JPS54149341A - Etching apparatus - Google Patents
Etching apparatusInfo
- Publication number
- JPS54149341A JPS54149341A JP5780378A JP5780378A JPS54149341A JP S54149341 A JPS54149341 A JP S54149341A JP 5780378 A JP5780378 A JP 5780378A JP 5780378 A JP5780378 A JP 5780378A JP S54149341 A JPS54149341 A JP S54149341A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- etching
- products
- loss
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title abstract 7
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 239000007921 spray Substances 0.000 abstract 1
- 238000005507 spraying Methods 0.000 abstract 1
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE: To enable even etching to be carried out and to minimize the amt. of an etching soln. to be supplied, in an apparatus for spraying the soln. while moving products to be etched, by dividing an etching soln. loss into evaporation loss and adhesion loss and by supplying the soln. separately.
CONSTITUTION: An etching soln. in etching soln. storage tank 3 is sprayed from spray nozzles 1 with pump 2 to etch products to be etched. At this time, a soln. loss due to evaporation is constant to time. A soln. loss due to adhesion to the products, however, depends upon the no. and size of the products. Accordingly, etching soln. supply pump 4 is used as a constant rate pump to constantly supply the soln. evaporated, and the soln. reduced by adhesion is constantly supplied with auxiliary pump 5 every no. of the products.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5780378A JPS54149341A (en) | 1978-05-15 | 1978-05-15 | Etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5780378A JPS54149341A (en) | 1978-05-15 | 1978-05-15 | Etching apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54149341A true JPS54149341A (en) | 1979-11-22 |
Family
ID=13066063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5780378A Pending JPS54149341A (en) | 1978-05-15 | 1978-05-15 | Etching apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54149341A (en) |
-
1978
- 1978-05-15 JP JP5780378A patent/JPS54149341A/en active Pending
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