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JPS5729860B2 - - Google Patents

Info

Publication number
JPS5729860B2
JPS5729860B2 JP9263478A JP9263478A JPS5729860B2 JP S5729860 B2 JPS5729860 B2 JP S5729860B2 JP 9263478 A JP9263478 A JP 9263478A JP 9263478 A JP9263478 A JP 9263478A JP S5729860 B2 JPS5729860 B2 JP S5729860B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9263478A
Other versions
JPS5519851A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9263478A priority Critical patent/JPS5519851A/ja
Priority to US06/058,501 priority patent/US4295265A/en
Priority to NL7905759A priority patent/NL7905759A/nl
Priority to DE2931031A priority patent/DE2931031C2/de
Publication of JPS5519851A publication Critical patent/JPS5519851A/ja
Publication of JPS5729860B2 publication Critical patent/JPS5729860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213Channel regions of field-effect devices
    • H10D62/221Channel regions of field-effect devices of FETs
    • H10D62/235Channel regions of field-effect devices of FETs of IGFETs
    • H10D62/299Channel regions of field-effect devices of FETs of IGFETs having lateral doping variations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • H10D30/681Floating-gate IGFETs having only two programming levels
    • H10D30/683Floating-gate IGFETs having only two programming levels programmed by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
JP9263478A 1978-07-31 1978-07-31 Manufacture of non-volatile memories Granted JPS5519851A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP9263478A JPS5519851A (en) 1978-07-31 1978-07-31 Manufacture of non-volatile memories
US06/058,501 US4295265A (en) 1978-07-31 1979-07-18 Method for producing a nonvolatile semiconductor memory
NL7905759A NL7905759A (nl) 1978-07-31 1979-07-25 Werkwijze voor het vervaardigen van een niet-vluchtig halfgeleidergeheugen.
DE2931031A DE2931031C2 (de) 1978-07-31 1979-07-31 Nicht-flüchtige Halbleiterspeicherzelle und Verfahren zu ihrer Herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9263478A JPS5519851A (en) 1978-07-31 1978-07-31 Manufacture of non-volatile memories

Publications (2)

Publication Number Publication Date
JPS5519851A JPS5519851A (en) 1980-02-12
JPS5729860B2 true JPS5729860B2 (ja) 1982-06-25

Family

ID=14059866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9263478A Granted JPS5519851A (en) 1978-07-31 1978-07-31 Manufacture of non-volatile memories

Country Status (4)

Country Link
US (1) US4295265A (ja)
JP (1) JPS5519851A (ja)
DE (1) DE2931031C2 (ja)
NL (1) NL7905759A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187268A (ja) * 1983-04-07 1984-10-24 Hanshin Electric Co Ltd 車両用表示情報計測装置

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4332077A (en) * 1979-08-10 1982-06-01 Rca Corporation Method of making electrically programmable control gate injected floating gate solid state memory transistor
IT1209227B (it) * 1980-06-04 1989-07-16 Sgs Microelettronica Spa Cella di memoria non volatile a 'gate' flottante elettricamente alterabile.
DE3141390A1 (de) * 1981-10-19 1983-04-28 Deutsche Itt Industries Gmbh, 7800 Freiburg Floating-gate-speicherzelle, bei der das schreiben und loeschen durch injektion heisser ladungstraeger erfolgt
JPS58119672A (ja) * 1982-01-09 1983-07-16 Mitsubishi Electric Corp 半導体不揮発性メモリ装置
JPS58190069A (ja) * 1982-04-29 1983-11-05 Mitsubishi Electric Corp 半導体不揮発性メモリ装置
JPS5963765A (ja) * 1982-10-04 1984-04-11 Mitsubishi Electric Corp 浮遊ゲ−ト型不揮発性メモリ−装置
DE3576245D1 (de) * 1984-05-17 1990-04-05 Toshiba Kawasaki Kk Verfahren zur herstellung eines nichtfluechtigen halbleiter-eeprom-elementes.
US4997781A (en) * 1987-11-24 1991-03-05 Texas Instruments Incorporated Method of making planarized EPROM array
IT1227989B (it) * 1988-12-05 1991-05-20 Sgs Thomson Microelectronics Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione
US5296396A (en) * 1988-12-05 1994-03-22 Sgs-Thomson Microelectronics S.R.L. Matrix of EPROM memory cells with a tablecloth structure having an improved capacitative ratio and a process for its manufacture
US5070843A (en) * 1989-05-15 1991-12-10 Mitsubishi Denki Kabushiki Kaisha Ignition timing control apparatus of internal-combustion engine
JP2509717B2 (ja) * 1989-12-06 1996-06-26 株式会社東芝 半導体装置の製造方法
WO1991011026A1 (en) * 1990-01-22 1991-07-25 Silicon Storage Technology, Inc. Single transistor non-volatile electrically alterable semiconductor memory device with a re-crystallized floating gate
US5045488A (en) * 1990-01-22 1991-09-03 Silicon Storage Technology, Inc. Method of manufacturing a single transistor non-volatile, electrically alterable semiconductor memory device
IT1252214B (it) * 1991-12-13 1995-06-05 Sgs Thomson Microelectronics Procedimento per la definizione di porzioni di ossido sottile particolarmente per celle di memoria a sola lettura programmabili e cancellabile elettricamente.
BE1007475A3 (nl) * 1993-09-06 1995-07-11 Philips Electronics Nv Halfgeleiderinrichting met een niet-vluchtig geheugen en werkwijze ter vervaardiging van een dergelijke halfgeleiderinrichting.
US5640031A (en) * 1993-09-30 1997-06-17 Keshtbod; Parviz Spacer flash cell process
US5479368A (en) * 1993-09-30 1995-12-26 Cirrus Logic, Inc. Spacer flash cell device with vertically oriented floating gate
US5620913A (en) * 1996-05-28 1997-04-15 Chartered Semiconductor Manufacturing Pte Ltd. Method of making a flash memory cell
JP2000183346A (ja) * 1998-12-15 2000-06-30 Toshiba Corp 半導体装置及びその製造方法
US6090668A (en) * 1999-02-11 2000-07-18 Taiwan Semiconductor Manufacturing Company Method to fabricate sharp tip of poly in split gate flash
US6765258B1 (en) * 2002-07-31 2004-07-20 Intelligent Sources Development Corp. Stack-gate flash memory cell structure and its contactless flash memory arrays
US9978848B2 (en) * 2015-07-17 2018-05-22 Avago Technologies General Ip (Singapore) Pte. Ltd. UTBB FDSOI split gate devices

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3789504A (en) * 1971-10-12 1974-02-05 Gte Laboratories Inc Method of manufacturing an n-channel mos field-effect transistor
US4096522A (en) * 1974-09-26 1978-06-20 Tokyo Shibaura Electric Co., Ltd. Monolithic semiconductor mask programmable ROM and a method for manufacturing the same
JPS5851427B2 (ja) * 1975-09-04 1983-11-16 株式会社日立製作所 絶縁ゲ−ト型リ−ド・オンリ−・メモリの製造方法
US4114255A (en) * 1976-08-16 1978-09-19 Intel Corporation Floating gate storage device and method of fabrication
US4090289A (en) * 1976-08-18 1978-05-23 International Business Machines Corporation Method of fabrication for field effect transistors (FETs) having a common channel stopper and FET channel doping with the channel stopper doping self-aligned to the dielectric isolation between FETS
JPS54107269A (en) * 1978-02-10 1979-08-22 Nec Corp Non-volatile semiconductor memory and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187268A (ja) * 1983-04-07 1984-10-24 Hanshin Electric Co Ltd 車両用表示情報計測装置

Also Published As

Publication number Publication date
NL7905759A (nl) 1980-02-04
DE2931031C2 (de) 1985-05-09
DE2931031A1 (de) 1980-02-14
US4295265A (en) 1981-10-20
JPS5519851A (en) 1980-02-12

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