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JPS57130027A - Overlapping of packing type projection lithography - Google Patents

Overlapping of packing type projection lithography

Info

Publication number
JPS57130027A
JPS57130027A JP56196406A JP19640681A JPS57130027A JP S57130027 A JPS57130027 A JP S57130027A JP 56196406 A JP56196406 A JP 56196406A JP 19640681 A JP19640681 A JP 19640681A JP S57130027 A JPS57130027 A JP S57130027A
Authority
JP
Japan
Prior art keywords
overlapping
type projection
projection lithography
packing type
packing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56196406A
Other languages
Japanese (ja)
Inventor
Kuringenfueruto Deiitomaaru
Zaide Urufugangu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of JPS57130027A publication Critical patent/JPS57130027A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
JP56196406A 1981-02-02 1981-12-08 Overlapping of packing type projection lithography Pending JPS57130027A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22736281A DD156302A1 (en) 1981-02-02 1981-02-02 PROCESS FOR COVERAGE IN THE STEP-BY-STEP PROJECTION SLITHOGRAPHY

Publications (1)

Publication Number Publication Date
JPS57130027A true JPS57130027A (en) 1982-08-12

Family

ID=5528904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56196406A Pending JPS57130027A (en) 1981-02-02 1981-12-08 Overlapping of packing type projection lithography

Country Status (2)

Country Link
JP (1) JPS57130027A (en)
DD (1) DD156302A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60105232A (en) * 1983-11-14 1985-06-10 Canon Inc Automatic focusing apparatus
JPS60257450A (en) * 1984-05-29 1985-12-19 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン Mask pattern image forming apparatus
JPS61244030A (en) * 1985-04-22 1986-10-30 Nec Corp Pattern generator
JPS62248224A (en) * 1986-04-21 1987-10-29 Nikon Corp Projection exposure device
JPS63121014A (en) * 1986-11-10 1988-05-25 Shibuya Kogyo Co Ltd Marking device using laser light

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60105232A (en) * 1983-11-14 1985-06-10 Canon Inc Automatic focusing apparatus
JPS60257450A (en) * 1984-05-29 1985-12-19 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン Mask pattern image forming apparatus
JPS61244030A (en) * 1985-04-22 1986-10-30 Nec Corp Pattern generator
JPH0515053B2 (en) * 1985-04-22 1993-02-26 Nippon Electric Co
JPS62248224A (en) * 1986-04-21 1987-10-29 Nikon Corp Projection exposure device
JPS63121014A (en) * 1986-11-10 1988-05-25 Shibuya Kogyo Co Ltd Marking device using laser light

Also Published As

Publication number Publication date
DD156302A1 (en) 1982-08-11

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