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JPS5645020A - Boat loader - Google Patents

Boat loader

Info

Publication number
JPS5645020A
JPS5645020A JP12065379A JP12065379A JPS5645020A JP S5645020 A JPS5645020 A JP S5645020A JP 12065379 A JP12065379 A JP 12065379A JP 12065379 A JP12065379 A JP 12065379A JP S5645020 A JPS5645020 A JP S5645020A
Authority
JP
Japan
Prior art keywords
boat
process tube
wall
motor
driving unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12065379A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12065379A priority Critical patent/JPS5645020A/en
Publication of JPS5645020A publication Critical patent/JPS5645020A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To permit a boat to be inserted into a process tube without touching with its inner wall by allowing the boat to swing about the mounting portion of the boat loader driving unit by the vertical movement of the lever holding one end of the boat. CONSTITUTION:A boat loader driving unit 9 is placed at a position so that a boat 10 never touches with the inner wall of a process tube, and the boat 10 is inserted into the process tube by the rotation of a moving motor 22. When a wafer 12 reaches the central position in the longitudinal direction of the process tube, the motor 22 stops and a swinging motor 30 starts rotation. A swinging cam 29 and a lever 28 cause the boat 10 to swing about a rotating shaft 24. The motor 30 stops when the bottom surface of the periphery of the boat 10 touches with the bottom surface of the inner wall of the process tube. The constitution permits the horizontal delivery of the boat 10 to be ready, because the boat 10, which is held by a boat holding plate 14 of the boat loader driving unit and a roller 26 on the process tube side, has a longer interfulcrum distance. Consequently, the inside diameter of the process tube is unnecessary to enlarge, and the boat 10 can be inserted into the process tube without touching with its inner wall.
JP12065379A 1979-09-21 1979-09-21 Boat loader Pending JPS5645020A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12065379A JPS5645020A (en) 1979-09-21 1979-09-21 Boat loader

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12065379A JPS5645020A (en) 1979-09-21 1979-09-21 Boat loader

Publications (1)

Publication Number Publication Date
JPS5645020A true JPS5645020A (en) 1981-04-24

Family

ID=14791548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12065379A Pending JPS5645020A (en) 1979-09-21 1979-09-21 Boat loader

Country Status (1)

Country Link
JP (1) JPS5645020A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121352A (en) * 1982-01-14 1983-07-19 Nissan Motor Co Ltd Hydraulic pressure controller of automatic speed change gear having torque converter with lockup system
JPS58121351A (en) * 1982-01-14 1983-07-19 Nissan Motor Co Ltd Hydraulic pressure controller of automatic speed change gear having torque converter with lockup system
JPS58218115A (en) * 1982-06-14 1983-12-19 Sony Corp Heat treatment apparatus
JPS5965662A (en) * 1982-10-07 1984-04-13 Honda Motor Co Ltd Direct-coupling control device for torque convertor of automatic transmission for vehicle
JPS59200430A (en) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd Supporter for soft loading of semiconductor
JPS6144832U (en) * 1984-08-24 1986-03-25 日立電子エンジニアリング株式会社 Quartz fork support mechanism for wafer insertion
JPS6184474A (en) * 1984-10-03 1986-04-30 Toyota Motor Corp Hydraulic control device of automatic speed change gear
JPS6438355U (en) * 1987-09-03 1989-03-07

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121352A (en) * 1982-01-14 1983-07-19 Nissan Motor Co Ltd Hydraulic pressure controller of automatic speed change gear having torque converter with lockup system
JPS58121351A (en) * 1982-01-14 1983-07-19 Nissan Motor Co Ltd Hydraulic pressure controller of automatic speed change gear having torque converter with lockup system
JPS6321064B2 (en) * 1982-01-14 1988-05-02 Nissan Motor
JPS6321063B2 (en) * 1982-01-14 1988-05-02 Nissan Motor
JPS58218115A (en) * 1982-06-14 1983-12-19 Sony Corp Heat treatment apparatus
JPS5965662A (en) * 1982-10-07 1984-04-13 Honda Motor Co Ltd Direct-coupling control device for torque convertor of automatic transmission for vehicle
JPH031546B2 (en) * 1982-10-07 1991-01-10 Honda Motor Co Ltd
JPS59200430A (en) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd Supporter for soft loading of semiconductor
JPS6144832U (en) * 1984-08-24 1986-03-25 日立電子エンジニアリング株式会社 Quartz fork support mechanism for wafer insertion
JPH0142341Y2 (en) * 1984-08-24 1989-12-12
JPS6184474A (en) * 1984-10-03 1986-04-30 Toyota Motor Corp Hydraulic control device of automatic speed change gear
JPS6438355U (en) * 1987-09-03 1989-03-07

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