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JPS57115545A - Method for shielding far ultraviolet rays - Google Patents

Method for shielding far ultraviolet rays

Info

Publication number
JPS57115545A
JPS57115545A JP169381A JP169381A JPS57115545A JP S57115545 A JPS57115545 A JP S57115545A JP 169381 A JP169381 A JP 169381A JP 169381 A JP169381 A JP 169381A JP S57115545 A JPS57115545 A JP S57115545A
Authority
JP
Japan
Prior art keywords
film
pattern
ultraviolet rays
far ultraviolet
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP169381A
Other languages
Japanese (ja)
Inventor
Tsutomu Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP169381A priority Critical patent/JPS57115545A/en
Publication of JPS57115545A publication Critical patent/JPS57115545A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To shield far ultraviolet rays with a long-life mask having high hardness and a thin film low is reflectivity, by using as a film for shielding far ultraviolet rays an alumina film containing >=1 kinds of metal, semimetal elements, or oxides of these elements, or an organic compound. CONSTITUTION:An alumina film 2 containing >=1 kinds selected from metal and semimetal elements, oxide and the like compound of these elements, and organic compounds are formed on a substrate 1 made of transparent synthetic quartz glass. On this film 2 a resist film pattern 3 is formed, and the film 2 is etched by reactive sputtering using the pattern 3 as a mask to form the pattern of the alumina film 2. The obtained mask has the substrate 1 and the pattern 2 both high in hardness, and the film 2 low in reflectivity, so the substrate 1 is insusceptible to scratching in repeated uses when using this resist pattern on a silicon substrate in the contact exposure system, and it can be used for a long term as a mask for shielding far ultraviolet rays.
JP169381A 1981-01-08 1981-01-08 Method for shielding far ultraviolet rays Pending JPS57115545A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP169381A JPS57115545A (en) 1981-01-08 1981-01-08 Method for shielding far ultraviolet rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP169381A JPS57115545A (en) 1981-01-08 1981-01-08 Method for shielding far ultraviolet rays

Publications (1)

Publication Number Publication Date
JPS57115545A true JPS57115545A (en) 1982-07-19

Family

ID=11508601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP169381A Pending JPS57115545A (en) 1981-01-08 1981-01-08 Method for shielding far ultraviolet rays

Country Status (1)

Country Link
JP (1) JPS57115545A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350960A (en) * 1992-02-17 1994-09-27 Mitsubishi Denki Kabushiki Kaisha Electric motor with bobbin columns to prevent bulging coils

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350960A (en) * 1992-02-17 1994-09-27 Mitsubishi Denki Kabushiki Kaisha Electric motor with bobbin columns to prevent bulging coils

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