JPS5729860B2 - - Google Patents
Info
- Publication number
- JPS5729860B2 JPS5729860B2 JP9263478A JP9263478A JPS5729860B2 JP S5729860 B2 JPS5729860 B2 JP S5729860B2 JP 9263478 A JP9263478 A JP 9263478A JP 9263478 A JP9263478 A JP 9263478A JP S5729860 B2 JPS5729860 B2 JP S5729860B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/213—Channel regions of field-effect devices
- H10D62/221—Channel regions of field-effect devices of FETs
- H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
- H10D62/299—Channel regions of field-effect devices of FETs of IGFETs having lateral doping variations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/68—Floating-gate IGFETs
- H10D30/681—Floating-gate IGFETs having only two programming levels
- H10D30/683—Floating-gate IGFETs having only two programming levels programmed by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Toxicology (AREA)
- High Energy & Nuclear Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9263478A JPS5519851A (en) | 1978-07-31 | 1978-07-31 | Manufacture of non-volatile memories |
US06/058,501 US4295265A (en) | 1978-07-31 | 1979-07-18 | Method for producing a nonvolatile semiconductor memory |
NL7905759A NL7905759A (nl) | 1978-07-31 | 1979-07-25 | Werkwijze voor het vervaardigen van een niet-vluchtig halfgeleidergeheugen. |
DE2931031A DE2931031C2 (de) | 1978-07-31 | 1979-07-31 | Nicht-flüchtige Halbleiterspeicherzelle und Verfahren zu ihrer Herstellung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9263478A JPS5519851A (en) | 1978-07-31 | 1978-07-31 | Manufacture of non-volatile memories |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5519851A JPS5519851A (en) | 1980-02-12 |
JPS5729860B2 true JPS5729860B2 (ja) | 1982-06-25 |
Family
ID=14059866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9263478A Granted JPS5519851A (en) | 1978-07-31 | 1978-07-31 | Manufacture of non-volatile memories |
Country Status (4)
Country | Link |
---|---|
US (1) | US4295265A (ja) |
JP (1) | JPS5519851A (ja) |
DE (1) | DE2931031C2 (ja) |
NL (1) | NL7905759A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59187268A (ja) * | 1983-04-07 | 1984-10-24 | Hanshin Electric Co Ltd | 車両用表示情報計測装置 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4332077A (en) * | 1979-08-10 | 1982-06-01 | Rca Corporation | Method of making electrically programmable control gate injected floating gate solid state memory transistor |
IT1209227B (it) * | 1980-06-04 | 1989-07-16 | Sgs Microelettronica Spa | Cella di memoria non volatile a 'gate' flottante elettricamente alterabile. |
DE3141390A1 (de) * | 1981-10-19 | 1983-04-28 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Floating-gate-speicherzelle, bei der das schreiben und loeschen durch injektion heisser ladungstraeger erfolgt |
JPS58119672A (ja) * | 1982-01-09 | 1983-07-16 | Mitsubishi Electric Corp | 半導体不揮発性メモリ装置 |
JPS58190069A (ja) * | 1982-04-29 | 1983-11-05 | Mitsubishi Electric Corp | 半導体不揮発性メモリ装置 |
JPS5963765A (ja) * | 1982-10-04 | 1984-04-11 | Mitsubishi Electric Corp | 浮遊ゲ−ト型不揮発性メモリ−装置 |
DE3576245D1 (de) * | 1984-05-17 | 1990-04-05 | Toshiba Kawasaki Kk | Verfahren zur herstellung eines nichtfluechtigen halbleiter-eeprom-elementes. |
US4997781A (en) * | 1987-11-24 | 1991-03-05 | Texas Instruments Incorporated | Method of making planarized EPROM array |
IT1227989B (it) * | 1988-12-05 | 1991-05-20 | Sgs Thomson Microelectronics | Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione |
US5296396A (en) * | 1988-12-05 | 1994-03-22 | Sgs-Thomson Microelectronics S.R.L. | Matrix of EPROM memory cells with a tablecloth structure having an improved capacitative ratio and a process for its manufacture |
US5070843A (en) * | 1989-05-15 | 1991-12-10 | Mitsubishi Denki Kabushiki Kaisha | Ignition timing control apparatus of internal-combustion engine |
JP2509717B2 (ja) * | 1989-12-06 | 1996-06-26 | 株式会社東芝 | 半導体装置の製造方法 |
WO1991011026A1 (en) * | 1990-01-22 | 1991-07-25 | Silicon Storage Technology, Inc. | Single transistor non-volatile electrically alterable semiconductor memory device with a re-crystallized floating gate |
US5045488A (en) * | 1990-01-22 | 1991-09-03 | Silicon Storage Technology, Inc. | Method of manufacturing a single transistor non-volatile, electrically alterable semiconductor memory device |
IT1252214B (it) * | 1991-12-13 | 1995-06-05 | Sgs Thomson Microelectronics | Procedimento per la definizione di porzioni di ossido sottile particolarmente per celle di memoria a sola lettura programmabili e cancellabile elettricamente. |
BE1007475A3 (nl) * | 1993-09-06 | 1995-07-11 | Philips Electronics Nv | Halfgeleiderinrichting met een niet-vluchtig geheugen en werkwijze ter vervaardiging van een dergelijke halfgeleiderinrichting. |
US5640031A (en) * | 1993-09-30 | 1997-06-17 | Keshtbod; Parviz | Spacer flash cell process |
US5479368A (en) * | 1993-09-30 | 1995-12-26 | Cirrus Logic, Inc. | Spacer flash cell device with vertically oriented floating gate |
US5620913A (en) * | 1996-05-28 | 1997-04-15 | Chartered Semiconductor Manufacturing Pte Ltd. | Method of making a flash memory cell |
JP2000183346A (ja) * | 1998-12-15 | 2000-06-30 | Toshiba Corp | 半導体装置及びその製造方法 |
US6090668A (en) * | 1999-02-11 | 2000-07-18 | Taiwan Semiconductor Manufacturing Company | Method to fabricate sharp tip of poly in split gate flash |
US6765258B1 (en) * | 2002-07-31 | 2004-07-20 | Intelligent Sources Development Corp. | Stack-gate flash memory cell structure and its contactless flash memory arrays |
US9978848B2 (en) * | 2015-07-17 | 2018-05-22 | Avago Technologies General Ip (Singapore) Pte. Ltd. | UTBB FDSOI split gate devices |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3789504A (en) * | 1971-10-12 | 1974-02-05 | Gte Laboratories Inc | Method of manufacturing an n-channel mos field-effect transistor |
US4096522A (en) * | 1974-09-26 | 1978-06-20 | Tokyo Shibaura Electric Co., Ltd. | Monolithic semiconductor mask programmable ROM and a method for manufacturing the same |
JPS5851427B2 (ja) * | 1975-09-04 | 1983-11-16 | 株式会社日立製作所 | 絶縁ゲ−ト型リ−ド・オンリ−・メモリの製造方法 |
US4114255A (en) * | 1976-08-16 | 1978-09-19 | Intel Corporation | Floating gate storage device and method of fabrication |
US4090289A (en) * | 1976-08-18 | 1978-05-23 | International Business Machines Corporation | Method of fabrication for field effect transistors (FETs) having a common channel stopper and FET channel doping with the channel stopper doping self-aligned to the dielectric isolation between FETS |
JPS54107269A (en) * | 1978-02-10 | 1979-08-22 | Nec Corp | Non-volatile semiconductor memory and its production |
-
1978
- 1978-07-31 JP JP9263478A patent/JPS5519851A/ja active Granted
-
1979
- 1979-07-18 US US06/058,501 patent/US4295265A/en not_active Expired - Lifetime
- 1979-07-25 NL NL7905759A patent/NL7905759A/nl not_active Application Discontinuation
- 1979-07-31 DE DE2931031A patent/DE2931031C2/de not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59187268A (ja) * | 1983-04-07 | 1984-10-24 | Hanshin Electric Co Ltd | 車両用表示情報計測装置 |
Also Published As
Publication number | Publication date |
---|---|
NL7905759A (nl) | 1980-02-04 |
DE2931031C2 (de) | 1985-05-09 |
DE2931031A1 (de) | 1980-02-14 |
US4295265A (en) | 1981-10-20 |
JPS5519851A (en) | 1980-02-12 |