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JPS5664343A - Preparation of photosensitive resin printing master - Google Patents

Preparation of photosensitive resin printing master

Info

Publication number
JPS5664343A
JPS5664343A JP14012779A JP14012779A JPS5664343A JP S5664343 A JPS5664343 A JP S5664343A JP 14012779 A JP14012779 A JP 14012779A JP 14012779 A JP14012779 A JP 14012779A JP S5664343 A JPS5664343 A JP S5664343A
Authority
JP
Japan
Prior art keywords
photosensitive resin
substrate
resin layer
active light
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14012779A
Other languages
Japanese (ja)
Inventor
Motoaki Takahashi
Akiyoshi Mizuno
Tsutomu Kojima
Nobuo Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP14012779A priority Critical patent/JPS5664343A/en
Publication of JPS5664343A publication Critical patent/JPS5664343A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2035Exposure; Apparatus therefor simultaneous coating and exposure; using a belt mask, e.g. endless

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To obtain a photosensitive resin printing master high in master thickness precision, by feeding a liquid photosensitive resin on a substrate to be moved together with an image carrier at an equal speed on 2 roller surfaces disposed in parallel and illuminating the obtained photosensitive resin layer with an active light. CONSTITUTION:Two rollers 1, 2 is disposed at a specified interval, the circumferential wall is made of a material transmitting an active light and provided with active light source 3 in its inside. Image carrier 4 and substrate 5 for photosensitive resin layer are moved along the circumferential surfaces of rollers 1 and 2 in the same direction according to each arrow at the same peripheral speed, respectively, and photosensitive resin fluid 6 is continuously supplied in the proper position of a space between carrier 4 and substrate 5 to form a photosensitive resin layer of thickness similar to the width of the gap on substrate 5. This photosensitive resin layer is illuminated by the active light from the backside of carrier 4 to form hardened areas A and nonhardened areas B corresponding to the image, and the desired printing master is obtained by processing areas A, B in the subsequent developing process.
JP14012779A 1979-10-30 1979-10-30 Preparation of photosensitive resin printing master Pending JPS5664343A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14012779A JPS5664343A (en) 1979-10-30 1979-10-30 Preparation of photosensitive resin printing master

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14012779A JPS5664343A (en) 1979-10-30 1979-10-30 Preparation of photosensitive resin printing master

Publications (1)

Publication Number Publication Date
JPS5664343A true JPS5664343A (en) 1981-06-01

Family

ID=15261519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14012779A Pending JPS5664343A (en) 1979-10-30 1979-10-30 Preparation of photosensitive resin printing master

Country Status (1)

Country Link
JP (1) JPS5664343A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548884A (en) * 1982-06-11 1985-10-22 E. I. Du Pont De Nemours And Company Registering and exposing sheet substrates using photosensitive liquid
WO2002067058A1 (en) * 2001-02-21 2002-08-29 Siemens Aktiengesellschaft Assembly for the continuous production of a structured, coated substrate
CN103229105A (en) * 2010-11-23 2013-07-31 彩虹科技系统有限公司 Photoimaging
CN108351605A (en) * 2016-01-27 2018-07-31 株式会社Lg化学 Film mask, preparation method, the pattern forming method using film mask and the pattern that is formed by film mask
CN108351603A (en) * 2016-01-27 2018-07-31 株式会社Lg化学 Film mask, preparation method and the pattern forming method using film mask

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548884A (en) * 1982-06-11 1985-10-22 E. I. Du Pont De Nemours And Company Registering and exposing sheet substrates using photosensitive liquid
WO2002067058A1 (en) * 2001-02-21 2002-08-29 Siemens Aktiengesellschaft Assembly for the continuous production of a structured, coated substrate
CN103229105A (en) * 2010-11-23 2013-07-31 彩虹科技系统有限公司 Photoimaging
CN108351605A (en) * 2016-01-27 2018-07-31 株式会社Lg化学 Film mask, preparation method, the pattern forming method using film mask and the pattern that is formed by film mask
CN108351603A (en) * 2016-01-27 2018-07-31 株式会社Lg化学 Film mask, preparation method and the pattern forming method using film mask
JP2018535446A (en) * 2016-01-27 2018-11-29 エルジー・ケム・リミテッド Film mask, manufacturing method thereof, and pattern forming method using the same
EP3410213A4 (en) * 2016-01-27 2019-01-16 LG Chem, Ltd. FILM MASK, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR FORMING A PATTERN USING THE FILM MASK
US10969677B2 (en) 2016-01-27 2021-04-06 Lg Chem, Ltd. Film mask, method for manufacturing same, and method for forming pattern using film mask
US11029596B2 (en) 2016-01-27 2021-06-08 Lg Chem, Ltd. Film mask, method for manufacturing same, and method for forming pattern using film mask and pattern formed thereby

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