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JPS57198260A - Method and device for metallic vapor deposition on inside surface of vacuum vessel - Google Patents

Method and device for metallic vapor deposition on inside surface of vacuum vessel

Info

Publication number
JPS57198260A
JPS57198260A JP8096781A JP8096781A JPS57198260A JP S57198260 A JPS57198260 A JP S57198260A JP 8096781 A JP8096781 A JP 8096781A JP 8096781 A JP8096781 A JP 8096781A JP S57198260 A JPS57198260 A JP S57198260A
Authority
JP
Japan
Prior art keywords
vessel
inside surface
vapor
metals
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8096781A
Other languages
Japanese (ja)
Inventor
Michio Otsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8096781A priority Critical patent/JPS57198260A/en
Publication of JPS57198260A publication Critical patent/JPS57198260A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To vapor deposit different metals approximately uniformly on the inside surface of an evacuated vessel with simple construction in heating the metallic vapor depositing source in said vessel and vapor depositing the metals on the inside surface of the vessel by using irradiation of laser in this heating. CONSTITUTION:In the stage of vapor depositing Ti, Mo, etc. on the inside surface of a vacuum vessel, particularly a vacuum vessel 1 for nuclear fusion devices, a metallic body 11 of any of these metals is secured and disposed in the vessel 1. An observation port 2 is sealed with a glass window 10, and the laser 15 of large output from a laser generator 13 is irradiated onto the body 11 via a lens 12. Then, only the part cast by the light 15 of the body 11 is heated and the metal melts, evaporates and can be vapor-deposited on the inside surface of the vessel 1. It is possible to vapor deposit dissimilar metals easily by using plural dissimilar metallic bodies 11, disposing these in suitable positions and casting the light 15 to these through optical paths.
JP8096781A 1981-05-29 1981-05-29 Method and device for metallic vapor deposition on inside surface of vacuum vessel Pending JPS57198260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8096781A JPS57198260A (en) 1981-05-29 1981-05-29 Method and device for metallic vapor deposition on inside surface of vacuum vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8096781A JPS57198260A (en) 1981-05-29 1981-05-29 Method and device for metallic vapor deposition on inside surface of vacuum vessel

Publications (1)

Publication Number Publication Date
JPS57198260A true JPS57198260A (en) 1982-12-04

Family

ID=13733277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8096781A Pending JPS57198260A (en) 1981-05-29 1981-05-29 Method and device for metallic vapor deposition on inside surface of vacuum vessel

Country Status (1)

Country Link
JP (1) JPS57198260A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2607830A1 (en) * 1986-12-08 1988-06-10 Univ Limoges Process and device for deposition using vaporisation inside a tube

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116756A (en) * 1976-03-18 1977-09-30 Sundstrand Corp Brazing clip
JPS5594474A (en) * 1979-01-12 1980-07-17 Ishikawajima Harima Heavy Ind Co Ltd Ion plating apparatus for tube inside using laser beam
JPS5642090A (en) * 1979-09-12 1981-04-20 Nissan Motor Co Ltd Heat exchanger

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116756A (en) * 1976-03-18 1977-09-30 Sundstrand Corp Brazing clip
JPS5594474A (en) * 1979-01-12 1980-07-17 Ishikawajima Harima Heavy Ind Co Ltd Ion plating apparatus for tube inside using laser beam
JPS5642090A (en) * 1979-09-12 1981-04-20 Nissan Motor Co Ltd Heat exchanger

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2607830A1 (en) * 1986-12-08 1988-06-10 Univ Limoges Process and device for deposition using vaporisation inside a tube

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