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JPS5743983A - Film preparing apparatus - Google Patents

Film preparing apparatus

Info

Publication number
JPS5743983A
JPS5743983A JP11995080A JP11995080A JPS5743983A JP S5743983 A JPS5743983 A JP S5743983A JP 11995080 A JP11995080 A JP 11995080A JP 11995080 A JP11995080 A JP 11995080A JP S5743983 A JPS5743983 A JP S5743983A
Authority
JP
Japan
Prior art keywords
sample
holder
sputtering
chain
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11995080A
Other languages
Japanese (ja)
Inventor
Eisuke Ueda
Takenobu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP11995080A priority Critical patent/JPS5743983A/en
Publication of JPS5743983A publication Critical patent/JPS5743983A/en
Pending legal-status Critical Current

Links

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  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To form a uniform film with a simple apparatus, by transferring and circulating a sample and simultaneously by rotating automatically it in a target part for sputtering when forming a film on the surface of the sample by sputtering in a vacuum container.
CONSTITUTION: In a cylindrical vacuum container 1, two sprockets 2, 2' are arranged and a chain 3 is circulated between them. A bearing 4 is fitted to the chain 3 to support the shaft 51 of a sample holder 5 and to transfer a sample 9 on the holder 5 as the chain 3 transfers and circulates. In the container 1, a target 10 for sputtering is installed and in that place a rack 8 is installed. A pinion 6 fixed under the sample holder 5 is geared with the rack 8 to rorate the holder 5. When the sample 9 on the holder 5 transfers under the target 10, it is automatically rotated so that a uniform film is easily formed on the sample.
COPYRIGHT: (C)1982,JPO&Japio
JP11995080A 1980-08-30 1980-08-30 Film preparing apparatus Pending JPS5743983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11995080A JPS5743983A (en) 1980-08-30 1980-08-30 Film preparing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11995080A JPS5743983A (en) 1980-08-30 1980-08-30 Film preparing apparatus

Publications (1)

Publication Number Publication Date
JPS5743983A true JPS5743983A (en) 1982-03-12

Family

ID=14774193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11995080A Pending JPS5743983A (en) 1980-08-30 1980-08-30 Film preparing apparatus

Country Status (1)

Country Link
JP (1) JPS5743983A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033350A (en) * 1983-08-03 1985-02-20 Citizen Watch Co Ltd Vacuum film forming apparatus
JPS60204882A (en) * 1984-03-28 1985-10-16 Anelva Corp Treating device by electric discharge reaction
JPH01139759A (en) * 1987-11-27 1989-06-01 Ulvac Corp Jig truck for insulating treated material in ion plating apparatus
JPH02258975A (en) * 1988-12-22 1990-10-19 Fuji Photo Film Co Ltd Device and method for sputtering
JPH04250089A (en) * 1990-12-27 1992-09-04 Morikoo:Kk Automatic letter stamping machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033350A (en) * 1983-08-03 1985-02-20 Citizen Watch Co Ltd Vacuum film forming apparatus
JPS60204882A (en) * 1984-03-28 1985-10-16 Anelva Corp Treating device by electric discharge reaction
JPH01139759A (en) * 1987-11-27 1989-06-01 Ulvac Corp Jig truck for insulating treated material in ion plating apparatus
JPH02258975A (en) * 1988-12-22 1990-10-19 Fuji Photo Film Co Ltd Device and method for sputtering
JPH04250089A (en) * 1990-12-27 1992-09-04 Morikoo:Kk Automatic letter stamping machine

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