REMOVAL OF LAYERS FROM A SUBSTRATE
EP0468358A2 (en) * 1990-07-18 1992-01-29 Canon Kabushiki Kaisha Process for producing electrode plate structure for liquid crystal color display device
JP2010067826A (en) * 2008-09-11 2010-03-25 Tosoh Corp Etchant for transparent electrode

Also Published As

Publication number Publication date
JPS6248757B2 (en) 1987-10-15

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