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JPS5546636A - Vibrator - Google Patents

Vibrator

Info

Publication number
JPS5546636A
JPS5546636A JP11975978A JP11975978A JPS5546636A JP S5546636 A JPS5546636 A JP S5546636A JP 11975978 A JP11975978 A JP 11975978A JP 11975978 A JP11975978 A JP 11975978A JP S5546636 A JPS5546636 A JP S5546636A
Authority
JP
Japan
Prior art keywords
main vibration
chemical etching
film
press punching
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11975978A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ogino
Hideo Hoshi
Hirofumi Kawashima
Hiroshi Onuki
Osamu Ochiai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP11975978A priority Critical patent/JPS5546636A/en
Publication of JPS5546636A publication Critical patent/JPS5546636A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain an inexpensive vibrator which is easily packaged by simplifying relatively-inexpensive work such as press punching and chemical etching by forming an electrode on a piezoelectric film by bonding a thin film on the main vibration plane of a turning fork pattern. CONSTITUTION:As base material 1, a constantly-elastic material of Elinvar, Ni- span c, etc., is formed continuously in a tuning fork shape by press punching or chemical etching. Then, piezo-electric thin film 2 of ZnO, etc., is formed by a thin- film forming method such as sputtering. Growth is carried out a crystal-axial direction perpendicular to the main vibration surface. In addition, driving electrode 3 is bonded to the main vibration surface.
JP11975978A 1978-09-28 1978-09-28 Vibrator Pending JPS5546636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11975978A JPS5546636A (en) 1978-09-28 1978-09-28 Vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11975978A JPS5546636A (en) 1978-09-28 1978-09-28 Vibrator

Publications (1)

Publication Number Publication Date
JPS5546636A true JPS5546636A (en) 1980-04-01

Family

ID=14769458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11975978A Pending JPS5546636A (en) 1978-09-28 1978-09-28 Vibrator

Country Status (1)

Country Link
JP (1) JPS5546636A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4410827A (en) * 1980-04-24 1983-10-18 Kabushiki Kaisha Suwa Seikosha Mode coupled notched tuning fork type quartz crystal resonator
US7950120B2 (en) * 2006-07-20 2011-05-31 Nihon Dempa Kogyo Co., Ltd. Method for manufacturing piezoelectric resonator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4410827A (en) * 1980-04-24 1983-10-18 Kabushiki Kaisha Suwa Seikosha Mode coupled notched tuning fork type quartz crystal resonator
US7950120B2 (en) * 2006-07-20 2011-05-31 Nihon Dempa Kogyo Co., Ltd. Method for manufacturing piezoelectric resonator

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