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JPS54151063A - Coordinate measuring apparatus - Google Patents

Coordinate measuring apparatus

Info

Publication number
JPS54151063A
JPS54151063A JP5883178A JP5883178A JPS54151063A JP S54151063 A JPS54151063 A JP S54151063A JP 5883178 A JP5883178 A JP 5883178A JP 5883178 A JP5883178 A JP 5883178A JP S54151063 A JPS54151063 A JP S54151063A
Authority
JP
Japan
Prior art keywords
pattern
light
output
laser
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5883178A
Other languages
Japanese (ja)
Inventor
Kiichi Takamoto
Nobuo Shimazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5883178A priority Critical patent/JPS54151063A/en
Publication of JPS54151063A publication Critical patent/JPS54151063A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To automatically detect the coordinate positions of patterns up to high accuracy and high resolution by vibrating electron beam or laser beam light, radiating the same to a pattern, detecting the secondary electron or reflected light thereof and making frequency analysis.
CONSTITUTION: This is the apparatus of measuring coordinate positions of semiconductor elements such as LSIs in patterns or the like, wherein a sample 2 having a pattern 1 is placed on a sample table 3. When the light beam from a laser light source 5 is kept constantly vibrated and the sample table 3 is moved in this state in an X direction at a fixed speed, then the output of a frequency analyzer 12 becomes 0 on account of the principle of a vibration method when the pattern 1 positions at the vibration center of the light beam. This output is applied to a next stage voltage comparator 14, where zero output is detected and the movement quantity obtainable from a laser length measuring device 4 at this moment is read as the coordinate position of the pattern 1.
COPYRIGHT: (C)1979,JPO&Japio
JP5883178A 1978-05-19 1978-05-19 Coordinate measuring apparatus Pending JPS54151063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5883178A JPS54151063A (en) 1978-05-19 1978-05-19 Coordinate measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5883178A JPS54151063A (en) 1978-05-19 1978-05-19 Coordinate measuring apparatus

Publications (1)

Publication Number Publication Date
JPS54151063A true JPS54151063A (en) 1979-11-27

Family

ID=13095584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5883178A Pending JPS54151063A (en) 1978-05-19 1978-05-19 Coordinate measuring apparatus

Country Status (1)

Country Link
JP (1) JPS54151063A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143334A (en) * 1987-11-30 1989-06-05 Toshiba Mach Co Ltd Method and apparatus for inspecting defect of mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143334A (en) * 1987-11-30 1989-06-05 Toshiba Mach Co Ltd Method and apparatus for inspecting defect of mask

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