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JPS57184957A - Defect inspecting device - Google Patents

Defect inspecting device

Info

Publication number
JPS57184957A
JPS57184957A JP7034581A JP7034581A JPS57184957A JP S57184957 A JPS57184957 A JP S57184957A JP 7034581 A JP7034581 A JP 7034581A JP 7034581 A JP7034581 A JP 7034581A JP S57184957 A JPS57184957 A JP S57184957A
Authority
JP
Japan
Prior art keywords
diffracted light
inspected
light
pattern
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7034581A
Other languages
Japanese (ja)
Other versions
JPS6322255B2 (en
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7034581A priority Critical patent/JPS57184957A/en
Publication of JPS57184957A publication Critical patent/JPS57184957A/en
Publication of JPS6322255B2 publication Critical patent/JPS6322255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To facilitate focusing, by irradiating approximately coherent light on a body to be inspected on which a basic pattern is regularly arranged and detecting the diffracted light from the defective part. CONSTITUTION:The body to be inspected 1 on which the basic pattern such as a video disk is regularly arranged is rotated by a rotary driving device 2, and laser light R from a laser light source 3, which is approximately coherent light, is irradiated on the regular pattern on the body to be inspected 1. An objective lens 7 is provided between the diffracted light 5a and (n+1)th diffracted light 5b in the obtained diffraction pattern. The diffracted light 6, which is generated by the defective part, is received by the objective lens 7, and its image is formed in a photoelectric transducer 9 again through a pin hole 8. Then the signal is sent to a signal processing computer 11 from an A/D converter 10. The signal exceeding a specified value is displayed on a display 12 as a defect. Therefore the focal depth is made deep, a small diameter lens can be used, and the price can be reduced.
JP7034581A 1981-05-09 1981-05-09 Defect inspecting device Granted JPS57184957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7034581A JPS57184957A (en) 1981-05-09 1981-05-09 Defect inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7034581A JPS57184957A (en) 1981-05-09 1981-05-09 Defect inspecting device

Publications (2)

Publication Number Publication Date
JPS57184957A true JPS57184957A (en) 1982-11-13
JPS6322255B2 JPS6322255B2 (en) 1988-05-11

Family

ID=13428733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7034581A Granted JPS57184957A (en) 1981-05-09 1981-05-09 Defect inspecting device

Country Status (1)

Country Link
JP (1) JPS57184957A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005114630A (en) * 2003-10-09 2005-04-28 Sony Corp Irregular pattern inspecting apparatus and irregular pattern inspection method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147747U (en) * 1988-03-28 1989-10-12

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146601A (en) * 1976-05-28 1977-12-06 Rca Corp Method of detecting defect of vortex groove formed on disk surface and device therefor
JPS5414790A (en) * 1977-07-05 1979-02-03 Mitsubishi Electric Corp Surface inspecting apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146601A (en) * 1976-05-28 1977-12-06 Rca Corp Method of detecting defect of vortex groove formed on disk surface and device therefor
JPS5414790A (en) * 1977-07-05 1979-02-03 Mitsubishi Electric Corp Surface inspecting apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005114630A (en) * 2003-10-09 2005-04-28 Sony Corp Irregular pattern inspecting apparatus and irregular pattern inspection method
JP4581370B2 (en) * 2003-10-09 2010-11-17 ソニー株式会社 Irregular pattern inspection apparatus and irregular pattern inspection method

Also Published As

Publication number Publication date
JPS6322255B2 (en) 1988-05-11

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