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JPS57113410A - Thin-film head - Google Patents

Thin-film head

Info

Publication number
JPS57113410A
JPS57113410A JP18617080A JP18617080A JPS57113410A JP S57113410 A JPS57113410 A JP S57113410A JP 18617080 A JP18617080 A JP 18617080A JP 18617080 A JP18617080 A JP 18617080A JP S57113410 A JPS57113410 A JP S57113410A
Authority
JP
Japan
Prior art keywords
layer
film
magnetic material
width
track width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18617080A
Other languages
Japanese (ja)
Inventor
Masaaki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Computer Basic Technology Research Association Corp
Original Assignee
Computer Basic Technology Research Association Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Computer Basic Technology Research Association Corp filed Critical Computer Basic Technology Research Association Corp
Priority to JP18617080A priority Critical patent/JPS57113410A/en
Publication of JPS57113410A publication Critical patent/JPS57113410A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain a head which has precise track width by providing a nonmagnetic insulating protective film at the side part of a magnetic material after working a lower magnetic material layer to prescribed track width once the lower magnetic material layer is formed on a flat substrate, and then forming an upper magnetic material layer. CONSTITUTION:On a flat substrate 1, a lower magnetic matal layer 11 of permalloy is formed flatly. On this layer 11, a photoresist film 12 is formed and after exposure and development, the layer 11 is etched to width which corresponds to track width, thus forming the lower magnetic material layer 11 precisely to the track width 9. An insulating film 13 is formed by sputtering Al2O3, etc., before the resist film 12 is removed, and the film 13 on the layer 11 is removed together with the film 12. A gap material 14 is made of the 2nd insulating nonmagnetic material and on it, an upper magnetic material layer 15 is provided by vapor deposition. On the layer 15, a resist film 16 is formed and then exposure and development are performed to form the layer 15 to width 17 greater than the width 9 of the lower magnetic material. Finally, an insulating protective film 18 of Al2O3, etc., is formed over the entire surface to obtain a thin-film head whose track width is precise without reference to the level difference of the layer 15.
JP18617080A 1980-12-30 1980-12-30 Thin-film head Pending JPS57113410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18617080A JPS57113410A (en) 1980-12-30 1980-12-30 Thin-film head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18617080A JPS57113410A (en) 1980-12-30 1980-12-30 Thin-film head

Publications (1)

Publication Number Publication Date
JPS57113410A true JPS57113410A (en) 1982-07-14

Family

ID=16183611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18617080A Pending JPS57113410A (en) 1980-12-30 1980-12-30 Thin-film head

Country Status (1)

Country Link
JP (1) JPS57113410A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673999A (en) * 1983-08-29 1987-06-16 Sony Corporation Multi channel magnetic transducer head
JPS6329313A (en) * 1986-07-22 1988-02-08 Alps Electric Co Ltd Thin film magnetic head for perpendicular magnetic recording
US4967300A (en) * 1983-10-14 1990-10-30 Applied Magnetics Corporation Magnetic head assembly having a transverse guiding surface formed of a mixture of aluminum oxide and titanium carbide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673999A (en) * 1983-08-29 1987-06-16 Sony Corporation Multi channel magnetic transducer head
US4967300A (en) * 1983-10-14 1990-10-30 Applied Magnetics Corporation Magnetic head assembly having a transverse guiding surface formed of a mixture of aluminum oxide and titanium carbide
JPS6329313A (en) * 1986-07-22 1988-02-08 Alps Electric Co Ltd Thin film magnetic head for perpendicular magnetic recording

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