[go: up one dir, main page]

JPS5376745A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5376745A
JPS5376745A JP15303976A JP15303976A JPS5376745A JP S5376745 A JPS5376745 A JP S5376745A JP 15303976 A JP15303976 A JP 15303976A JP 15303976 A JP15303976 A JP 15303976A JP S5376745 A JPS5376745 A JP S5376745A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
resists
providing
developing solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15303976A
Other languages
Japanese (ja)
Inventor
Masao Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15303976A priority Critical patent/JPS5376745A/en
Publication of JPS5376745A publication Critical patent/JPS5376745A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To form overhangs in resists and facilitate lifting-off by using two resists of different film reduction characteristics in a developing solution and providing an inermediate layer preventing mixing of both.
COPYRIGHT: (C)1978,JPO&Japio
JP15303976A 1976-12-20 1976-12-20 Production of semiconductor device Pending JPS5376745A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15303976A JPS5376745A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15303976A JPS5376745A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5376745A true JPS5376745A (en) 1978-07-07

Family

ID=15553629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15303976A Pending JPS5376745A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5376745A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944824A (en) * 1982-08-02 1984-03-13 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン Lift off method of foring self-aligning contact

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944824A (en) * 1982-08-02 1984-03-13 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン Lift off method of foring self-aligning contact

Similar Documents

Publication Publication Date Title
JPS5218175A (en) Circuit pattern formation method and its device
JPS5376745A (en) Production of semiconductor device
JPS52149978A (en) Developing treatment method of photoresist film
JPS5389673A (en) Fine pattern forming method of semiconductor device
JPS53123678A (en) Manufacture of field effect semiconductor device of insulation gate type
JPS5271978A (en) Production of semiconductor device
JPS52153669A (en) Photo mask of semiconductor integrated circuit
JPS5365079A (en) Semiconductor device
JPS5346283A (en) Character exposure apparatus
JPS5363595A (en) Magnetic bubble device
JPS52153668A (en) Photo mask of semiconductor integrated circuit
JPS5348458A (en) Production of semiconductor device
JPS527660A (en) Modulation circuit
JPS5353275A (en) Semiconductor device
JPS5313364A (en) Manufacture of semiconductor device
JPS5244570A (en) Photoetching method
JPS5354325A (en) Combustion control device
JPS53147468A (en) Production of semiconductor device
JPS5311573A (en) Production of semiconductor device
JPS5361968A (en) Production of semiconductor device
JPS52179A (en) Method of fabricating semiconductor
JPS5372482A (en) Manufacture for semiconductor device
JPS5243427A (en) Method for photoengraving light sensitive resin
JPS5366375A (en) Manufacture for semiconductor device
JPS52101968A (en) Preparation of semiconductor device