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JPS5684470A - Vacuum evaporation - Google Patents

Vacuum evaporation

Info

Publication number
JPS5684470A
JPS5684470A JP16010279A JP16010279A JPS5684470A JP S5684470 A JPS5684470 A JP S5684470A JP 16010279 A JP16010279 A JP 16010279A JP 16010279 A JP16010279 A JP 16010279A JP S5684470 A JPS5684470 A JP S5684470A
Authority
JP
Japan
Prior art keywords
substrate
cans
carried out
evaporation
tapelike
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16010279A
Other languages
Japanese (ja)
Other versions
JPS608304B2 (en
Inventor
Goro Akashi
Ryuji Shirahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP16010279A priority Critical patent/JPS608304B2/en
Priority to DE19803046564 priority patent/DE3046564A1/en
Publication of JPS5684470A publication Critical patent/JPS5684470A/en
Priority to US06/443,996 priority patent/US4403002A/en
Priority to US06/498,441 priority patent/US4454836A/en
Publication of JPS608304B2 publication Critical patent/JPS608304B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To enhance the efficiency of evaporation compared to a conventional process by a method wherein a tapelike substrate is moved between a small gap formed by at least two cans rotating to a same direction under a vacuum atmosphere and obliquely projecting vapor deposition is carried out to the above described substrate from a lower evaporating source. CONSTITUTION:In a low vacuum chamber 1 and a high vacuum chamber 2 provided with a partition wall 6 and at least two cylindrical cans 4, 5 rotating to a same direction, the tapelike substrate 3 is moved from a lower part to an upper part through the narrow gap between the above described cans 4, 5 and a roller 8 and the obliquely projecting vapor deposition of a metal such as Fe, Co or Ni or ferromagnetic alloy is carried out on a surface of the substrate from the evaporating source 9 arranged to a lower part through masks 10, 11 by a conventional method. Thereby, the evaporation is carried out onto both surfaces of the substrate 3 moving along the cans 4, 5 and the evaporation efficiency is enhanced. This method is suitable for producing a magnetic recording medium or the like.
JP16010279A 1979-12-10 1979-12-10 vacuum evaporation method Expired JPS608304B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16010279A JPS608304B2 (en) 1979-12-10 1979-12-10 vacuum evaporation method
DE19803046564 DE3046564A1 (en) 1979-12-10 1980-12-10 Vacuum vapour deposition plant for strip substrates - esp. for depositing magnetic metal or alloy films onto polymer tape to mfr. magnetic recording media
US06/443,996 US4403002A (en) 1979-12-10 1982-11-23 Vacuum evaporating apparatus
US06/498,441 US4454836A (en) 1979-12-10 1983-05-26 Vacuum evaporating apparatus utilizing multiple rotatable cans

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16010279A JPS608304B2 (en) 1979-12-10 1979-12-10 vacuum evaporation method

Publications (2)

Publication Number Publication Date
JPS5684470A true JPS5684470A (en) 1981-07-09
JPS608304B2 JPS608304B2 (en) 1985-03-01

Family

ID=15707886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16010279A Expired JPS608304B2 (en) 1979-12-10 1979-12-10 vacuum evaporation method

Country Status (1)

Country Link
JP (1) JPS608304B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010059519A (en) * 2008-09-05 2010-03-18 Panasonic Corp Vapor deposition apparatus and method for forming vapor deposited film using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010059519A (en) * 2008-09-05 2010-03-18 Panasonic Corp Vapor deposition apparatus and method for forming vapor deposited film using the same

Also Published As

Publication number Publication date
JPS608304B2 (en) 1985-03-01

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