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JPS5437474A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS5437474A
JPS5437474A JP10340977A JP10340977A JPS5437474A JP S5437474 A JPS5437474 A JP S5437474A JP 10340977 A JP10340977 A JP 10340977A JP 10340977 A JP10340977 A JP 10340977A JP S5437474 A JPS5437474 A JP S5437474A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
beam exposure
increase
rectangular pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10340977A
Other languages
Japanese (ja)
Inventor
Masahiro Okabe
Yasuo Furukawa
Akio Ito
Toshihiro Ishizuka
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10340977A priority Critical patent/JPS5437474A/en
Publication of JPS5437474A publication Critical patent/JPS5437474A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To increase the exposure accuracy through an oblique scanning of the electron beam against the rectangular pattern.
COPYRIGHT: (C)1979,JPO&Japio
JP10340977A 1977-08-27 1977-08-27 Electron beam exposure device Pending JPS5437474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10340977A JPS5437474A (en) 1977-08-27 1977-08-27 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10340977A JPS5437474A (en) 1977-08-27 1977-08-27 Electron beam exposure device

Publications (1)

Publication Number Publication Date
JPS5437474A true JPS5437474A (en) 1979-03-19

Family

ID=14353243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10340977A Pending JPS5437474A (en) 1977-08-27 1977-08-27 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS5437474A (en)

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