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JPS56141531A - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
JPS56141531A
JPS56141531A JP4434880A JP4434880A JPS56141531A JP S56141531 A JPS56141531 A JP S56141531A JP 4434880 A JP4434880 A JP 4434880A JP 4434880 A JP4434880 A JP 4434880A JP S56141531 A JPS56141531 A JP S56141531A
Authority
JP
Japan
Prior art keywords
pressure
space
sensing element
substrate
pressure sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4434880A
Other languages
Japanese (ja)
Inventor
Akira Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4434880A priority Critical patent/JPS56141531A/en
Publication of JPS56141531A publication Critical patent/JPS56141531A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To eliminate the need for transmission pipe and lower the cost by forming a sealed space in part of a semiconductor pressure sensing element, a substrate fixing this element and their joining parts, and building a reference pressure in this space. CONSTITUTION:The space 14 formed by a concave semiconductor pressure sensing element 1 and a substrate 2 is sealed perfectly. The pressure sensing element 1 and substrate 2 which are joined are supported by supporting bars 15 by leaving a prescribed spacing from a package 6. If such constitution is disposed in fluid to which pressure P is applied, the pressure P is transmitted to the pressure sensing element 1 in the direction of an arrow through the hole 7 of a cover 8. As a result, this element 1 changes its resistances value according to the differential pressure between the pressure P and the pressure of the space 14, that is, the atmospheric pressure as a reference pressure and this change is obtained as an electric signal through lead wires 10, 11.
JP4434880A 1980-04-04 1980-04-04 Pressure transducer Pending JPS56141531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4434880A JPS56141531A (en) 1980-04-04 1980-04-04 Pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4434880A JPS56141531A (en) 1980-04-04 1980-04-04 Pressure transducer

Publications (1)

Publication Number Publication Date
JPS56141531A true JPS56141531A (en) 1981-11-05

Family

ID=12688997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4434880A Pending JPS56141531A (en) 1980-04-04 1980-04-04 Pressure transducer

Country Status (1)

Country Link
JP (1) JPS56141531A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156465A (en) * 1984-08-28 1986-03-22 Toshiba Corp Semiconductor pressure converter
US5249469A (en) * 1988-05-17 1993-10-05 Jonsson & Billquist Development Ab Pressure gauge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156465A (en) * 1984-08-28 1986-03-22 Toshiba Corp Semiconductor pressure converter
US5249469A (en) * 1988-05-17 1993-10-05 Jonsson & Billquist Development Ab Pressure gauge

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