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JPS57146961A - Vacuum valve device - Google Patents

Vacuum valve device

Info

Publication number
JPS57146961A
JPS57146961A JP3260681A JP3260681A JPS57146961A JP S57146961 A JPS57146961 A JP S57146961A JP 3260681 A JP3260681 A JP 3260681A JP 3260681 A JP3260681 A JP 3260681A JP S57146961 A JPS57146961 A JP S57146961A
Authority
JP
Japan
Prior art keywords
valve
vacuum
hole
pressing plate
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3260681A
Other languages
Japanese (ja)
Inventor
Yoshio Hokotani
Satoshi Ido
Fujio Komata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP3260681A priority Critical patent/JPS57146961A/en
Publication of JPS57146961A publication Critical patent/JPS57146961A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1223—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being acted upon by the circulating fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)

Abstract

PURPOSE:To improve life, reliability and quick-responsiveness of a valve by providing a valve for dividing a beam path of a vacuum charged particle beam apparatus, which comprises vacuum-tight bellows operated by fluid pressure. CONSTITUTION:A pressing plate 8 provided with a seal ring 10 is disposed on the end of a valve body 6, the lower surface of the pressing plate 8 having a vacuum tight bellows 9 extended between the plate and the valve body 6. Vacuum chambers A, B are respectively provided with a hole for a beam 5 at the central portion thereof. Therefore, when pressurized fluid is fed from a fluid leading hole 7, the pressing plate 8 rises againt the force of a spring 12 to shut the beam path hole. When the valve is not required, the valve body 6 is drawn to the right to open the beam path hole 7.
JP3260681A 1981-03-09 1981-03-09 Vacuum valve device Pending JPS57146961A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3260681A JPS57146961A (en) 1981-03-09 1981-03-09 Vacuum valve device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3260681A JPS57146961A (en) 1981-03-09 1981-03-09 Vacuum valve device

Publications (1)

Publication Number Publication Date
JPS57146961A true JPS57146961A (en) 1982-09-10

Family

ID=12363511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3260681A Pending JPS57146961A (en) 1981-03-09 1981-03-09 Vacuum valve device

Country Status (1)

Country Link
JP (1) JPS57146961A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112361U (en) * 1985-12-28 1987-07-17
WO1993023691A1 (en) * 1992-05-15 1993-11-25 Ebara Corporation Gate valve
KR20040008877A (en) * 2002-07-19 2004-01-31 박웅기 Vaccum Gate Valve
KR100489250B1 (en) * 2002-10-17 2005-05-17 박웅기 Vaccum Gate Valve
KR100489553B1 (en) * 2002-07-19 2005-05-23 박웅기 Vaccum Gate Valve
KR100808101B1 (en) * 2006-01-11 2008-02-29 박웅기 Vacuum gate valve

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55139562A (en) * 1979-04-14 1980-10-31 Hitachi Ltd Valve device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55139562A (en) * 1979-04-14 1980-10-31 Hitachi Ltd Valve device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112361U (en) * 1985-12-28 1987-07-17
WO1993023691A1 (en) * 1992-05-15 1993-11-25 Ebara Corporation Gate valve
KR20040008877A (en) * 2002-07-19 2004-01-31 박웅기 Vaccum Gate Valve
KR100489553B1 (en) * 2002-07-19 2005-05-23 박웅기 Vaccum Gate Valve
KR100489250B1 (en) * 2002-10-17 2005-05-17 박웅기 Vaccum Gate Valve
KR100808101B1 (en) * 2006-01-11 2008-02-29 박웅기 Vacuum gate valve

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