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JPS5562779A - Preparation of amorphous photoconductive portion material - Google Patents

Preparation of amorphous photoconductive portion material

Info

Publication number
JPS5562779A
JPS5562779A JP13545678A JP13545678A JPS5562779A JP S5562779 A JPS5562779 A JP S5562779A JP 13545678 A JP13545678 A JP 13545678A JP 13545678 A JP13545678 A JP 13545678A JP S5562779 A JPS5562779 A JP S5562779A
Authority
JP
Japan
Prior art keywords
temperature
layer
electrophotography
heat treatment
support body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13545678A
Other languages
Japanese (ja)
Other versions
JPS6215855B2 (en
Inventor
Tadaharu Fukuda
Katsumi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13545678A priority Critical patent/JPS5562779A/en
Publication of JPS5562779A publication Critical patent/JPS5562779A/en
Publication of JPS6215855B2 publication Critical patent/JPS6215855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE: To satisfy characteristics as required, by thermally treating amorphous Si(a-Si) with unsatisfactory electric characteristics at a specified temperature Ta and in a specified atmosphere as a photoconductive layer used for electrophotography, etc.
CONSTITUTION: When forming an a-photoconductive Si-layer, the temperature Ts of a support body in Al, etc. is selected in a range to not more than 100°C from 25∼20°C, particularly 50°C, and the temperature Ta of heat treatment after making up the layer is choosed in a range of 100∼450°C, particulary 200∼350°C. The time of heat treatment differs according to film thickness, area and the kinds of the support body, but is decided in 15∼180min. CO2, NO2, NH3, etc. are used in one kind or a mixed shape as annealing atmosphere forming substance containing O or N. With an a-Si thermally treated under such conditions, electric, optical characteristics are uniform ranging over large area, and it does not change with the passage of time. It is further excellent in electrostatic characteristics, solvent resisting properties, cleaning properties, etc., and the characterisitics of electrophotography hardly deteriorate by repeated use.
COPYRIGHT: (C)1980,JPO&Japio
JP13545678A 1978-11-01 1978-11-01 Preparation of amorphous photoconductive portion material Granted JPS5562779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13545678A JPS5562779A (en) 1978-11-01 1978-11-01 Preparation of amorphous photoconductive portion material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13545678A JPS5562779A (en) 1978-11-01 1978-11-01 Preparation of amorphous photoconductive portion material

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59148312A Division JPS6068349A (en) 1984-07-16 1984-07-16 Apparatus for preparing amorphous photoconductive member

Publications (2)

Publication Number Publication Date
JPS5562779A true JPS5562779A (en) 1980-05-12
JPS6215855B2 JPS6215855B2 (en) 1987-04-09

Family

ID=15152126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13545678A Granted JPS5562779A (en) 1978-11-01 1978-11-01 Preparation of amorphous photoconductive portion material

Country Status (1)

Country Link
JP (1) JPS5562779A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982001261A1 (en) * 1980-09-25 1982-04-15 Kk Canon Photoconductive member
JPS6090342A (en) * 1983-10-25 1985-05-21 Matsushita Electric Ind Co Ltd Production of photoconductor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PHILOSOPHICA MAGAZINE=1977 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982001261A1 (en) * 1980-09-25 1982-04-15 Kk Canon Photoconductive member
JPS6090342A (en) * 1983-10-25 1985-05-21 Matsushita Electric Ind Co Ltd Production of photoconductor

Also Published As

Publication number Publication date
JPS6215855B2 (en) 1987-04-09

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