JPS5452483A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPS5452483A JPS5452483A JP11885077A JP11885077A JPS5452483A JP S5452483 A JPS5452483 A JP S5452483A JP 11885077 A JP11885077 A JP 11885077A JP 11885077 A JP11885077 A JP 11885077A JP S5452483 A JPS5452483 A JP S5452483A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- resistor
- layer
- depth
- addition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To make it possible to form a resistor on an integrated circuit without increasing the number of processes for the formation.
CONSTITUTION: As for a MISFET integrated circuit, parts which can be used as a resistor are separation layers 14 in addition to P--type well 2. Shallow P-type layer 14 is formed by implanting B ions and at the same time, resistor layer 15 is also formed. Layer 15 is connected to metal electrode 13 via P+-type layer 16. In this way, the amount of implanted ions is controlled within the range until the achievement of separation so as to increase specific resistance and since the depth can be made below 1μ, the sheet resistance can be increased. In addition, since depth (xj) is not deep, width (wj) hard to be reduced becomes nearly equal to (w) because of ion-implantation, the control can be nearly attanined as the mask is, and the integration density improves through fining, so that the resistance value will be uniformed
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11885077A JPS5452483A (en) | 1977-10-03 | 1977-10-03 | Semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11885077A JPS5452483A (en) | 1977-10-03 | 1977-10-03 | Semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5452483A true JPS5452483A (en) | 1979-04-25 |
| JPS6131633B2 JPS6131633B2 (en) | 1986-07-21 |
Family
ID=14746675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11885077A Granted JPS5452483A (en) | 1977-10-03 | 1977-10-03 | Semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5452483A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60254652A (en) * | 1984-05-31 | 1985-12-16 | Fujitsu Ltd | Semiconductor memory device |
| JPH027474A (en) * | 1988-06-24 | 1990-01-11 | Sony Corp | Semiconductor device |
| JP2007324381A (en) * | 2006-06-01 | 2007-12-13 | Sanyo Electric Co Ltd | Semiconductor device |
| JP2015133398A (en) * | 2014-01-14 | 2015-07-23 | 富士通セミコンダクター株式会社 | Semiconductor integrated circuit device, and method of manufacturing the same |
-
1977
- 1977-10-03 JP JP11885077A patent/JPS5452483A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60254652A (en) * | 1984-05-31 | 1985-12-16 | Fujitsu Ltd | Semiconductor memory device |
| JPH027474A (en) * | 1988-06-24 | 1990-01-11 | Sony Corp | Semiconductor device |
| JP2007324381A (en) * | 2006-06-01 | 2007-12-13 | Sanyo Electric Co Ltd | Semiconductor device |
| JP2015133398A (en) * | 2014-01-14 | 2015-07-23 | 富士通セミコンダクター株式会社 | Semiconductor integrated circuit device, and method of manufacturing the same |
| US9935097B2 (en) | 2014-01-14 | 2018-04-03 | Mie Fujitsu Semiconductor Limited | Semiconductor integrated circuit apparatus and manufacturing method for same |
| US10236286B2 (en) | 2014-01-14 | 2019-03-19 | Mie Fujitsu Semiconductor Limited | Semiconductor integrated circuit apparatus and manufacturing method for same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6131633B2 (en) | 1986-07-21 |
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