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JPS55144637A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS55144637A
JPS55144637A JP5322879A JP5322879A JPS55144637A JP S55144637 A JPS55144637 A JP S55144637A JP 5322879 A JP5322879 A JP 5322879A JP 5322879 A JP5322879 A JP 5322879A JP S55144637 A JPS55144637 A JP S55144637A
Authority
JP
Japan
Prior art keywords
filament
change
stems
wehnelt
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5322879A
Other languages
Japanese (ja)
Other versions
JPS596029B2 (en
Inventor
Takeshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP54053228A priority Critical patent/JPS596029B2/en
Publication of JPS55144637A publication Critical patent/JPS55144637A/en
Publication of JPS596029B2 publication Critical patent/JPS596029B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To suppress a change of beam current, by supporting a Wehnelt electrode with a supporter consisting of materials with a small coefficient of thermal expansion. CONSTITUTION:Both ends of a filament 6 are fixed respectively to ends of stems 3a and 3b. While the other ends of the stems are engaged respectively with electrodes 7a, 7b connected to a filament heating power source. A Wehnelt electode 8 is supported by a supporter 10 consisting of materials with a small coefficient of thermal expansion. In this way, a change of distance between the Wehnelt electrode 8 and the filament 6 can be decreased when the filament 6 is heated, thus capable of suppressing a change of beam current.
JP54053228A 1979-04-28 1979-04-28 electron gun Expired JPS596029B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54053228A JPS596029B2 (en) 1979-04-28 1979-04-28 electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54053228A JPS596029B2 (en) 1979-04-28 1979-04-28 electron gun

Publications (2)

Publication Number Publication Date
JPS55144637A true JPS55144637A (en) 1980-11-11
JPS596029B2 JPS596029B2 (en) 1984-02-08

Family

ID=12936955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54053228A Expired JPS596029B2 (en) 1979-04-28 1979-04-28 electron gun

Country Status (1)

Country Link
JP (1) JPS596029B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016027575A1 (en) * 2014-08-20 2016-02-25 株式会社島津製作所 Electron source and x-ray tube equipped therewith

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016027575A1 (en) * 2014-08-20 2016-02-25 株式会社島津製作所 Electron source and x-ray tube equipped therewith
JPWO2016027575A1 (en) * 2014-08-20 2017-05-25 株式会社島津製作所 Electron source and X-ray tube provided with the same

Also Published As

Publication number Publication date
JPS596029B2 (en) 1984-02-08

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