JPS564842B2 - - Google Patents
Info
- Publication number
- JPS564842B2 JPS564842B2 JP11688176A JP11688176A JPS564842B2 JP S564842 B2 JPS564842 B2 JP S564842B2 JP 11688176 A JP11688176 A JP 11688176A JP 11688176 A JP11688176 A JP 11688176A JP S564842 B2 JPS564842 B2 JP S564842B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11688176A JPS5342759A (en) | 1976-09-29 | 1976-09-29 | Interference measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11688176A JPS5342759A (en) | 1976-09-29 | 1976-09-29 | Interference measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5342759A JPS5342759A (en) | 1978-04-18 |
| JPS564842B2 true JPS564842B2 (en) | 1981-02-02 |
Family
ID=14697939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11688176A Granted JPS5342759A (en) | 1976-09-29 | 1976-09-29 | Interference measuring method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5342759A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01132935A (en) * | 1987-11-18 | 1989-05-25 | Kawasaki Steel Corp | Method and apparatus for analyzing film |
| JPH01132936A (en) * | 1987-11-18 | 1989-05-25 | Kawasaki Steel Corp | Method and apparatus for analyzing film |
| JP2013228330A (en) * | 2012-04-26 | 2013-11-07 | Jfe Steel Corp | Film thickness measuring apparatus and film thickness measuring method |
-
1976
- 1976-09-29 JP JP11688176A patent/JPS5342759A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5342759A (en) | 1978-04-18 |