[go: up one dir, main page]

JPS5485741A - Production of optical stripe filters - Google Patents

Production of optical stripe filters

Info

Publication number
JPS5485741A
JPS5485741A JP15401877A JP15401877A JPS5485741A JP S5485741 A JPS5485741 A JP S5485741A JP 15401877 A JP15401877 A JP 15401877A JP 15401877 A JP15401877 A JP 15401877A JP S5485741 A JPS5485741 A JP S5485741A
Authority
JP
Japan
Prior art keywords
film
filter
substrate
production
dichroic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15401877A
Other languages
Japanese (ja)
Other versions
JPS6018961B2 (en
Inventor
Kosaku Yano
Shinji Fujiwara
Osamu Eguchi
Eiichiro Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP52154018A priority Critical patent/JPS6018961B2/en
Publication of JPS5485741A publication Critical patent/JPS5485741A/en
Publication of JPS6018961B2 publication Critical patent/JPS6018961B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)

Abstract

PURPOSE: To solve the problem that apectral characteristics degrade owing to change of properties in reverse etching between glass substrate and filter by providing a heat treatment process.
CONSTITUTION: A copper thin film 2 is formed as a metal thin film on a glass substrate 1. Resist 3 is coated thereon and the film 2 is photoetched to stripe form. Next, this substrate 1 is heat-treated particularly at 350°C to 450°C in the state where the reverse etching material does not oxidize such as in a vacuum or inert gas. Thereafter, a dichroic filter 4 is formed on the substrate 1 and film 2. Next, the substrate 1 is dipped in an aqueous FeCl3 solution as the etching solution of the film 2, by which the film 2 and the filter 4 thereon are removed, whereby the dichroic stripe filter is obtained.
COPYRIGHT: (C)1979,JPO&Japio
JP52154018A 1977-12-20 1977-12-20 Manufacturing method of optical stripe filter Expired JPS6018961B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52154018A JPS6018961B2 (en) 1977-12-20 1977-12-20 Manufacturing method of optical stripe filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52154018A JPS6018961B2 (en) 1977-12-20 1977-12-20 Manufacturing method of optical stripe filter

Publications (2)

Publication Number Publication Date
JPS5485741A true JPS5485741A (en) 1979-07-07
JPS6018961B2 JPS6018961B2 (en) 1985-05-14

Family

ID=15575100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52154018A Expired JPS6018961B2 (en) 1977-12-20 1977-12-20 Manufacturing method of optical stripe filter

Country Status (1)

Country Link
JP (1) JPS6018961B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119406U (en) * 1983-01-31 1984-08-11 大日本印刷株式会社 colored image element

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270037A (en) * 1985-09-25 1987-03-31 福山パ−ル紙工株式会社 Composite sheet for molding heat-resistant vessel
JPS6442213U (en) * 1987-09-04 1989-03-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119406U (en) * 1983-01-31 1984-08-11 大日本印刷株式会社 colored image element

Also Published As

Publication number Publication date
JPS6018961B2 (en) 1985-05-14

Similar Documents

Publication Publication Date Title
JPS5485741A (en) Production of optical stripe filters
JPS52120782A (en) Manufacture of semiconductor device
JPS53102628A (en) Manufacture for parallel type stripe filter
JPS52119172A (en) Forming method of fine pattern
JPS5248468A (en) Process for production of semiconductor device
JPS5240968A (en) Process for production of semiconductor device
JPS5461478A (en) Chromium plate
JPS5521192A (en) Manufacture of semiconductor device
JPS53113730A (en) Metallic pattern forming method
JPS5219297A (en) Method of manufacturing a metal film resistor
JPS5232671A (en) Manufacturing process of semiconductor device
JPS5380167A (en) Manufacture of semiconductor device
JPS5383598A (en) Glass substrate
JPS5240962A (en) Fluorescent tube
JPS5214371A (en) Flattening method of concave-convex surface
JPS5227597A (en) High molecular piezo-electric component
JPS53101975A (en) Treating method of semiconductor substrates
JPS52117559A (en) Mask formation method
JPS51122457A (en) Micro processing method of transparent electrode film
JPS5258899A (en) Production of dielectric thin film
JPS52146121A (en) Manufacture for stripe filters
JPS5211765A (en) Method of manufacturing semiconductor device
JPS5243372A (en) Process for production of semiconductor
JPS52127771A (en) Patern formation method of tin oxide film
JPS5382269A (en) Production of mask