JPS57209851A - Composition for forming metal oxide film, and method for forming metal oxide film - Google Patents
Composition for forming metal oxide film, and method for forming metal oxide filmInfo
- Publication number
- JPS57209851A JPS57209851A JP9233281A JP9233281A JPS57209851A JP S57209851 A JPS57209851 A JP S57209851A JP 9233281 A JP9233281 A JP 9233281A JP 9233281 A JP9233281 A JP 9233281A JP S57209851 A JPS57209851 A JP S57209851A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- metal oxide
- forming metal
- polymer
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Liquid Crystal (AREA)
- Surface Treatment Of Glass (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
PURPOSE: To form a metal oxide film having a fine pattern, without using etching process, by coating a substrate with a composition composed of a metal- coordinating polymer, a photo-sensitive additive, a metal salt and a solvent, patterning the coating film directly, and baking the film.
CONSTITUTION: A substrate is coated with a composition composed of (A) a polymer containing coordination groups such as COOR1 (R1 is H or ≤5C alkyl), SO3H, etc., e.g. maleic anhydride polymer, (B) a photo-sensitive additive having an amino group and an aromatic azide group or an amino group and an aromatic sulfonyl azide group in the molecule, e.g. 2-(N,N-dimethylamino)ethyl p- azidobenzoate, (C) a metal salt which can be coordinated to the coordination group of the polymer, e.g. indium nitrate, and (D) a solvent such as ethyl cellosolve. The coating film is patterned by autolithography, and baked at ≥400°C to form the pattern of the metal oxide film.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9233281A JPS57209851A (en) | 1981-06-17 | 1981-06-17 | Composition for forming metal oxide film, and method for forming metal oxide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9233281A JPS57209851A (en) | 1981-06-17 | 1981-06-17 | Composition for forming metal oxide film, and method for forming metal oxide film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57209851A true JPS57209851A (en) | 1982-12-23 |
Family
ID=14051430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9233281A Pending JPS57209851A (en) | 1981-06-17 | 1981-06-17 | Composition for forming metal oxide film, and method for forming metal oxide film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57209851A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8197786B2 (en) | 2006-09-07 | 2012-06-12 | Samsung Sdi Co., Ltd. | Porous carbon material and method of manufacturing the same |
| US8617510B2 (en) * | 2006-03-29 | 2013-12-31 | Samsung Sdi Co., Ltd. | Porous metal oxide and method of preparing the same |
-
1981
- 1981-06-17 JP JP9233281A patent/JPS57209851A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8617510B2 (en) * | 2006-03-29 | 2013-12-31 | Samsung Sdi Co., Ltd. | Porous metal oxide and method of preparing the same |
| US8197786B2 (en) | 2006-09-07 | 2012-06-12 | Samsung Sdi Co., Ltd. | Porous carbon material and method of manufacturing the same |
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