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JPS568558A - Acceleration detector - Google Patents

Acceleration detector

Info

Publication number
JPS568558A
JPS568558A JP8459979A JP8459979A JPS568558A JP S568558 A JPS568558 A JP S568558A JP 8459979 A JP8459979 A JP 8459979A JP 8459979 A JP8459979 A JP 8459979A JP S568558 A JPS568558 A JP S568558A
Authority
JP
Japan
Prior art keywords
diaphragm
frequency
base
piezoelectric element
acceleration detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8459979A
Other languages
Japanese (ja)
Other versions
JPS5932733B2 (en
Inventor
Arinori Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8459979A priority Critical patent/JPS5932733B2/en
Publication of JPS568558A publication Critical patent/JPS568558A/en
Publication of JPS5932733B2 publication Critical patent/JPS5932733B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE: To obtain an acceleration detector having the high-accuracy frequency characteristics, by forming the thin film piezoelectric element by vapor-depositing the piezoelectric material onto the diaphragm and then utilizing the resonance of the piezoelectric element.
CONSTITUTION: Screw 1a of base 1 is fastened to the measuring subject which generates the vibrating acceleration, and then base 1 is excited in the same vibration mode as the measuring subject. And detection plate 2 formed by vapor-depositing thin film piezoelectric element 2b such as the zinc oxide or the like of several tens μ on the face of diaphragm 2a is fixed to base 1. Now if diaphragm 2a is excited, the average distortion caused in element 2b as well as diaphragm 2a features the frequency characteristics which attenuates gradually before and after the top of the resonance frequency. On the other hand, element 2b generates the voltage proportional to the distortion. Thus the generated voltage to the frequency, i.e., the output voltage also attenuates at the frequency band before and after the top of the resonance frequency. As a result, an acceleration detector having the high-accuracy frequency characteristics can be obtained.
COPYRIGHT: (C)1981,JPO&Japio
JP8459979A 1979-07-02 1979-07-02 acceleration detector Expired JPS5932733B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8459979A JPS5932733B2 (en) 1979-07-02 1979-07-02 acceleration detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8459979A JPS5932733B2 (en) 1979-07-02 1979-07-02 acceleration detector

Publications (2)

Publication Number Publication Date
JPS568558A true JPS568558A (en) 1981-01-28
JPS5932733B2 JPS5932733B2 (en) 1984-08-10

Family

ID=13835140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8459979A Expired JPS5932733B2 (en) 1979-07-02 1979-07-02 acceleration detector

Country Status (1)

Country Link
JP (1) JPS5932733B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055116A (en) * 2000-08-10 2002-02-20 National Institute Of Advanced Industrial & Technology Flexible high-sensitivity ceramic sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07199052A (en) * 1993-12-28 1995-08-04 Olympus Optical Co Ltd Focus detecting method and distance measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055116A (en) * 2000-08-10 2002-02-20 National Institute Of Advanced Industrial & Technology Flexible high-sensitivity ceramic sensor

Also Published As

Publication number Publication date
JPS5932733B2 (en) 1984-08-10

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