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JPS5757873A - Sliding member - Google Patents

Sliding member

Info

Publication number
JPS5757873A
JPS5757873A JP13401480A JP13401480A JPS5757873A JP S5757873 A JPS5757873 A JP S5757873A JP 13401480 A JP13401480 A JP 13401480A JP 13401480 A JP13401480 A JP 13401480A JP S5757873 A JPS5757873 A JP S5757873A
Authority
JP
Japan
Prior art keywords
silicon carbide
coating layer
sliding
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13401480A
Other languages
Japanese (ja)
Other versions
JPS6033794B2 (en
Inventor
Saburo Tabata
Yasuhiro Akune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Nippon Pillar Packing Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP13401480A priority Critical patent/JPS6033794B2/en
Publication of JPS5757873A publication Critical patent/JPS5757873A/en
Publication of JPS6033794B2 publication Critical patent/JPS6033794B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Sliding-Contact Bearings (AREA)

Abstract

PURPOSE:To provide a sliding member in which a substrate and a silicon carbide layer are firmly bound and which has superior sliding characteristics by providing a metallic coating beforehand on the surface part of the aluminum substrate then forming the silicon carbide coating layer by sputter vapor deposition. CONSTITUTION:Metallizing of Mo or Mn-Mo alloy is applied on the surface part of an alumina substrate 2 of a sliding member 1, whereby a metallic coating layer 3 is provided. Thence, silicon carbide is vapor deposited by sputtering, whereby a silicon carbide coating layer 4 of prescribed length is formed. According to this method, the alumina substrate 2 and the silicon carbide coating layer 4 are firmly bound by the metallic coating layer 3. Since the member 1 is so designed that it is released and eliminated of differences in thermal expansion, thermal strains, etc. by the layer 3, it is adaptable for sealing rings of mechanical seals, sliding surfaces of bearings, and sliding members of turbines and pumps.
JP13401480A 1980-09-25 1980-09-25 sliding member Expired JPS6033794B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13401480A JPS6033794B2 (en) 1980-09-25 1980-09-25 sliding member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13401480A JPS6033794B2 (en) 1980-09-25 1980-09-25 sliding member

Publications (2)

Publication Number Publication Date
JPS5757873A true JPS5757873A (en) 1982-04-07
JPS6033794B2 JPS6033794B2 (en) 1985-08-05

Family

ID=15118349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13401480A Expired JPS6033794B2 (en) 1980-09-25 1980-09-25 sliding member

Country Status (1)

Country Link
JP (1) JPS6033794B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245829A (en) * 1984-05-21 1985-12-05 Sankyo Kasei Kk Complex sliding member
JPS63315585A (en) * 1987-06-17 1988-12-23 Ngk Insulators Ltd Metal-ceramic composite
JPS6413280U (en) * 1987-07-15 1989-01-24

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245829A (en) * 1984-05-21 1985-12-05 Sankyo Kasei Kk Complex sliding member
JPH0128246B2 (en) * 1984-05-21 1989-06-01 Sankyo Kasei Kk
JPS63315585A (en) * 1987-06-17 1988-12-23 Ngk Insulators Ltd Metal-ceramic composite
JPS6413280U (en) * 1987-07-15 1989-01-24

Also Published As

Publication number Publication date
JPS6033794B2 (en) 1985-08-05

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