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JPS57178201A - Coating method for optical instrument for high-output laser - Google Patents

Coating method for optical instrument for high-output laser

Info

Publication number
JPS57178201A
JPS57178201A JP56063244A JP6324481A JPS57178201A JP S57178201 A JPS57178201 A JP S57178201A JP 56063244 A JP56063244 A JP 56063244A JP 6324481 A JP6324481 A JP 6324481A JP S57178201 A JPS57178201 A JP S57178201A
Authority
JP
Japan
Prior art keywords
optical instrument
output laser
coating
vapor
tio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56063244A
Other languages
Japanese (ja)
Inventor
Yoichi Murayama
Toshiyuki Hirose
Takao Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIYOUWA KOUKI SEIZOU KK
SHOWA KOKI SEIZO KK
SHOWA KOUKI SEIZOU KK
Original Assignee
SHIYOUWA KOUKI SEIZOU KK
SHOWA KOKI SEIZO KK
SHOWA KOUKI SEIZOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIYOUWA KOUKI SEIZOU KK, SHOWA KOKI SEIZO KK, SHOWA KOUKI SEIZOU KK filed Critical SHIYOUWA KOUKI SEIZOU KK
Priority to JP56063244A priority Critical patent/JPS57178201A/en
Publication of JPS57178201A publication Critical patent/JPS57178201A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE:To form a coating free from specks (fine spots formed by uneven vapor deposition) with high work efficiency by coating an optical instrument for a high-output laser with titanium monoxide as a vapor depositing source material by high frequency ion plating. CONSTITUTION:By a high frequency ion plating method using titanium monoxide (TiO) as a vapor depositing source material, a vapor deposited film[formed as a titanium dioxide (TiO)2 film by oxidation]is formed on an optical instrument for a high-output laser to form a coating oxidized sufficiently even under a low partial pressure of oxygen, contg. no lower oxide, and having superior laser resistance and physical strength.
JP56063244A 1981-04-28 1981-04-28 Coating method for optical instrument for high-output laser Pending JPS57178201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56063244A JPS57178201A (en) 1981-04-28 1981-04-28 Coating method for optical instrument for high-output laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56063244A JPS57178201A (en) 1981-04-28 1981-04-28 Coating method for optical instrument for high-output laser

Publications (1)

Publication Number Publication Date
JPS57178201A true JPS57178201A (en) 1982-11-02

Family

ID=13223617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56063244A Pending JPS57178201A (en) 1981-04-28 1981-04-28 Coating method for optical instrument for high-output laser

Country Status (1)

Country Link
JP (1) JPS57178201A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129601A (en) * 1984-09-24 1986-06-17 スペクトラ−フイジツクス・インコ−ポレイテツド Laser optical member
US8482926B2 (en) 2008-09-26 2013-07-09 Sharp Kabushiki Kaisha Optical element wafer module, optical element module, method for manufacturing optical element module, electronic element wafer module, method for manufacturing electronic element module, electronic element module and electronic information device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129601A (en) * 1984-09-24 1986-06-17 スペクトラ−フイジツクス・インコ−ポレイテツド Laser optical member
US8482926B2 (en) 2008-09-26 2013-07-09 Sharp Kabushiki Kaisha Optical element wafer module, optical element module, method for manufacturing optical element module, electronic element wafer module, method for manufacturing electronic element module, electronic element module and electronic information device

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