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JPS5637503A - Face accuracy measuring device - Google Patents

Face accuracy measuring device

Info

Publication number
JPS5637503A
JPS5637503A JP11283279A JP11283279A JPS5637503A JP S5637503 A JPS5637503 A JP S5637503A JP 11283279 A JP11283279 A JP 11283279A JP 11283279 A JP11283279 A JP 11283279A JP S5637503 A JPS5637503 A JP S5637503A
Authority
JP
Japan
Prior art keywords
measuring
arithmetic unit
light
laser
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11283279A
Other languages
Japanese (ja)
Inventor
Osamu Miwa
Kiyoharu Mineyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11283279A priority Critical patent/JPS5637503A/en
Publication of JPS5637503A publication Critical patent/JPS5637503A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To accurately measure the face accuracy of the surface to be measured by irradiating laser light to the measuring object mounted to a support and measuring the deviation from the set position of the reflected light.
CONSTITUTION: When the measuring surface of the measuring object 1 assumes the angle having been preset with an angle setter 9 with respect to the laser light, a rotating angle measuring section 5 detects this and the deviation of the laser light of the oscillating section generated by a laser electric power source 8 from the set position of the receiving section of the light reflected from the measuring surface after falling thereto is detected by a reflected light position detector 10 and is sent to an arithmetic unit 12. At the same time, the position of an arm 6 is measured with a laser position measuring device 11 and is sent to the arithmetic unit 12. The result operated with the arithmetic unit 12 is displayed in a display device 13.
COPYRIGHT: (C)1981,JPO&Japio
JP11283279A 1979-09-05 1979-09-05 Face accuracy measuring device Pending JPS5637503A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11283279A JPS5637503A (en) 1979-09-05 1979-09-05 Face accuracy measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11283279A JPS5637503A (en) 1979-09-05 1979-09-05 Face accuracy measuring device

Publications (1)

Publication Number Publication Date
JPS5637503A true JPS5637503A (en) 1981-04-11

Family

ID=14596643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11283279A Pending JPS5637503A (en) 1979-09-05 1979-09-05 Face accuracy measuring device

Country Status (1)

Country Link
JP (1) JPS5637503A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61237005A (en) * 1985-04-13 1986-10-22 Matsushita Electric Works Ltd Detector for wrapage of substrate
JP2009041921A (en) * 2007-08-06 2009-02-26 Mitsutoyo Corp Fine shape measuring device
US7701564B2 (en) 2005-05-18 2010-04-20 Hitachi Global Storage Technologies Netherlands B.V. System and method for angular measurement

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61237005A (en) * 1985-04-13 1986-10-22 Matsushita Electric Works Ltd Detector for wrapage of substrate
US7701564B2 (en) 2005-05-18 2010-04-20 Hitachi Global Storage Technologies Netherlands B.V. System and method for angular measurement
JP2009041921A (en) * 2007-08-06 2009-02-26 Mitsutoyo Corp Fine shape measuring device

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