JPS5477088A - Semiconductor photo detector - Google Patents
Semiconductor photo detectorInfo
- Publication number
- JPS5477088A JPS5477088A JP14417977A JP14417977A JPS5477088A JP S5477088 A JPS5477088 A JP S5477088A JP 14417977 A JP14417977 A JP 14417977A JP 14417977 A JP14417977 A JP 14417977A JP S5477088 A JPS5477088 A JP S5477088A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- concave parts
- light
- electric field
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- 230000005684 electric field Effects 0.000 abstract 2
- 239000000969 carrier Substances 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
Landscapes
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To realize a semiconductor photo detector of good performance by providing groove form concave parts in a semiconductor substrate, diffusion-forming a P+ layer and an N+ layer therein and reverse-biasing between these regions thereby forming a depletion layer.
CONSTITUTION: Concave parts 9 are formed in a semiconductor substrate 10 and a P+ layer 21 and an n+ layer 22 and doped on the surface thereof. The substrate surface other than the concave parts 8 is covered with an insulation film 13. Metal films 23, 24, terminals 16, 17 are provided on the layers 21, 22 and a bias power source VB is connected to let a depletion layer shown by dot-dash lines be formed. Then, an electric field E of broken lines is produced between the layers 21, 22, yielding a light absorbing layer. When light enters the light absorbing layer through the film 13, light exciting carriers are generated and are accelerated by the electric field E, then photo current proportional to the intensity of the incident light flows into a load resistance RL.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14417977A JPS5477088A (en) | 1977-12-01 | 1977-12-01 | Semiconductor photo detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14417977A JPS5477088A (en) | 1977-12-01 | 1977-12-01 | Semiconductor photo detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5477088A true JPS5477088A (en) | 1979-06-20 |
Family
ID=15356027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14417977A Pending JPS5477088A (en) | 1977-12-01 | 1977-12-01 | Semiconductor photo detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5477088A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60262473A (en) * | 1984-06-08 | 1985-12-25 | Fujitsu Ltd | Optical semiconductor device |
| JPS62202568A (en) * | 1986-12-26 | 1987-09-07 | Shunpei Yamazaki | Photoelectric conversion device |
| JPS6316678A (en) * | 1986-12-26 | 1988-01-23 | Shunpei Yamazaki | Aphotoelectric converter |
| JPH01220868A (en) * | 1988-02-29 | 1989-09-04 | Hikari Gijutsu Kenkyu Kaihatsu Kk | Horizontal light-receiving element |
| JPH02377A (en) * | 1988-08-12 | 1990-01-05 | Shunpei Yamazaki | Photoelectric converting device |
-
1977
- 1977-12-01 JP JP14417977A patent/JPS5477088A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60262473A (en) * | 1984-06-08 | 1985-12-25 | Fujitsu Ltd | Optical semiconductor device |
| JPS62202568A (en) * | 1986-12-26 | 1987-09-07 | Shunpei Yamazaki | Photoelectric conversion device |
| JPS6316678A (en) * | 1986-12-26 | 1988-01-23 | Shunpei Yamazaki | Aphotoelectric converter |
| JPH0568866B2 (en) * | 1986-12-26 | 1993-09-29 | Handotai Energy Kenkyusho | |
| JPH01220868A (en) * | 1988-02-29 | 1989-09-04 | Hikari Gijutsu Kenkyu Kaihatsu Kk | Horizontal light-receiving element |
| JPH02377A (en) * | 1988-08-12 | 1990-01-05 | Shunpei Yamazaki | Photoelectric converting device |
| JPH0559590B2 (en) * | 1988-08-12 | 1993-08-31 | Shunpei Yamazaki |
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