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JPS54124754A - Width measuring apparatus of rectangular holes - Google Patents

Width measuring apparatus of rectangular holes

Info

Publication number
JPS54124754A
JPS54124754A JP3103978A JP3103978A JPS54124754A JP S54124754 A JPS54124754 A JP S54124754A JP 3103978 A JP3103978 A JP 3103978A JP 3103978 A JP3103978 A JP 3103978A JP S54124754 A JPS54124754 A JP S54124754A
Authority
JP
Japan
Prior art keywords
measured
laser
shadow mask
detector
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3103978A
Other languages
Japanese (ja)
Inventor
Minoru Nemoto
Kazunari Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3103978A priority Critical patent/JPS54124754A/en
Publication of JPS54124754A publication Critical patent/JPS54124754A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To perform measurement continuously and automaically with good accuracy by using a laser and a diffracted image detector.
CONSTITUTION: A laser 7 is disposed to the underside of a moving table 6 on which the shadow mask 5 to be measured is placed, and a detector 8 assembled with a photo array is disposed to the upper side. The shadow mask 5 to be measured is placed on the moving table 6 and while it is being moved in the A or B direction, a laser source 10 is energized to radiate laser light as a spot 15. The image having been diffracted by the rectangular hole 14 of the shadow mask 5 to be measured is detected with the detector 8 and the width of the rectangular hole 14 is detected and displayed through specified operation in an arithmetic display device 13. Thereby, the continuous and automatic measurement may be accomplished without producing the variations in measured values owing to personal errors.
COPYRIGHT: (C)1979,JPO&Japio
JP3103978A 1978-03-20 1978-03-20 Width measuring apparatus of rectangular holes Pending JPS54124754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3103978A JPS54124754A (en) 1978-03-20 1978-03-20 Width measuring apparatus of rectangular holes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3103978A JPS54124754A (en) 1978-03-20 1978-03-20 Width measuring apparatus of rectangular holes

Publications (1)

Publication Number Publication Date
JPS54124754A true JPS54124754A (en) 1979-09-27

Family

ID=12320339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3103978A Pending JPS54124754A (en) 1978-03-20 1978-03-20 Width measuring apparatus of rectangular holes

Country Status (1)

Country Link
JP (1) JPS54124754A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970007396A (en) * 1995-07-21 1997-02-21 케네쓰 어베이트 Parabolic laser exploration system and method for shadow mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970007396A (en) * 1995-07-21 1997-02-21 케네쓰 어베이트 Parabolic laser exploration system and method for shadow mask
US5636029A (en) * 1995-07-21 1997-06-03 Bmc Industries, Inc. Elliptical laser probe for shadow mask

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