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JPS5483885A - Surface inspector - Google Patents

Surface inspector

Info

Publication number
JPS5483885A
JPS5483885A JP15203377A JP15203377A JPS5483885A JP S5483885 A JPS5483885 A JP S5483885A JP 15203377 A JP15203377 A JP 15203377A JP 15203377 A JP15203377 A JP 15203377A JP S5483885 A JPS5483885 A JP S5483885A
Authority
JP
Japan
Prior art keywords
laser beam
cylindrical body
flaw
mirror
signal processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15203377A
Other languages
Japanese (ja)
Inventor
Kenji Shiroshita
Makoto Kikuchi
Michio Oomichi
Keiji Nagamine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15203377A priority Critical patent/JPS5483885A/en
Publication of JPS5483885A publication Critical patent/JPS5483885A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To inspect the surface of a cylindrical body with the use of the fact that scattering takes place due to a flaw in the surface to reduce the intensity of the reflected light by turning the cylindrical body at a preset speed by a roller and by irradiating the surface with a laser beam having a spot diameter while effecting the scanning operation with the use of a vibratng mirror. CONSTITUTION:A laser beam 2 having a spot diameter is emitted from a laser beam 1 and is canned by a bibrating mirror 3 at a preset position on the surface of a cylindrical body 4 to be measured. This body is turned at a preset speed by means of turning rollers 5 and 5'. The reflected light 6 of the laser beam 2, which has been projected upon the cylindrical body 4, is concentrated upon the light receiving surface of an optical detector 8 by means of a condensing lens 7 so that the signal processing operation such as the judgement of the flaw, and its size and propriety of the test piece may be accomplished by a signal processing circuit 9.
JP15203377A 1977-12-17 1977-12-17 Surface inspector Pending JPS5483885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15203377A JPS5483885A (en) 1977-12-17 1977-12-17 Surface inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15203377A JPS5483885A (en) 1977-12-17 1977-12-17 Surface inspector

Publications (1)

Publication Number Publication Date
JPS5483885A true JPS5483885A (en) 1979-07-04

Family

ID=15531578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15203377A Pending JPS5483885A (en) 1977-12-17 1977-12-17 Surface inspector

Country Status (1)

Country Link
JP (1) JPS5483885A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146843A (en) * 1982-02-25 1983-09-01 Sumitomo Metal Ind Ltd Screw surface defect inspection device
JPS58146842A (en) * 1982-02-25 1983-09-01 Sumitomo Metal Ind Ltd Device for inspecting surface defect of screw
JPS6058536A (en) * 1983-09-12 1985-04-04 Kawasaki Steel Corp Method and apparatus for checking property of cut and machined surface

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146843A (en) * 1982-02-25 1983-09-01 Sumitomo Metal Ind Ltd Screw surface defect inspection device
JPS58146842A (en) * 1982-02-25 1983-09-01 Sumitomo Metal Ind Ltd Device for inspecting surface defect of screw
JPH0449063B2 (en) * 1982-02-25 1992-08-10 Sumitomo Kinzoku Kogyo Kk
JPH0514221B2 (en) * 1982-02-25 1993-02-24 Sumitomo Kinzoku Kogyo Kk
JPS6058536A (en) * 1983-09-12 1985-04-04 Kawasaki Steel Corp Method and apparatus for checking property of cut and machined surface

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