JPS5470791A - Thin plate piezoelectric oscillator - Google Patents
Thin plate piezoelectric oscillatorInfo
- Publication number
- JPS5470791A JPS5470791A JP13813077A JP13813077A JPS5470791A JP S5470791 A JPS5470791 A JP S5470791A JP 13813077 A JP13813077 A JP 13813077A JP 13813077 A JP13813077 A JP 13813077A JP S5470791 A JPS5470791 A JP S5470791A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- oscillator
- bridge
- area
- thinned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 abstract 6
- 239000000758 substrate Substances 0.000 abstract 2
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To secure a uniform shape for the fracture surface as well as to realize an ultra-miniature size for the oscillator by forming the thin-thinkness part by giving the half-etching from the single surface of the bridge part of the oscillator bar which is supported and fixed to the piezoelectric substrate. CONSTITUTION:The oscillator is taken out of the etching solution in the course of the etching for its external shape processing, and an etching is given to at least single surface of the thin film which is the masking component at the area of bridge 4. Then the piezoelectric substrate is put into the etching solution again to carry out the U-shaped half-etching. Thus, the area of bridge 4 is thinned. In such way, the fracture becomes easy since the piezoelectric component is thinned in terms of the oross-section slthough the area of bridge 4 features the same shape as conventional. As a result, a uniform shape is ensured for the fracture surface, and also an ultra-miniature size can be obtained for the oscillator as a whole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13813077A JPS5470791A (en) | 1977-11-17 | 1977-11-17 | Thin plate piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13813077A JPS5470791A (en) | 1977-11-17 | 1977-11-17 | Thin plate piezoelectric oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5470791A true JPS5470791A (en) | 1979-06-06 |
Family
ID=15214674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13813077A Pending JPS5470791A (en) | 1977-11-17 | 1977-11-17 | Thin plate piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5470791A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0092515A1 (en) * | 1982-04-14 | 1983-10-26 | Asulab S.A. | Piezoelectric resonator element and process for producing it |
| JP2002299978A (en) * | 2001-03-30 | 2002-10-11 | Toyo Commun Equip Co Ltd | Structure of piezoelectric wafer, piezoelectric vibrating element and method of manufacturing piezoelectric device |
| JP2008060744A (en) * | 2006-08-29 | 2008-03-13 | Nippon Dempa Kogyo Co Ltd | Method for manufacturing vibrating piece, method for manufacturing crystal vibrating device, crystal vibrating piece and crystal vibrating device |
| JP2008199485A (en) * | 2007-02-15 | 2008-08-28 | Seiko Instruments Inc | Manufacturing apparatus for tuning fork crystal oscillator |
| JP2008199294A (en) * | 2007-02-13 | 2008-08-28 | Seiko Instruments Inc | Manufacturing apparatus for tuning fork crystal oscillator |
| JP2008205523A (en) * | 2007-02-16 | 2008-09-04 | Seiko Instruments Inc | Apparatus for manufacturing tuning fork crystal oscillator |
-
1977
- 1977-11-17 JP JP13813077A patent/JPS5470791A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0092515A1 (en) * | 1982-04-14 | 1983-10-26 | Asulab S.A. | Piezoelectric resonator element and process for producing it |
| JP2002299978A (en) * | 2001-03-30 | 2002-10-11 | Toyo Commun Equip Co Ltd | Structure of piezoelectric wafer, piezoelectric vibrating element and method of manufacturing piezoelectric device |
| JP2008060744A (en) * | 2006-08-29 | 2008-03-13 | Nippon Dempa Kogyo Co Ltd | Method for manufacturing vibrating piece, method for manufacturing crystal vibrating device, crystal vibrating piece and crystal vibrating device |
| JP2008199294A (en) * | 2007-02-13 | 2008-08-28 | Seiko Instruments Inc | Manufacturing apparatus for tuning fork crystal oscillator |
| JP2008199485A (en) * | 2007-02-15 | 2008-08-28 | Seiko Instruments Inc | Manufacturing apparatus for tuning fork crystal oscillator |
| JP2008205523A (en) * | 2007-02-16 | 2008-09-04 | Seiko Instruments Inc | Apparatus for manufacturing tuning fork crystal oscillator |
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