JPS56153646A - Manufacture of electrode for display panel - Google Patents
Manufacture of electrode for display panelInfo
- Publication number
- JPS56153646A JPS56153646A JP5889180A JP5889180A JPS56153646A JP S56153646 A JPS56153646 A JP S56153646A JP 5889180 A JP5889180 A JP 5889180A JP 5889180 A JP5889180 A JP 5889180A JP S56153646 A JPS56153646 A JP S56153646A
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- etching
- films
- photoregist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 abstract 7
- 239000002184 metal Substances 0.000 abstract 7
- 238000005530 etching Methods 0.000 abstract 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000010949 copper Substances 0.000 abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 1
- 229910001887 tin oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
PURPOSE:To obtain a double-structured electrode by the etching the side surfaces of the metal electrode after forming a transparent electrode film, a metal electrode film, and a photoregist film of a given pattern over a base plate, and etching is performed on these films to form a metal electrode and a transparent electrode. CONSTITUTION:A transparent conductive film 12 made of tin oxide is formed on a glass base plate 11, before a metal electrode film 13, which is made of chromium and used as a cardboard layer, is made to adhere to the film 12 by vapor deposition, and a thick metal electrode film 14 made of copper is formed on the film 13 by vapor deposition. The copper electrode film 14 is coated with a photoregist film of a given pattern. Etching is performed on the metal films 13 and 14 by using the photoregist film as a mask, thereby these films being formed into given electrode patterns. After that, etching is performed on the transparent electrode film 12 by using the photoregist film 15 and the metal electrode films 13 and 14 as a mask, being followed by the etching of the side surfaces of the films 13 and 14 which is performed by using the film 15 as a mask. Consequently, a double-structured electrode can be constituted by one patterning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5889180A JPS56153646A (en) | 1980-04-30 | 1980-04-30 | Manufacture of electrode for display panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5889180A JPS56153646A (en) | 1980-04-30 | 1980-04-30 | Manufacture of electrode for display panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56153646A true JPS56153646A (en) | 1981-11-27 |
Family
ID=13097399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5889180A Pending JPS56153646A (en) | 1980-04-30 | 1980-04-30 | Manufacture of electrode for display panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56153646A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100881695B1 (en) | 2007-08-17 | 2009-02-06 | 삼성전기주식회사 | Capacitor embedded printed circuit board and manufacturing method thereof |
-
1980
- 1980-04-30 JP JP5889180A patent/JPS56153646A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100881695B1 (en) | 2007-08-17 | 2009-02-06 | 삼성전기주식회사 | Capacitor embedded printed circuit board and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5548935A (en) | Forming of electrode pattern | |
| JPS5596951A (en) | Negative for photomask | |
| JPS5569142A (en) | Preventing method for peeling of resist | |
| JPS5446479A (en) | Negative plate for photo mask | |
| JPS56153646A (en) | Manufacture of electrode for display panel | |
| JPS5315755A (en) | Manufacture of display panel electrode | |
| JPS5471987A (en) | Production of photo mask | |
| JPS57207256A (en) | Photomask | |
| JPS5461478A (en) | Chromium plate | |
| JPS56165244A (en) | Manufacture of multilayer thin film electrode | |
| JPS53147531A (en) | Forming method for thin film pattern | |
| JPS5421272A (en) | Metal photo mask | |
| JPS5776546A (en) | Transfer mask for x-ray exposure | |
| JPS57147634A (en) | Photomask blank | |
| JPS5619054A (en) | Metal photomask | |
| JPS56130751A (en) | Manufacture of mask | |
| JPS5646230A (en) | Exposing method | |
| JPS51121019A (en) | Process for forming a transparent film of desired refractive index on the surface of substrate | |
| JPS5433575A (en) | Laminate | |
| JPS5778026A (en) | Production of optical display panel | |
| JPS55163539A (en) | Photo mask | |
| JPS56130750A (en) | Manufacture of mask | |
| JPS5612736A (en) | Formation of fine chromium pattern | |
| JPS5793319A (en) | Liquid crystal display element | |
| JPS6415705A (en) | Production of fine element |