JPS567472A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS567472A JPS567472A JP8321179A JP8321179A JPS567472A JP S567472 A JPS567472 A JP S567472A JP 8321179 A JP8321179 A JP 8321179A JP 8321179 A JP8321179 A JP 8321179A JP S567472 A JPS567472 A JP S567472A
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- atomic
- emitter
- polycrystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 230000006798 recombination Effects 0.000 abstract 1
- 238000005215 recombination Methods 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/30—Devices controlled by electric currents or voltages
- H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H10D48/34—Bipolar devices
- H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To obtain a bipolar transistor having hFE by diffusing and forming a base region on a semiconductor substrate which forms a collector region, and providing an emitter region containing a predetermined impurity concentration and oxygen while positioning on the surface layer thereof to form a heterojunction. CONSTITUTION:A P-type base region 2 is diffused and formed on an N-type Si substrate 1, and while positioning on the surface of the above region, an N-type emitter region 3 having an area smaller than the region 2 is provided. Upon this occasion, the region 3 is constituted by polycrystal Si consisting of 44 atomic % of O2, 0.6 atomic % of P and 55.4 atomic % of Si or by a polycrystal Si region 3b similarly through the N-type region 3a provided in the region 2, and the emitter function is generated in the above region 3. Thus, if a heterojunction bipolar transistor is formed by a POPOS layer, the characteristic of the region 3 approximates to that of SiO2 by containing O2, and the forbidden gap further increases to an extent greater than that of SiO2, the Hall recombination velocity being reduced and a high hFE can be obtained.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54083211A JPS6036108B2 (en) | 1979-06-29 | 1979-06-29 | semiconductor equipment |
CA000333370A CA1136773A (en) | 1978-08-14 | 1979-08-08 | Semiconductor device |
US06/065,262 US4302763A (en) | 1978-08-14 | 1979-08-09 | Semiconductor device |
GB7928105A GB2029096B (en) | 1978-08-14 | 1979-08-13 | Semiconductor devices |
DE19792932976 DE2932976A1 (en) | 1978-08-14 | 1979-08-14 | SEMICONDUCTOR COMPONENT |
FR7920711A FR2435127A1 (en) | 1978-08-14 | 1979-08-14 | SEMICONDUCTOR COMPONENT, IN PARTICULAR BIPOLAR HETEROGENEOUS JUNCTION TRANSISTOR |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54083211A JPS6036108B2 (en) | 1979-06-29 | 1979-06-29 | semiconductor equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS567472A true JPS567472A (en) | 1981-01-26 |
JPS6036108B2 JPS6036108B2 (en) | 1985-08-19 |
Family
ID=13795981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54083211A Expired JPS6036108B2 (en) | 1978-08-14 | 1979-06-29 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6036108B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983003032A1 (en) * | 1982-02-19 | 1983-09-01 | Tanaka, Tomoyuki | Semiconductor device and method of fabricating the same |
JPS61180480A (en) * | 1984-10-02 | 1986-08-13 | イメツク(インタ−・ユニヴア−スイタリア・マイクロ−エレクトロニカ・セントラム)ヴイ・ズイ−・ダブリユ | Bipolar hetero junction transistor and manufacture thereof |
JPH03209774A (en) * | 1990-08-02 | 1991-09-12 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor element |
JPH06101470B2 (en) * | 1984-02-03 | 1994-12-12 | アドバンスト・マイクロ・ディバイシズ・インコ−ポレ−テッド | Integrated circuit device with active elements consisting of bipolar transistors formed in slots |
-
1979
- 1979-06-29 JP JP54083211A patent/JPS6036108B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983003032A1 (en) * | 1982-02-19 | 1983-09-01 | Tanaka, Tomoyuki | Semiconductor device and method of fabricating the same |
EP0101739B1 (en) * | 1982-02-19 | 1990-05-23 | Hitachi, Ltd. | Heterojunction transistor and method of fabricating the same |
JPH06101470B2 (en) * | 1984-02-03 | 1994-12-12 | アドバンスト・マイクロ・ディバイシズ・インコ−ポレ−テッド | Integrated circuit device with active elements consisting of bipolar transistors formed in slots |
JPS61180480A (en) * | 1984-10-02 | 1986-08-13 | イメツク(インタ−・ユニヴア−スイタリア・マイクロ−エレクトロニカ・セントラム)ヴイ・ズイ−・ダブリユ | Bipolar hetero junction transistor and manufacture thereof |
JPH03209774A (en) * | 1990-08-02 | 1991-09-12 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor element |
Also Published As
Publication number | Publication date |
---|---|
JPS6036108B2 (en) | 1985-08-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5586151A (en) | Manufacture of semiconductor integrated circuit | |
GB1169188A (en) | Method of Manufacturing Semiconductor Devices | |
GB1073551A (en) | Integrated circuit comprising a diode and method of making the same | |
JPS567472A (en) | Semiconductor device | |
JPS6477167A (en) | Hetero-bipolar transistor | |
JPS56108255A (en) | Semiconductor integrated circuit | |
GB1209310A (en) | High voltage n-p-n transistors | |
JPS54148486A (en) | Semiconductor device | |
JPS5339081A (en) | Semiconductor device | |
JPS5617067A (en) | Semiconductor switch | |
JPS5538080A (en) | Semiconductor device | |
JPS5787168A (en) | Semiconductor device | |
GB1288029A (en) | ||
JPS5613761A (en) | Preparation of semiconductor device | |
JPS51127685A (en) | Lateral-type semiconductor device | |
JPS55111157A (en) | Semiconductor integrated circuit device | |
JPS5529175A (en) | Planar type transistor | |
JPS5710968A (en) | Semiconductor device | |
JPS55105365A (en) | Semiconductor device | |
JPS5533007A (en) | Semiconductor intergated circuit | |
JPS5382276A (en) | Production of semiconductor device | |
JPS54126478A (en) | Transistor | |
JPS5527682A (en) | Semiconductor device | |
JPS5710963A (en) | Semiconductor device and manufacture thereof | |
JPS54152874A (en) | Semiconductor device and its manufacture |