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JPS57154041A - Gas detecting element - Google Patents

Gas detecting element

Info

Publication number
JPS57154041A
JPS57154041A JP3876281A JP3876281A JPS57154041A JP S57154041 A JPS57154041 A JP S57154041A JP 3876281 A JP3876281 A JP 3876281A JP 3876281 A JP3876281 A JP 3876281A JP S57154041 A JPS57154041 A JP S57154041A
Authority
JP
Japan
Prior art keywords
gas
detecting element
al2o3
sio2
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3876281A
Other languages
Japanese (ja)
Other versions
JPS6363064B2 (en
Inventor
Masayuki Shiratori
Masaki Katsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3876281A priority Critical patent/JPS57154041A/en
Publication of JPS57154041A publication Critical patent/JPS57154041A/en
Publication of JPS6363064B2 publication Critical patent/JPS6363064B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To obtain the gas detecting element suitable for detecting low concentration gas such as Freon gas, by forming a catalyst layer, wherein a noble metal having a specified composition is supported on a support comprising Al2O3, SiO2 and the like, on the surface of a sensitive body formed by a metal oxide semiconductor. CONSTITUTION:The sensitive body is formed by providing the metal oxide semiconductor layer 3 on the surface of a tubular insulating substrate 1, on which a pair of electrodes 2 are preliminarily provided. The catalyst layer, wherein V and at least one kind of noble metal selected among Rh, Pd, Pt, and Au are supported by a support comprising Al2O3, SiO2, or SiO2-Al2O3, is provided on the surface of the layer 3. The ratio of the supporting amount of V to the support is specified in the range of 0.1-50wt%, preferably 0.5-15wt%, and the g atomic ratio of the supporting amount of the noble metal to V is specified in the range of 0.005-0.5, preferably 0.1-0.4. In this way, the detecting element, which has excellent sensitivity to Freon gas and the like suitable for the low concentration gas can be obtained.
JP3876281A 1981-03-19 1981-03-19 Gas detecting element Granted JPS57154041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3876281A JPS57154041A (en) 1981-03-19 1981-03-19 Gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3876281A JPS57154041A (en) 1981-03-19 1981-03-19 Gas detecting element

Publications (2)

Publication Number Publication Date
JPS57154041A true JPS57154041A (en) 1982-09-22
JPS6363064B2 JPS6363064B2 (en) 1988-12-06

Family

ID=12534288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3876281A Granted JPS57154041A (en) 1981-03-19 1981-03-19 Gas detecting element

Country Status (1)

Country Link
JP (1) JPS57154041A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105553A (en) * 1982-12-09 1984-06-18 Fuigaro Giken Kk Gas detecting element
JPS59108947A (en) * 1982-12-13 1984-06-23 Fuigaro Giken Kk Co gas detecting element
JPS607351A (en) * 1983-06-27 1985-01-16 Toshiba Corp Manufacture of gas sensitive element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105553A (en) * 1982-12-09 1984-06-18 Fuigaro Giken Kk Gas detecting element
JPH0225456B2 (en) * 1982-12-09 1990-06-04 Figaro Eng
JPS59108947A (en) * 1982-12-13 1984-06-23 Fuigaro Giken Kk Co gas detecting element
JPH0225457B2 (en) * 1982-12-13 1990-06-04 Figaro Eng
JPS607351A (en) * 1983-06-27 1985-01-16 Toshiba Corp Manufacture of gas sensitive element
JPH051419B2 (en) * 1983-06-27 1993-01-08 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
JPS6363064B2 (en) 1988-12-06

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