JPS5748644A - Detection of defect for transparent body - Google Patents
Detection of defect for transparent bodyInfo
- Publication number
- JPS5748644A JPS5748644A JP12401280A JP12401280A JPS5748644A JP S5748644 A JPS5748644 A JP S5748644A JP 12401280 A JP12401280 A JP 12401280A JP 12401280 A JP12401280 A JP 12401280A JP S5748644 A JPS5748644 A JP S5748644A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- transparent body
- passing
- ray
- absorbed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To absorb the light scattered by the defect near the rear surface of a transparent body during passing of the transparent body and prevent the defect from being detected near the rear surface by using an incident ray of the absorption wavelength region of the transparent body. CONSTITUTION:When an incident ray is the ray of the absorption wavelength region of a transparent body 1 to be detected of defects, the incident ray is gradually absorbed and weakened by the body 1 while it is passing through the body 1. Hence, the ray projected to a defect 4 existing near (b) the rear surface of the body 1 is gradually absorbed and weakened by the body 1 while it is passing through the transparent body before it is projected, and further the scattered and reflected abnormal light by this defect 4 is also absorbed while it is passing through the transparent body; therefore at the time when the reflected abnormal light toward a detector 3 emerges from the body 1, it is substantially absorbed by the body 1 and is difficult to be detected by the detector 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12401280A JPS5748644A (en) | 1980-09-09 | 1980-09-09 | Detection of defect for transparent body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12401280A JPS5748644A (en) | 1980-09-09 | 1980-09-09 | Detection of defect for transparent body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5748644A true JPS5748644A (en) | 1982-03-20 |
Family
ID=14874832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12401280A Pending JPS5748644A (en) | 1980-09-09 | 1980-09-09 | Detection of defect for transparent body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5748644A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63107078A (en) * | 1986-10-23 | 1988-05-12 | Mitsubishi Electric Corp | Laser equipment |
| JPS63200043A (en) * | 1987-02-14 | 1988-08-18 | Hamamatsu Photonics Kk | Apparatus for detecting surface flaw of sheet like object to be inspected |
| JP2001108630A (en) * | 1999-10-12 | 2001-04-20 | Sumitomo Chem Co Ltd | Optical transparent film inspection method |
-
1980
- 1980-09-09 JP JP12401280A patent/JPS5748644A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63107078A (en) * | 1986-10-23 | 1988-05-12 | Mitsubishi Electric Corp | Laser equipment |
| JPS63200043A (en) * | 1987-02-14 | 1988-08-18 | Hamamatsu Photonics Kk | Apparatus for detecting surface flaw of sheet like object to be inspected |
| JP2001108630A (en) * | 1999-10-12 | 2001-04-20 | Sumitomo Chem Co Ltd | Optical transparent film inspection method |
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