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JPS57178134A - Specular surface defect observing device - Google Patents

Specular surface defect observing device

Info

Publication number
JPS57178134A
JPS57178134A JP6383381A JP6383381A JPS57178134A JP S57178134 A JPS57178134 A JP S57178134A JP 6383381 A JP6383381 A JP 6383381A JP 6383381 A JP6383381 A JP 6383381A JP S57178134 A JPS57178134 A JP S57178134A
Authority
JP
Japan
Prior art keywords
specular surface
directions
inspected
observed
microscopic defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6383381A
Other languages
Japanese (ja)
Inventor
Shinichiro Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6383381A priority Critical patent/JPS57178134A/en
Publication of JPS57178134A publication Critical patent/JPS57178134A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To observe a microscopic defect on a specular surface to be inspected, easily and with high sensitivity, by irradiating a parallel luminous flux to the specular surface to be inspected, at a low incident angle from plural directions of its circumference. CONSTITUTION:A light from a light source 13 provided in a lower casing 11 like a case is converted to a parallel luminous flux through a Fresnel lens, is made incident to a plane mirror 18 placed so as to surround a sample base 14 from 4 directions, and illuminates a specular surface body 15 to be inspected, from 4 directions so as to satisfy the dark field condition. When the reflected rays are observed through a perspective window 16, a microscopic defect is observed through an incident light beam of a low incident angle from 4 directions in the dark field, therefore, the microscopic defect is observed easily and with high sensitivity.
JP6383381A 1981-04-27 1981-04-27 Specular surface defect observing device Pending JPS57178134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6383381A JPS57178134A (en) 1981-04-27 1981-04-27 Specular surface defect observing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6383381A JPS57178134A (en) 1981-04-27 1981-04-27 Specular surface defect observing device

Publications (1)

Publication Number Publication Date
JPS57178134A true JPS57178134A (en) 1982-11-02

Family

ID=13240742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6383381A Pending JPS57178134A (en) 1981-04-27 1981-04-27 Specular surface defect observing device

Country Status (1)

Country Link
JP (1) JPS57178134A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185653U (en) * 1983-05-30 1984-12-10 富士電機株式会社 Strobe lighting device for visual inspection
KR20040017912A (en) * 2002-08-22 2004-03-02 주식회사 두산 The Light apparatus for detecting defects on bottle
JP2009063560A (en) * 2007-08-10 2009-03-26 Steinbichler Optotechnik Gmbh Method and system for detecting surface defect of component part

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185653U (en) * 1983-05-30 1984-12-10 富士電機株式会社 Strobe lighting device for visual inspection
KR20040017912A (en) * 2002-08-22 2004-03-02 주식회사 두산 The Light apparatus for detecting defects on bottle
JP2009063560A (en) * 2007-08-10 2009-03-26 Steinbichler Optotechnik Gmbh Method and system for detecting surface defect of component part
US9194810B2 (en) 2007-08-10 2015-11-24 Steinbichler Optotechnik Gmbh Method and device for the detection of surface defects of a component

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