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JPS56142432A - Electrostatic capacitance type pressure sensor - Google Patents

Electrostatic capacitance type pressure sensor

Info

Publication number
JPS56142432A
JPS56142432A JP4565180A JP4565180A JPS56142432A JP S56142432 A JPS56142432 A JP S56142432A JP 4565180 A JP4565180 A JP 4565180A JP 4565180 A JP4565180 A JP 4565180A JP S56142432 A JPS56142432 A JP S56142432A
Authority
JP
Japan
Prior art keywords
electrode
fixing part
substrate
diaphragm
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4565180A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Kazuo Kato
Motohisa Nishihara
Kazuji Yamada
Kiyomitsu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4565180A priority Critical patent/JPS56142432A/en
Publication of JPS56142432A publication Critical patent/JPS56142432A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)

Abstract

PURPOSE:To make possible to simplify construction and reduce size by forming a diaphragm with a film-shaped flexible part and a fixing part around it of a semiconductor material, fixing the diaphragm to a substrate provided with an electrode and leading out the electrode through a groove made in the fixing part. CONSTITUTION:A diaphragm 52 with a film-shaped flexible part 58 and a fixing part 60 around it is made of a semiconductor material such as silicone, while an electrode 62 opposing said flexible part 58 is formed on a substrate 54 made of borosilicate glass, etc. Said fixing part 60 is sticked to said substrate 54 to oppose said flexible part 58 and said electrode 62 at a specified distance, while said electrode 62 is lead out through a tunnel-shaped groove 63 formed in a part of said fixing part 60 so that the electrostatic capacitance between said disphargm 52 and said electrode 62 can be detected. Further, said groove 63 is filled airtightly with low melting point glass, etc., and said substrate 54 is fixed in a case 68 with a pressure introducing port 86, while lead wires 74 and 76 are bonded to terminals 78 and 80 and a cover 84 is sticked to the upper surface of said case 68 airtightly.
JP4565180A 1980-04-09 1980-04-09 Electrostatic capacitance type pressure sensor Pending JPS56142432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4565180A JPS56142432A (en) 1980-04-09 1980-04-09 Electrostatic capacitance type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4565180A JPS56142432A (en) 1980-04-09 1980-04-09 Electrostatic capacitance type pressure sensor

Publications (1)

Publication Number Publication Date
JPS56142432A true JPS56142432A (en) 1981-11-06

Family

ID=12725271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4565180A Pending JPS56142432A (en) 1980-04-09 1980-04-09 Electrostatic capacitance type pressure sensor

Country Status (1)

Country Link
JP (1) JPS56142432A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073425A (en) * 1983-09-16 1985-04-25 メトラー　トレド　アーゲー Force measuring instrument
FR2559898A1 (en) * 1984-02-21 1985-08-23 Vaisala Oy ABSOLUTE PRESSURE CAPACITIVE DETECTOR
WO2016203694A1 (en) * 2015-06-18 2016-12-22 株式会社鷺宮製作所 Pressure switch, pressure sensor, and module for these
US11493396B2 (en) 2018-05-22 2022-11-08 Murata Manufacturing Co., Ltd. Pressure detection element and pressure detection apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503385A (en) * 1973-04-16 1975-01-14
JPS53139586A (en) * 1977-05-10 1978-12-05 Setra Systems Inc Capacitor transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503385A (en) * 1973-04-16 1975-01-14
JPS53139586A (en) * 1977-05-10 1978-12-05 Setra Systems Inc Capacitor transducer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073425A (en) * 1983-09-16 1985-04-25 メトラー　トレド　アーゲー Force measuring instrument
FR2559898A1 (en) * 1984-02-21 1985-08-23 Vaisala Oy ABSOLUTE PRESSURE CAPACITIVE DETECTOR
JPS60195829A (en) * 1984-02-21 1985-10-04 バイサラ・オーワイ Capacitive absolute pressure detector
WO2016203694A1 (en) * 2015-06-18 2016-12-22 株式会社鷺宮製作所 Pressure switch, pressure sensor, and module for these
JPWO2016203694A1 (en) * 2015-06-18 2017-11-24 株式会社鷺宮製作所 Pressure switch, pressure sensor, and modules thereof
US11493396B2 (en) 2018-05-22 2022-11-08 Murata Manufacturing Co., Ltd. Pressure detection element and pressure detection apparatus

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