JPS57163809A - Measuring method for fine displacement of body surface - Google Patents
Measuring method for fine displacement of body surfaceInfo
- Publication number
- JPS57163809A JPS57163809A JP4887081A JP4887081A JPS57163809A JP S57163809 A JPS57163809 A JP S57163809A JP 4887081 A JP4887081 A JP 4887081A JP 4887081 A JP4887081 A JP 4887081A JP S57163809 A JPS57163809 A JP S57163809A
- Authority
- JP
- Japan
- Prior art keywords
- light
- photodetection
- photodetected
- measured
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
- 239000012530 fluid Substances 0.000 abstract 4
- 238000005259 measurement Methods 0.000 abstract 3
- 239000000835 fiber Substances 0.000 abstract 2
- 239000013307 optical fiber Substances 0.000 abstract 2
- 230000003746 surface roughness Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
PURPOSE:To measure the fine displacement of a body surface by utilizing optical fibers while removing a grinding fluid and a chip by filling a space between the light-emitting and photodetecting terminals of the optical fibers and a body to be measured with a flowing light-transmissive fluid. CONSTITUTION:In the know measurement of the fine displacement of a body surface, measurement light from a fiber A for light emission is emitted spreading at some spreading angle, and its reflected light is photodetected by a fiber C for photodetection. Since an irradiation and a photodetection surface overlap to each other (slanting-line part), the distance from the surface of the body to be measured is proportional to the quantity of photodetected light when the distance is >=Xmax, and this distance is held constant to detect surface roughness, etc., from the quantity of photodetected light. Then, a space between a projection end surface B and a photodetection end surface D, and the body E to be measured is filled with a flowing light-transmissive fluid F to achieve the measurement rapidly and accurately while removing a grinding fluid, a chip, etc., on the surface of the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4887081A JPS57163809A (en) | 1981-04-01 | 1981-04-01 | Measuring method for fine displacement of body surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4887081A JPS57163809A (en) | 1981-04-01 | 1981-04-01 | Measuring method for fine displacement of body surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57163809A true JPS57163809A (en) | 1982-10-08 |
| JPS6246806B2 JPS6246806B2 (en) | 1987-10-05 |
Family
ID=12815315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4887081A Granted JPS57163809A (en) | 1981-04-01 | 1981-04-01 | Measuring method for fine displacement of body surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57163809A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515049A (en) * | 1974-06-29 | 1976-01-16 | Kawasaki Steel Co | Atsuenchuno zairyonoitaatsuosokuteisuruhoho narabini sochi |
| JPS5198051A (en) * | 1975-02-25 | 1976-08-28 | ||
| JPS5648871A (en) * | 1979-09-27 | 1981-05-02 | Yakult Honsha Co Ltd | Chlorella-containing food |
-
1981
- 1981-04-01 JP JP4887081A patent/JPS57163809A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515049A (en) * | 1974-06-29 | 1976-01-16 | Kawasaki Steel Co | Atsuenchuno zairyonoitaatsuosokuteisuruhoho narabini sochi |
| JPS5198051A (en) * | 1975-02-25 | 1976-08-28 | ||
| JPS5648871A (en) * | 1979-09-27 | 1981-05-02 | Yakult Honsha Co Ltd | Chlorella-containing food |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6246806B2 (en) | 1987-10-05 |
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